VFA3000

port) 2 x 18 (R1, R2 port) 1764 Series VFA3000 5 Port Air Operated Valve Dimensions: Body Ported 2 position double: VFA3230-01 02 2 x 18 (Pilot port) 2 x 4.3 (Mounting hole for manifold) Max. 3 Max. 3 2 x 4.2 (Mounting hole) 3 x , 14 18 (P , A, B port) 2-3 (Breathing port) 2 x 3 2 x 18 (R1, R2 port) SYA 3 position closed center/exhaust center/pressure center: VFA3 30-X1 3 4 5 01 02 SYJA

2

Dimensions P.386 Spare Parts P.390 KQ2 Metric size P.383 KDM6 How to Order P.392 Variations P.393 Dimensions P.394 KDM Metric size P.391 How to Order P.404 Variations P.405 Dimensions P.406 Inch size P.403 How to Order P.414 Variations P.415 Dimensions P.416 Inch size P.413 Gasket Seal (Uni Thread) Connection thread Applicable tubing Rc G NPT NPTF How to Order P.420 Variations P.421 Dimensions

One-touch Fittings

P.101 M R G Uni UNF NPT M R Uni Metric size P.5 P.101 P.65 P.173 P.57 P.165 P.87 P.201 P.29 P.133 Inch size P.29 P.133 P.73 P.185 P.49 P.157 P.81 P.195 P.49 P.157 P.95 P.209 CAT.ES50-37D KQ2 Series One-touch Fittings KQ2 Series Compact and lightweight Improved tube insertion/removal Length 23% shorter Max. 1 30% reduction Dimensions Dimensions Insertion : force Height 24% shorter 1 20 15.5

V100

48 R P R P R P VS Refer to page 4-4-61 for dimensions with connector cable.

3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

VQ

Refer to p.2.9-15 for How to Order for DIN rail.

3 Port Solenoid Valve Series VQ100

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

3 Port Solenoid Valve Series VQ100 1

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

Series: 3 (VFA3000), Actuation: 2 (2 Position Double), Body: 30, A, B Port Size: 01 (1/8), Thread: N (NPT), Bracket: F (w/Bracket), Pilot Port Direction: P (Lateral)

Series: VFA3000, Actuation: 2 Position Double, Body: 30, A, B Port Size: 1/8, Thread: NPT, Bracket: w/Bracket, Pilot Port Direction: Lateral

Series: 3 (VFA3000), Actuation: 2 (2 Position Double), Body: 30, A, B Port Size: 01 (1/8), Thread: N (NPT)

Series: VFA3000, Actuation: 2 Position Double, Body: 30, A, B Port Size: 1/8, Thread: NPT, Bracket: -, Pilot Port Direction: -

Compact Vacuum Unit Ejector/ Vacuum Pump System

ZB-OM00201-B Revision history A P.19 Recommended tube fittings P.21 Piping to the Manifold Base B P.21 Change of description about tightening of fitting.

Compact Vacuum Unit

ZB1-PS1-A (PSE541) Rated pressure range Proof pressure Output voltage Output impedance Power supply voltage Current consumption Accuracy Linearity Repeat accuracy Effect of power supply voltage Temperature characteristics 72.5 psi (500 kPa) 1 to 5 VDC Approx. 1 k 10 to 24 VDC10%, Ripple (p-p) 10% or less 15 mA or less 2% F.S.

ZB-OM00301

15V2F.S.7 P3 -100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4 LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N

Electro-Pneumatic Proportional Valve

16: 1.6, 23: 2.3, 40: 4.0 Orifice (mm) Fluid Ambient and fluid temperature Port size Max. operating pressure (MPa) Hysteresis Repeatability Proof pressure Rated voltage Power consumption Coil insulation Air, inert gas 0 to +50oC M5 03: 0.7, 04: 0.45, 06: 0.2, 08: 0.1 Rc 1/8 16: 0.7, 23: 0.35, 40: 0.12 10% or less 3% or less 1MPa 12, 24VDC 0 to 2W 0 to 4W Class B Series PVQ How to Order P

Series: 3 (VFA3000), Actuation: 2 (2 Position Double), Body: 30, A, B Port Size: 02 (1/4), Thread: N (NPT), Bracket: w/o Bracket, Pilot Port Direction: P (Lateral)

Series: 3 (VFA3000), Actuation: 2 (2 Position Double), Body: 30, A, B Port Size: 01 (1/8), Thread: T (NPTF), Bracket: w/o Bracket, Pilot Port Direction: P (Lateral)

Series: 3 (VFA3000), Actuation: 2 (2 Position Double), Body: 30, A, B Port Size: 02 (1/4), Thread: Rc, Bracket: w/o Bracket, Pilot Port Direction: P (Lateral)

Series: 3 (VFA3000), Actuation: 2 (2 Position Double), Body: 30, A, B Port Size: 02 (1/4), Thread: F (G), Bracket: w/o Bracket, Pilot Port Direction: P (Lateral)