Micro Mechanical Valve Series VM1000

Application Weight (g) Actuator Model Polyacetal roller 300 310 320 320 330 420 410 420 400 Basic VFM250-02-00 Mechanical operation Manual operation VM-08D VM-06DS VM-06D VM-05D VM-02CS VM-02C VM-01CS VM-01C Roller lever VFM250-02-01 VFM250-02-01S Hard steel roller One way roller lever VFM250-02-02 VFM250-02-02S Polyacetal roller Hard steel roller Straight plunger VFM250-02-05 Polyacetal

VM

Application Model Actuator Basic VFM250-02-00 VFM250-02-01 VFM250-02-01S VFM250-02-02 VFM250-02-02S Mechanical operation Polyacetal roller Hard steel roller VM-08D VM-06DS VM-06D VM-05D VM-02CS VM-02C VM-01CS VM-01C Roller lever Polyacetal roller Hard steel roller One way roller lever Straight plunger VFM250-02-05 Polyacetal roller Hard steel roller Roller plunger VFM250-02-06 VFM250-02

Table of Contents

M M AKH03-00 AKH07-00 AKH09-00 AKH11-00 AKH13-00 5/32 1/4 5/16 3/8 1/2 3 6 10 17 24 2.8 6.5 14 24 34 9.3 12 15.2 18.5 21.7 33.5 39 53.3 63.6 70.2 12.7 13.6 18.5 21 22 L Metric Size Male connector type: AKH H (Hexagon width across flats) Connection thread R Applicable tubing O.D.

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Width across flat Width across flat Effective area (mm2) Weight (g) L M d 3 x Applicable tubing Model H1 H2 I.D. 2.5 3 4 6 7.5 8 9 10 13 d 4 4 6 8 10 10 12 12 16 KFG2T0425-00 KFG2T0403-00 KFG2T0604-00 KFG2T0806-00 KFG2T1075-00 KFG2T1008-00 KFG2T1209-00 KFG2T1210-00 KFG2T1613-00 1.6 2.6 6 17 30 35 45 57 101 1.8 2.3 3.3 5.3 6.8 7.3 8 9 12 11 10 18 39 67 65 71 67 122 7 8 13.3 5 H2 H2 H2 H1 M

CATALOG

-00 3/16-18 17.46 34 15.08 16.5 3.5 6 KQE06-00 M14x1 17 34.5 15 17 13.1/13.1 1/4 KQE07-00 5/16-18 17.46 34.5 15.08 17 4.6 8 KQE08-00 M16x1 19 38 17 18.5 26.1/18 5/16 KQE09-00 3/4-16 22.23 38 19.8 18.5 6 10 KQE10-00 M20x1 24 42.5 21 21 41.5/29.5 3/8 KQE11-00 1/8-14 25.4 42.5 23 21 7 12 KQE12-00 M22x1 27 44.5 23 22 58.3/46.1 1/2 KQE13-00 1-12 28.6 44.5 26.2 22 9.6 16 KQE16-00 M26x1.5 30 49.5

Mechanical Valves Series NVM, NVFM, NVZNI

; 2ports Port Size 02 = 1/a"NPT HOW TO ORDER NON-EXCHANG EABLE ACTUATORS NVM230-N02-35 : 9u31 yslve %" NPT, 3 position, closed center w/90'SelectorNVM25O-NO2-35 : Dual Valve %" NPT, 3 position, open center W90' Selector' -Specify Color (black, green, red) NVM230-N025 NVM2s0-N02-35 NVM220-N02-00 230-N02-00 F.O.F.'

IIIIIII

; 2ports Port Size 02 = 1/a"NPT HOW TO ORDER NON-EXCHANG EABLE ACTUATORS NVM230-N02-35 : 9u31 yslve %" NPT, 3 position, closed center w/90'SelectorNVM25O-NO2-35 : Dual Valve %" NPT, 3 position, open center W90' Selector' -Specify Color (black, green, red) NVM230-N025 NVM2s0-N02-35 NVM220-N02-00 230-N02-00 F.O.F.'

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4 9.5 8.9 10 39.3 5 14.1 13 4.2 B O D Y S I Z E AQ240F-06-00 6 11.5 11 10 43.9 6 15.2 14 5.2 AQ340F-06-00 6 11.5 11 11.8 45.2 6.3 20 14 10.4 2 M5 3 18 T U B E C O N N E C T I O N F Built-in One Touch Tube Connection OD S I Z E D I M E N S I O N S S E R I E S AQ240F/340F W I T H E X H A U S T TA K E O F F Metric 04 4mm 06 6mm Imperial 07 1/4 E X H A U S T P O R T Metric 00 Built-in Silencer

Table of Contents

Arrangement example: Paddle set for IF300-06-00 (Part number are not existed.)

