Micro Mechanical Valve Series VM1000

Application Weight (g) Model Actuator Polyacetal roller 190 270 280 280 290 380 370 380 360 VFM350-02-00 Basic Mechanical operation Manual operation VM-08D VM-06DS VM-06D VM-05D VM-02CS VM-02C VM-01CS VM-01C Roller lever VFM350-02-01 VFM350-02-01S Hard steel roller One way roller lever VFM350-02-02 VFM350-02-02S Polyacetal roller Hard steel roller Straight plunger VFM350-02-05 Polyacetal

VM

Application Model Actuator Basic VFM350-02-00 VFM350-02-01 VFM350-02-01S VFM350-02-02 VFM350-02-02S Mechanical operation Polyacetal roller Hard steel roller VM-08D VM-06DS VM-06D VM-05D VM-02CS VM-02C VM-01CS VM-01C Roller lever Polyacetal roller Hard steel roller One way roller lever Straight plunger VFM350-02-05 Polyacetal roller Hard steel roller Roller plunger VFM350-02-06 VFM350-02

Ozone Resistant

80-VM230-02-00 80-VM430-01-00 80-VZM450-01-00 80-VZM550-01-00 80-VFM350-02-00 80-VHS400 80-VHS500 80-VHS2500 80-VHS3500 80-VHS4500 80-VHS2000 80-VHS3000 80-VHS4000 80-VEX12080-VEX13080-VEX15080-VEX170VEX1A33B VEX1B33B 80-VEX123380-VEX153380-VEX173380-VEX350 80-AR435 to 935 4, 5-port solenoid valve 3-port solenoid valve Directional control valves Mechanical valve 3-port residual pressure

Table of Contents

M M AKH03-00 AKH07-00 AKH09-00 AKH11-00 AKH13-00 5/32 1/4 5/16 3/8 1/2 3 6 10 17 24 2.8 6.5 14 24 34 9.3 12 15.2 18.5 21.7 33.5 39 53.3 63.6 70.2 12.7 13.6 18.5 21 22 L Metric Size Male connector type: AKH H (Hexagon width across flats) Connection thread R Applicable tubing O.D.

2

(MPa) 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) AR50(K)-B AR60(K)-B 0.25 0.25 Outlet pressure (MPa) Outlet pressure (MPa) Set point Set point 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 281 Regulator Series AR10-A Regulator Series

Table of Contents

Arrangement example: Paddle set for IF300-06-00 (Part number are not existed.)

PFxx-OMO0004CN

[cm] -70No.PF-OMO0004CN-E PFMB7201-02 PFMB7201-N02 17 2x Rc1/4 NPT1/4 -71No.PF-OMO0004CN-E PFMB7201-02L PFMB7201-N02L 2x Rc1/4 NPT1/4 17 -72No.PF-OMO0004CN-E PFMB7201S-02 PFMB7201S-N02 2x Rc1/4 NPT1/4 -73No.PF-OMO0004CN-E PFMB7201S-02L PFMB7201S-N02L 2x Rc1/4 NPT1/4 17 -74No.PF-OMO0004CN-E PFMB7201-F02 21 2x G1/4 -75No.PF-OMO0004CN-E PFMB7201-F02L 2x G1/4 21 -76No.PF-OMO0004CN-E PFMB7201S-F02

PFxx-OMJ0005CN

LED UP) (DOWN) (OUT2) (OUT1) SET) (OUT ) (IN ) (OUT1) OUT1 ON (OUT2) OUT2 ON (SET) INOUT LED (OUT1)/ (UP) ON/OFF (DOWN) ON/OFF DIN -13No.PF-OMJ0005CN-I BAA B BAC 13.2 mm (71) C A A B -14No.PF-OMJ0005CN-I 0.50.05 Nm (ZS-33-M) (ZS-33-MS) M34 1.2 mm (71) DINZS-33-R DIN DIN0.40.05 Nm DIN DIN F02(G1/4)DIN DIN -15No.PF-OMJ0005CN-I () () Rc(NPT)1/8 79 Nm Rc(NPT)1/4 1214

Tamper Proof and Flat Head Screw

Franklin Road Indianapolis, Indiana 46226 1-800-SMC-SMC1 (762-7621) www.smcusa.com US98-E456/E457 4/00 Tamper Proof and Flat Head Screw Driver Adjustable Speed Controller Tamper Proof Type Flow rate can be adjusted with a special tool For extra protection against inadvertent operation Special tool Part no.: AS-T-1 Flat Head Screw Driver Adjustable Type Flat head screw driver Flow rate can

