Micro Mechanical Valve Series VM1000

Application Weight (g) Model Actuator Polyacetal roller 190 270 280 280 290 380 370 380 360 VFM350-02-00 Basic Mechanical operation Manual operation VM-08D VM-06DS VM-06D VM-05D VM-02CS VM-02C VM-01CS VM-01C Roller lever VFM350-02-01 VFM350-02-01S Hard steel roller One way roller lever VFM350-02-02 VFM350-02-02S Polyacetal roller Hard steel roller Straight plunger VFM350-02-05 Polyacetal

VM

Application Model Actuator Basic VFM350-02-00 VFM350-02-01 VFM350-02-01S VFM350-02-02 VFM350-02-02S Mechanical operation Polyacetal roller Hard steel roller VM-08D VM-06DS VM-06D VM-05D VM-02CS VM-02C VM-01CS VM-01C Roller lever Polyacetal roller Hard steel roller One way roller lever Straight plunger VFM350-02-05 Polyacetal roller Hard steel roller Roller plunger VFM350-02-06 VFM350-02

Table of Contents

M1 AS1001FG-23 AS1001FG-04 AS1001FG-06 AS2001FG-04 AS2001FG-06 AS2051FG-06 AS2051FG-08 AS3001FG-06 AS3001FG-08 AS3001FG-10 AS3001FG-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1

2

Spare Parts Symbol Size 01 1/8" 03 5/32" 05 3/16" 07 1/4" 09 5/16" 11 3/8" 13 1/2" KDM6 Use the part number below to order the gasket for sealing 10-32UNF thread. Gasket for 10-32UNF: M-5G2 KDM A 05 00 KQ2 H Tube Tube Type Port size/Applicable tubing O.D.

Tamper Proof and Flat Head Screw

Type Metric sizes Inch sizes Elbow Universal 2 3 3.2 01 23 1/8 5/32 3/16 1/4 5/16 3/8 1/2 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 Control type Meter-out Meter-in 0 1 Use 1/8 tubing.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 05, 06, 07, 08, 09, 10 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 23, 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321F AS331F AS421F AS431F Inlet pressure: 0.5 MPa Inlet pressure

Booster Regulator/Air Tank

VEX SRH Product Not Applicable to the ASME Standard ASME Standards Compliant Product SRP VBAT 05 N A 1 E V X105 Product not applicable to the ASME standard VBAT 05 N 1 A X11 SV SRF ITV Tank internal capacity Tank capacity Option Symbol Internal capacity 05 5 L 10 10 L 20 22 L 38 38 L Material Option IC Symbol Option Nil None V Drain valve Symbol Internal capacity 05 5 L 10 10 L Symbol Option

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Note) Made to Order Refer to page 743 for details. 1/4 standard Metric size Inch size 3/8 standard 3.2 01 03 05 07 09 11 13 23 04 06 08 10 12 1/8" 1/2 standard 5/32" 4 Caution 3/16" 6 With One-touch fittings 1/4" 8 Be sure to read this before handling the products.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Elbow Universal 2 3 Metric size Inch size 3.2 23 01 1/8" 04 06 08 10 12 03 05 07 09 11 13 4 5/32" 6 3/16" Control 8 1/4" Meter-out Meter-in 0 1 10 5/16" 12 3/8" Use 1/8" tube. 1/2" M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 U10/32 N01 N02 N03 N04 Needle Valve/Flow Characteristics AS1201FG, AS1211FG AS2201FG-

Table of Contents

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

1

INDEX 42 Metal Base Plug-in Type 50 Side Ported D-sub Connector Flat Ribbon Cable PC Wiring Series SY3000/5000/7000 Type 51 Bottom Ported RoHS How to Order Manifold SS5Y 50 3 F D 05 C6 1 q w e r t y u i o !

CATALOG

50 BM1-06 63 BA-01 20 BA-02 25 BA-32 32 BA-04 40 BA-05 50 BA-06 63 BA-08 80 BA-10 100 Courtesy of Steven Engineering, Inc. !

Vacuum System Peripherals:

Individual Specifications (Symbol , , , ) Combination of supply and release valve Ejector module nozzle diameter Combination of supply valve and release valve 05 0.7 mm 0.5 mm 07 Supply valve N.C. (VJ114) N.C. (VJ314) Release valve Symbol Type N.C. (VJ114) K1 1.0 mm 10 N.O.

MU

Bore size (mm) 63 50 40 32 25 Mounting bracket MU-L06 MU-F06 MU-L05 MU-F05 MU-L04 MU-F04 MU-L03 MU-F03 MU-L02 MU-F02 (1) Foot Flange Note 1) When ordering foot bracket, order 2 pieces per cylinder. Note 2) Body mounting bolts are attached with the foot style and flange style. Auto Switch Mounting Bracket Part No. Note Mounting bracket part no.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Cable Specifications Piping Specifications and Weights Conductor area 0.15 mm2 (AWG26) Model 02 N02 F02 C01 A2 B2 Port size R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 Insulator O.D. 1.0 mm Color Brown, Blue, Black, White, Gray (5-core) Sheath Finished O.D. 3.5 Materials of parts in contact with fluid Pressure sensor: Stainless steel 630, Fitting: Stainless steel 304 Weight Body (Rear ported) 51

MU

Bore size (mm) 25 32 40 50 63 Mounting bracket MU-L02 MU-F02 MU-L03 MU-F03 MU-L04 MU-F04 MU-L05 MU-F05 MU-L06 MU-F06 (1) Foot Flange Note 1) When ordering foot bracket, order 2 pieces per cylinder. Note 2) Body mounting bolts are attached with the foot style and flange style. Auto Switch Mounting Bracket Part No. Note Mounting bracket part no.

MU

Size Bracket 25 32 40 50 63 Foot (1) MU-L02 MU-F02 MU-L03 MU-F03 MU-L04 MU-F04 MU-L05 MU-F05 MU-L06 MU-F06 Flange Note 1) When ordering foot brackets, 2pcs. should be ordered for each cylinder. Note 2) Body mounting bolts are packed with the foot style and flange style. Precautions Be sure to read before handling.

Secondary Batteries

*Specifications and dimensions for the 90-series are the same as standard products. 3 EX124 Integrated Type (for Output) Serial Transmission System 90-SV-X166 Series IP65 Compliant How to Order Manifold Tie-rod base SS5V 2 V D 05 U 10S 90 X166 Series compatible with secondary batteries Specifications 1. Special SI unit: EX124D-SMJ1-X182 (Negative common) 2.

V

Wiring 04 04 Specs 05 05 Applicable up to 8 Solenoids .. .. Use Manifold Specs Form to 08 08 specify wiring 26 Pole (P) Connector Symbol Station Note 02 2 Double .. .. Wiring 10 10 Specs 11 11 Applicable up to 20 Solenoids .. .. Use Manifold Specs Form to 20 20 specify wiring Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 !

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Inch' size I0 1/4" 03/8' 05/16" 05/16" diameter . . 03/S' 051160 1/2" Flbw."rate tlin\~ 330 750 350 C ,oP/rolled flow . (A,MR~~N '(lmjQ' . 180 600 1100 1190 [Ereo flaw) Effettive ~IOnal 11.6 17 2.9 5.2 18.4 5.4 9.3 'ttrea mm 2 . N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .