Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

VDW

A G H LVC Stations C37 LVA For 2 stations For 3 stations OUT port size 1 2 Stainless steel LVH Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Type 30 LVD VVCW20 6A LVQ Material Pipe material Seal material NBR FKM NBR FKM Symbol Nil A G H LQ C37 Note) Consists of a set for D and U sides.

4/5 Port Solenoid Valve

3.2 (For mounting) 2-3.2 2-3.2 2-3.2 (For mounting) 25 25 (For mounting) 28 28 28 Pg7 28 Applicable cable O.D. 3.5 to 7 Refer to page 563 for dimensions with connector cable. 543 5 port solenoid valve Series 10-SYJ7000 2 position single [ ]: AC G H 01 02 Grommet (G), (H): 10SYJ714322 27 12 34 8.5 2-4.3 (For mounting) Manual override B A A B R1 R2 P 59.8 3.2 G: Approx. 300 H: Approx. 600

Soft Start-up Valve

98 DC 96 Dimensions (mm) Standard specifications Model Port size A C D E1 E2 G H J 1(P) 2(A) 3(R) AV2000-02-1 to 4G(Z)-A 1/4 1/4 1/4 66 47 24.5 20 20 33 Width across flats 22 30 AV2000-02-5 to 6G(Z)-A 1/4 1/4 1/4 AV3000-03-1 to 4G(Z)-A 3/8 3/8 3/8 76 50 29.5 20 20 38 Width across flats 24 35 AV3000-03-5 to 6G(Z)-A 3/8 3/8 3/8 AV4000-04-1 to 4G(Z)-A 1/2 1/2 1/2 98 56 39.5 26 26 49 Width across

Soft Start-up Valve

size A C D E G H J 1(P) 2(A) 3(R) AV2000-m02-1 to 4G(Z)m-A 1/4 1/4 1/4 66 47 24.5 40 33 Width across flats 22 30 AV2000-m02-5 to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3/8 3/8 76 50 29.5 40 38 Width across flats 24 35 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 1/2 1/2 1/2 98 56 39.5 52 49 Width across flats 30 33 AV4000-m04-5 to 6G(Z)m-A AV5000-m06, 10-1 to 4G(Z)m-A 3/4, 1 3/4, 1 3/

Soft Start-up Valve

size A C D E G H J 1(P) 2(A) 3(R) AV2000-m02-1 to 4G(Z)m-A 1/4 1/4 1/4 66 47 24.5 40 33 Width across flats 22 30 AV2000-m02-5 to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3/8 3/8 76 50 29.5 40 38 Width across flats 24 35 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 1/2 1/2 1/2 98 56 39.5 52 49 Width across flats 30 33 AV4000-m04-5 to 6G(Z)m-A AV5000-m06, 10-1 to 4G(Z)m-A 3/4, 1 3/4, 1 3/

One-touch Fittings

Symbol Size 01 R1/8 02 R1/4 03 R3/8 04 R1/2 Applicable tubing O.D.

Table of Contents

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

KJ

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

3.2 (For mounting) 2-3.2 2-3.2 2-3.2 (For mounting) 25 25 (For mounting) 28 28 28 Pg7 28 Applicable cable O.D. 3.5 to 7 Refer to page 563 for dimensions with connector cable. 543 5 port solenoid valve Series 10-SYJ7000 2 position single [ ]: AC G H 01 02 Grommet (G), (H): 10SYJ714322 27 12 34 8.5 2-4.3 (For mounting) Manual override B A A B R1 R2 P 59.8 3.2 G: Approx. 300 H: Approx. 600

CQ2

2 !3 !

2

For model selection of an auto-drain, refer to the Selection Precautions on page 123. 5 10 20 Port size 3 Port size Symbol H Nil H Nil Nil H Nil H 01 02 03 1/8 1/4 3/8 Thread type Symbol Type Nil N F Rc NPT G Components 3 10 20 5 Components Nil H Nil H Nil H Nil H Mist separator Micro mist separator Differential pressure gauge Regulator AFM20-A AFD20-A AFM30-A AFD30-A AR20 GD40-2-01-X29 AR25

KQ2

How to Order KQ 2 H 06 U01 Made to Order Refer to page 90 for details.

Proposals for Energy Saving

Model Description AR1000 AR2000 B220 AR2500 B320 AR3000 B420 AR4000 AR4000-06 B640A Note 3) AR5000 AR6000 Bracket B120 B220 B420 B640A Note 3) Note 1) Note 2) G36-10-01 G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G27-10-R1 1.0MPa G36-10-01 Pressure gauge 0.2MPa (G27-10-R1) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 Auxiliary Pneumatic Equipment Air Preparation Equipment

IR1000/2000/3000

VAC Vacuum pump side Atmosphere 30 AMR 18 50.6 ITV 35 43 2-Rc 1/8 Connection port SET G SET Pad side VAC Vacuum pump side 43 IC 2-Rc 1/8 Pressure gauge connection port 2-Rc 1/8 Pressure gauge connection port 50 60 VBA 02 03 04 IRV30002-Rc 1/4 Connection port 70 VE 2.3 54 VY1 24 G 50 (R) PPA SMC 66 6 P K U C S O H L AL 42 Panel cut Panel thickness: Max. 4 10.5 x 8.5 2-Rc 1/8 Pressure gauge

Precision Regulator

M6 x P0.5 15.5 9 76 148 Bleed 43 EXH(3) OUT(2) SUP(1) 22 66 Rc 1/2 Exhaust port 68 66 2 x Rc 1/4 to 1/2 Port size 2 x Rc 1/8 Pressure gauge port 36 Female thread for bottom mounting 4 x M5 x 0.8 depth 7 Bottom bracket is not available as an option. 814 A Precision Regulator IR1000/2000/3000 Series Dimensions IR2120-02 IR3120-0 50 82 Mounting hole 36 Mounting hole 60 Bracket (Option) Bracket

Precision Regulator Series IR1000/2000/3000

Application 0 1 2 size Symbol IR1000 IR2000 IR3000 Made to Order Specifications (Refer to page 560) 01 02 03 04 1/8 1/4 3/8 1/2 Note) Air operated type is model IR3120 only.

Shock Absorbers and Rate Controls

(Itlodl) A ( D F H JA IB IH HPI t0ftFt, -2, -3 215 ld25 x 1.5 ! 27 138 ?0 !6.7 4.6 HPt | ottt(t. -2, -3 ?',t5 M25 x 2.0 I r38 20 36.7 31.8 4.6 All dimensions ln millmeters.

Compact Cylinder with Air Cushion

Standard type (through hole, double end tapped common)/RQB, RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H thread effective depth C E1 E2 Q F 4-5.4 through D M E 1 Flat washer 4 pcs.

RQ

Basic style (Through-hole): RQB/RDQB Both ends tapped style: RQA/RDQA Double end tapped mm RA RA OA threads Bore size (mm) OA RA 32 40 50 M6 x 1.0 10 M6 x 1.0 10 M8 x 1.25 14 H thread effective depth C 2-P (Port size) 4-N through 2 x 4-OB depth of counter bore RB Approx.