CATALOG

-00 3/16-18 17.46 34 15.08 16.5 3.5 6 KQE06-00 M14x1 17 34.5 15 17 13.1/13.1 1/4 KQE07-00 5/16-18 17.46 34.5 15.08 17 4.6 8 KQE08-00 M16x1 19 38 17 18.5 26.1/18 5/16 KQE09-00 3/4-16 22.23 38 19.8 18.5 6 10 KQE10-00 M20x1 24 42.5 21 21 41.5/29.5 3/8 KQE11-00 1/8-14 25.4 42.5 23 21 7 12 KQE12-00 M22x1 27 44.5 23 22 58.3/46.1 1/2 KQE13-00 1-12 28.6 44.5 26.2 22 9.6 16 KQE16-00 M26x1.5 30 49.5

1

P A1 B1 1(P) port Pressure gauge option 4(A) port (P controlled type, A port regulation) M1 00 N0 No pressure gauge 2(B) port (P controlled type, B port regulation) Pressure gauge with MPa display Note 2) Pressure gauge with psi display Mounting screw Base gasket Connector gasket SY50M-M1(Without pressure gauge) SY50M-00/N0(With pressure gauge) SY70M-M1(Without pressure gauge) SY70M-00/N0

V

4 9.5 8.9 10 39.3 5 14.1 13 4.2 B O D Y S I Z E AQ240F-06-00 6 11.5 11 10 43.9 6 15.2 14 5.2 AQ340F-06-00 6 11.5 11 11.8 45.2 6.3 20 14 10.4 2 M5 3 18 T U B E C O N N E C T I O N F Built-in One Touch Tube Connection OD S I Z E D I M E N S I O N S S E R I E S AQ240F/340F W I T H E X H A U S T TA K E O F F Metric 04 4mm 06 6mm Imperial 07 1/4 E X H A U S T P O R T Metric 00 Built-in Silencer

Vacuum System Peripherals:

-00-2 Polycarbonate Part no: G46-00-00-3 GZ46 GZ46-2 Material Brass (Electroless nickel plated) Brass Precautions Brass With attachment cover assembly Be sure to read before handling.

Secondary Batteries

Style P.33 P.34 Auto Switches D-M9BW(V)SDPC-900 D-M9BW(V)L-900 D-Y7BW(V)L-900 D-A90L-900 D-Z80L-900 P.62 P.63 P.64 P.65 P.65 P.66 Solid State Auto Switch Direct Mounting Style 90-JA 90-JB 90-JS 90-RB/RBC 92-MSQ P.35 P.35 P.35 P.36 P.37 Reed Auto Switch Direct Mounting Style Auto Switch Mounting Bracket Part No. 1 Single Valve/Sub-plate Type IP67 Compliant How to Order 90-SV Series 90 SV W1 00

PSxx-OMH0002CN

0 0.40.50.69.910.0 000.10.20.30.40.50.69.910.0 ISE75H-(15 MPa) 00 0 0.50.614.915.0 000.10.20.30.40.50.614.915.0 0 0 ISE75 00.410.0 MPa 010.0 MPa ISE75H 00.515.0 MPa 015.0 MPa 0 SETOUT1 -19No.PS-OMH0002CN-D 8 SET 2 SET 2 1. 1) OUT1 1. 2) OUT1 1. 3) OUT2 -27-67 1. 4) OUT2 -27-67 2. 3. 4.

•

If the sound of air leakage can be heard, or If the equipment does not operate properly, stop operation and confirm thai It is mounted correctly. 6.0isassembly and alteration prohibited. 00 not disassemble the unit or rnake any alterations to it. 7 Series ASP Specific Product Precautions .~ Be sure to read before handling.

Number of Ports: 3 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 00 (Basic), Suffix: None

Number of Ports: 2 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 00 (Basic), Suffix: None

Number of Ports: 2 Port, Body Option: U (w/Bottom Mouinting Thread), Port Size: F02 (G 1/4), Actuator Type: 00 (Basic), Suffix: None

Body Option: 0 (Internal Pilot), Port Size: F02 (G1/4), Style: 00 (Basic Style)