Series VFM is a 5 port, compact, mechanical valve available in a rubber (VFM300) or metal (VFM200) seal style. This series has a large flow capacity (Cv 1.0) and a high cycle rate. The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 0.1 to 1.0MPa, Effective area (Cv): 18mm 2 (1.0), Maximum frequency (

VM

-33 VFM250-02-34R VM-34CR Red VM-34CB Black VFM250-02-34B Twist selector (2 position) VM-34CG Green VFM250-02-34G VM-34CY Yellow VFM250-02-34Y VM-36C Key selector (2 position) VFM250-02-36 Note 1) Actuator replacement is available for all types.

VM

-06S Toggle lever Red VFM250-02-08 VM-30CR VFM250-02-30R Push button (Mushroom) Black Green Yellow VM-30CB VFM250-02-30B VM-30CG VFM250-02-30G VM-30CY VFM250-02-30Y VM-32CR VFM250-02-32R Red Manual operation VM-32CB VFM250-02-32B Push button (Extended) Black Green Yellow VM-32CG VFM250-02-32G VM-32CY VFM250-02-32Y With a set of red, black, green, yellow Push button (Flush) Red VM-33C VFM250

VM

-33 VFM250-02-34R VM-34CR Red VM-34CB Black VFM250-02-34B Twist selector (2 position) VM-34CG Green VFM250-02-34G VM-34CY Yellow VFM250-02-34Y VM-36C Key selector (2 position) VFM250-02-36 Note 1) Actuator replacement is available for all types.

Micro Mechanical Valve Series VM1000

VFM250-02-32Y VM-33C VM-34CR VM-34CB VM-34CG VM-34CY VM-36C Push button (Flush) VFM250-02-33 347 VFM250-02-34R Red Black VFM250-02-34B Twist selector (2 position) 348 Green VFM250-02-34G Yellow VFM250-02-34Y Key selector (2 position) VFM250-02-36 367 Note 1) Actuator replacement is available for all types.

VFM300

-02-08 VM-30CR VFM250-02-30R Push button (Mushroom) Black Green Yellow VM-30CB VFM250-02-30B VM-30CG VFM250-02-30G VM-30CY VFM250-02-30Y Red VM-32CR VFM250-02-32R Manual operation Push button (Extended) Black Green Yellow VM-32CB VFM250-02-32B VM-32CG VFM250-02-32G VM-32CY VFM250-02-32Y With a set of red, black, green, yellow VM-33C VFM250-02-33 Push button (Flush) Red VM-34CR VFM250-02-34R

1

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

2

1/8 13 (12.7) 7.2 23 (24) AS22l1FSl-02-03(S) 5/32" 8.2 AS22l1FSl-02-07(S) 1/4" 11.2 23.4 32.5 (32.8) 24 (24) AS22l1FSl-02-09(S) 5/16" 13.2 23.9 33 (33.3) 14.2 24 (25) AS22l1FSl-02-11(S) 3/8" 15.5 26.4 35.5 (35.8) 15.6 25 (26) AS32l1FSl-02-07(S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS32l1FSl-02-09(S) 5/16" 13.2 22.7 33 14.2 AS32l1FSl-02-11

CATALOG

1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44-02 1/4 60 48 36 54 Y41-02 1/4 14 39 24 Y44-03 3/8 60 48 36 54 Y41-03 3/8 14 39 24 Y54-03 3/8 72 62 40 62 Y51-02 1/4 14 24 41

Table of Contents

(mm) (1) Weight (g) D1 D2 L1 L2 A M Nylon Urethane KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 M5 x 0.8 7 9.5 16 13.5 15 13 3.5 3.5 2.7 10 19 4 1 8 1 4 22 26 23 25 10 14 7 11.5 10.4 10 18 16 4.2 4.2 M5 x 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 3.5 3.5 16 14.5 17 23 25.5

Table of Contents

VX2122-02 VX2-02 VX2322-02 VX2132-02 VX2232-02 VX2332-02 VX2242-02 VX2342-02 VX2-03 VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360

5 Port Solenoid Valve Series SY3000/5000/7000/9000

20.5 121.6 [126] 139.4 124.6 161.2 111.6 79.6 33 33 33 33 11.5 11.5 13.5 13.5 11.5 11.5 13.5 13.5 26.5 26.5 26.5 26.5 Note) Refer to page 340 for dimensions of connector types. 139 Series SY3000/5000/7000/9000 Dimensions: Series SY7000 [ ]: AC 3 position closed center / exhaust center / pressure center Grommet (G), (H): SY7 40(R)G H 02 03 3 4 5 (A, B port) 3/8,1/4 21 13.5 (Light/surge voltage

Table of Contents

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

ZP

D D 10 14 B B 24 31 A 8 11 A 7 10 Weight (g) Weight (g) Weight (g) Weight (g) 3.4 4.4 6.8 8.2 11 26.5 3.4 4.4 6.8 8.2 11 26.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List 14.5 33 14.5 33 Vacuum Inlet Dimensions ZP3-T035U;J -B3 ZP3-T035U;K -B3 Barb fitting One-touch fitting 5 7 ZP3-T015U; -02 ZP3-T02U; -02 ZP3-T035U; -02 ZP3-T015U; -U2 ZP3-T02U; -U2 ZP3-T035U; -U2 M3

KJ

33 !4 !5 !

Table of Contents

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc

VFR

L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-MDIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR251001 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

V100

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil no. PVT317-001GBPVT317-G PVT317-001GB-L06 PVT317-G-06 PVT317-001CBPVT317-C Coil assembly with terminal part no.

4/5 Port Solenoid Valve

A, B port) (Light/surge voltage suppressor) 80 [87] 57.5 [64.5] + 64.6 42.1 36.5 25.5 20 12 43.6 22 22 11.5 34 18 1/4 (R1, R2 port) 31.5 63 L plug connector (L): SYJ7240-L01 02 M plug connector (M): SYJ7240-M01 02 DIN terminal (D): SYJ7240-D01 02 M8 connector (WO): SYJ7240-WO01 02 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 91 83.5 57.5 [64.5] 72.2 42.1 62 M8 x 1 57.1 (

Table of Contents

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.