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www.stevenengineering.com I 5.16 AIR PREPARATION MODULAR TYPE ACCESSORIES END BLOCK ADAPTOR Port Sizes: M5 ~ 1Rc Allows for easy installation and maintenance H O W T O O R D E R P I P I N G A D A P T O R E10-M5 1000 S E R I E S E20-N01 2000 S E R I E S E20-N02 2000 S E R I E S E20-N03 2000 S E R I E S E30-N02 3000 S E R I E S E30-N03 3000 S E R I E S E30-N04 3000 S E R I E S E40-N03 4000

lPSMt

NOTES: r Split ranging allows position control using 3 to I psi or 9 to 15 psi as signal pressure Within 0.5% for each 7.5 osi Within 1% for each 1.5 psi Within 0.5% for each 1.5 psi Within 0.5% for each 1.5 psi Within 0.3% for each 1.5 psi " For 1/2 split range add 1.5% to these values Use clean, dry, oil free air Recommended for air preparation: NAC 2030-N02 or NAC 2040-N02 filter, coalescer

lPSMt

NOTES: r Split ranging allows position control using 3 to I psi or 9 to 15 psi as signal pressure Within 0.5% for each 7.5 osi Within 1% for each 1.5 psi Within 0.5% for each 1.5 psi Within 0.5% for each 1.5 psi Within 0.3% for each 1.5 psi " For 1/2 split range add 1.5% to these values Use clean, dry, oil free air Recommended for air preparation: NAC 2030-N02 or NAC 2040-N02 filter, coalescer

Tamper Proof and Flat Head Screw

AS231F-N02 NPT1/4 20, 25, 32, 40 AS321F-N02 AS331F-N02 NPT1/4 40, 50, 63 AS321F-N03 AS331F-N03 NPT3/8 40, 50, 63 AS421F-N04 AS431F-N04 NPT1/2 63, 80, 100 Note 1) Elbow type only.

PFxx-OMO0004CN

[cm] -70No.PF-OMO0004CN-E PFMB7201-02 PFMB7201-N02 17 2x Rc1/4 NPT1/4 -71No.PF-OMO0004CN-E PFMB7201-02L PFMB7201-N02L 2x Rc1/4 NPT1/4 17 -72No.PF-OMO0004CN-E PFMB7201S-02 PFMB7201S-N02 2x Rc1/4 NPT1/4 -73No.PF-OMO0004CN-E PFMB7201S-02L PFMB7201S-N02L 2x Rc1/4 NPT1/4 17 -74No.PF-OMO0004CN-E PFMB7201-F02 21 2x G1/4 -75No.PF-OMO0004CN-E PFMB7201-F02L 2x G1/4 21 -76No.PF-OMO0004CN-E PFMB7201S-F02

ARX Series

Flow rate (SCFM) Flow rate (SCFM) ARX21-N01 ARX21-N02 50.8 50.8 43.5 43.5 Secondary pressure (psig) Secondary pressure (psig) 36.3 36.3 29 29 21.8 21.8 15 15 7.3 7.3 00 1.8 3.5 5.3 7.1 8.8 10.6 12.4 14.1 15.9 17.7 0 0 1.8 3.5 5.3 7.1 8.8 10.6 12.4 14.1 15.9 17.7 Flow rate (SCFM) Flow rate (SCFM) Pressure Characteristics Conditions: Supply pressure 290 psig Secondary pressure 116 psig Flow

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(MPa) 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) AR50(K)-B AR60(K)-B 0.25 0.25 Outlet pressure (MPa) Outlet pressure (MPa) Set point Set point 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 281 Regulator Series AR10-A Regulator Series

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P A1 B1 1(P) port Pressure gauge option 4(A) port (P controlled type, A port regulation) M1 00 N0 No pressure gauge 2(B) port (P controlled type, B port regulation) Pressure gauge with MPa display Note 2) Pressure gauge with psi display Mounting screw Base gasket Connector gasket SY50M-M1(Without pressure gauge) SY50M-00/N0(With pressure gauge) SY70M-M1(Without pressure gauge) SY70M-00/N0

Process Pump <Fluororesin Type> Series PA3000

AN200-N02 for NPT.

Vacuum System Peripherals:

-00-2 Polycarbonate Part no: G46-00-00-3 GZ46 GZ46-2 Material Brass (Electroless nickel plated) Brass Precautions Brass With attachment cover assembly Be sure to read before handling.

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D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away