VFA3000

Caution Refer to p.0-33 to 0-36 for Safety Instruction and common precautions. 3.2-13 VFA3000 Dimensions/Body Ported 2 position single: VFA3122-F 01 02 SlA VlA SlA VlA VM/VR VH 2 position single: VFA3130-01 02 3.2-14 VFA3000 Dimensions/Body Ported 2 position double: VFA3230-01 02 3 position closed center/exhaust center/pressure center: VFA3 30-X1 01 02 3 4 5 3.2-15 VFA3000 Dimensions/Base

2

Air Tanks Air Preparation Equipment/ Modular F. R. L./Air Tanks Air Preparation Equipment Refrigerated Air Dryer IDF/IDU P .6 Refrigerated Air Dryer IDF100FS/125FS/150FS P .54 Membrane Air Dryer IDGA/IDG P .74 Modular F. R. L. Modular Type F.R.L. Units AC-A P .126 Modular Type F.R.L.

One-touch Fittings

P.101 M R G Uni UNF NPT M R Uni Metric size P.5 P.101 P.65 P.173 P.57 P.165 P.87 P.201 P.29 P.133 Inch size P.29 P.133 P.73 P.185 P.49 P.157 P.81 P.195 P.49 P.157 P.95 P.209 CAT.ES50-37D KQ2 Series One-touch Fittings KQ2 Series Compact and lightweight Improved tube insertion/removal Length 23% shorter Max. 1 30% reduction Dimensions Dimensions Insertion : force Height 24% shorter 1 20 15.5

V100

VV307-01-3--F P = 26 (Applicable cable O.D.)

3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

3 Port Solenoid Valve Series VQ100

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

3 Port Solenoid Valve Series VQ100 1

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

VQ

Refer to p.2.9-15 for How to Order for DIN rail.

Compact Vacuum Unit

ZB0020-K1L(O)-P Vacuum pump system Exhaust port 2 Port open to atmosphere 1 3 Port open to atmosphere Release pressure SUP (PD) port 1 Supply valve M5 thread depth 0.158 Air pressure SUP Vacuum pressure SUP (PV) port PV Silencer cover (Detachable) Release valve M5 thread depth 0.158 PD 0.894 0.394 V Pressure sensor L(O)10 11 20 21 (inch) K1 Q1 E F ZB Manual override Port type A B C2 C4 N1

Compact Vacuum Unit Ejector/ Vacuum Pump System

ZB-OM00201-B Revision history A P.19 Recommended tube fittings P.21 Piping to the Manifold Base B P.21 Change of description about tightening of fitting.

ZB-OM00301

PVPD ZB0020-K1L(O)-P 1 3 1 3 35 - No.ZB-OM00301 // PV=PD ZZBZB31-K1D U / PVPD ZZB-SM5 ZB31-Q1L(O)E F D U / PVPD ZZB-SM5 ZB0030-K1L(O)E F D U 36 - No.ZB-OM00301 ZB1/2-K1 46 ZB3-K11 40 g ZB1-PS-A 5 ZB1-ZS-A Assy 14 1 2 3 4 5 6 7 8 9 10 11 12 g 16 22 28 34 41 47 53 60 66 72 79 85 ++ 5 40g 5 + 5g 5 + 41g 266g 37 - No.ZB-OM00301 0.3 N.C. / ZB03-K1/J1 (0.35MPa

Series: 3 (VFA3000), Actuation: 2 (2 Position Double), Body: 30, A, B Port Size: 01 (1/8), Thread: N (NPT), Bracket: w/o Bracket, Pilot Port Direction: P (Lateral)

Series: VFA3000, Actuation: 2 Position Double, Body: 30, A, B Port Size: 1/8, Thread: NPT, Bracket: w/o Bracket, Pilot Port Direction: Lateral

Series: 3 (VFA3000), Actuation: 2 (2 Position Double), Body: 30, A, B Port Size: 01 (1/8), Thread: N (NPT)

Series: VFA3000, Actuation: 2 Position Double, Body: 30, A, B Port Size: 1/8, Thread: NPT, Bracket: -, Pilot Port Direction: -

This is a legacy product, and replaced byVT307-5G1-01N-F, VALVE, SOL 24VDC, VALVE, VT3/VO3 SOL VALVE 3-PORT, PA, VT3 BASE MT 1/4, .35486 lb

Electro-Pneumatic Proportional Valve

16: 1.6, 23: 2.3, 40: 4.0 Orifice (mm) Fluid Ambient and fluid temperature Port size Max. operating pressure (MPa) Hysteresis Repeatability Proof pressure Rated voltage Power consumption Coil insulation Air, inert gas 0 to +50oC M5 03: 0.7, 04: 0.45, 06: 0.2, 08: 0.1 Rc 1/8 16: 0.7, 23: 0.35, 40: 0.12 10% or less 3% or less 1MPa 12, 24VDC 0 to 2W 0 to 4W Class B Series PVQ How to Order P

Series: 3 (VFA3000), Actuation: 2 (2 Position Double), Body: 30, A, B Port Size: 02 (1/4), Thread: N (NPT), Bracket: w/o Bracket, Pilot Port Direction: P (Lateral)

Series: 3 (VFA3000), Actuation: 2 (2 Position Double), Body: 30, A, B Port Size: 01 (1/8), Thread: T (NPTF), Bracket: w/o Bracket, Pilot Port Direction: P (Lateral)

Series: 3 (VFA3000), Actuation: 2 (2 Position Double), Body: 30, A, B Port Size: 02 (1/4), Thread: Rc, Bracket: w/o Bracket, Pilot Port Direction: P (Lateral)