Table of Contents

M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46

VDW

3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 3 stns. x 1 2 stns. x 2 3 stns. x 2 3 stns. x 3 Note) Manifold base is consisted of the junction of 2 and 3 station bases.

Electro-Pneumatic Proportional Valve

or less 1MPa 12, 24VDC 0 to 2W 0 to 4W Class B Series PVQ How to Order P V Q 13 5 L 03 M5 Valve type Body materials Symbol A Nil Body Brass C37 Note for PVQ13 for PVQ31, 33 13 31 33 N.C.

2

3 !4 o !0 !1 !2 e !3 !4 !5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 Flow Control Equipment AS AS-FS w Meter-in type Meter-out type Component Parts No.

CATALOG

1 1 1/2 7 5/8 1.57 1 3/8 2.72 7 3/8 325 (3.25) 1 1/4 1 1/8 1 15/16 1 1/2 3/4-16 1/2 11/64 1/2 3/4 1.18 3 13/16 2 3/4 1/2 7/8 5/8 6 7/8 3/8-24 4 1/2 2.34 4 1/4 4.7 0 1 1 1/2 7 5/8 1.57 2.72 1 3/8 7 3/8 400 (4) 3/4-16 1 1/8 2 1/4 1 1/4 1 1/2 1/2 15/64 1/2 3/4 1.18 4 1/2 3 1/2 1/2 7/8 5/8 6 7/8 D I M E N S I O N S F R O N T F L A N G E T Y P E NC A1F + = Stroke addition EA F FB TF W Y P BORE

V

H O W T O O R D E R S E R I E S S X 3 0 0 0 / 5 0 0 0 V A L V E T Y P E S 4 5 F, 4 5 P SX 40 L0Z S E R I E S 3 SX3000 5 SX5000 M A N U A L O V E R R I D E Non Locking Push Type D Push Locking Slotted Type C O N F I G U R AT I O N 1 2 Position Single 2 2 Position Double 3 3 Position Closed Center 4 3 Position Exhaust Center 5 3 Position Pressure Center C O M M O N S P E C I F I C AT I O N

V100

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

Cylinder with Lock

3 io@1!4w@2 !8q@3$1@5@8$2#8#5@7#1@4@9#7 #0$0 !5!6 er uy t !9 #4@6!7!2 #6 #3#2#9 $3 80, 100 Component Parts Component Parts No. Description Material Qty.

Table of Contents

Model A B C D E F G F G Flat Flat with ribs Model A B C D E F G F G Flat Flat with ribs P Q R U C U C U C U C U C ZPY10 10 13 16 ZPY40 40 50 43 53 19.5 29.5 47.5 73.5 25 15 63.5 7.5 3.8 18.5 28.5 46.5 72.5 62.5 6.5 3.3 ZPY50 12 12 15 20 25 18 3.5 1.2 1.8 1.7 ZPY13 N4 (Nylon tube 4/2.5) 14.5 5 1.8 22 38 59 64 3 ZPY16 12.5 22.5 38.5 59.5 64.5 N6 (Nylon tube 6/4) Deep 16.5 7 2.5 Deep H: M6 x

Title not found

Cylinder Bore Sizes (in inches) Valve Type Cv Type* 34 1 118 112 2 214 212 3 314 4 6 Micro-Line 0.11 SA F S S LTV 0.18 SA,DA F F F F M M M M S S Nova 1.00 SA,DA F F F F F F F M M Duramatic 0.18 SA,DA F F F F M M M M S S Duramatic 0.63 SA,DA F F F F F M M M M Capsula 0.75 SA,DA F F F F F F M M M Capsula 3.17 SA,DA F F F FT-1, FC-1 0.13 SA F F M S 4B-1, 4W-1 0.48 SA,DA F F F F M M M S FC51,

Title not found

Cylinder Bore Sizes (in inches) Valve Type Cv Type* 34 1 118 112 2 214 212 3 314 4 6 Micro-Line 0.11 SA F S S LTV 0.18 SA,DA F F F F M M M M S S Nova 1.00 SA,DA F F F F F F F M M Duramatic 0.18 SA,DA F F F F M M M M S S Duramatic 0.63 SA,DA F F F F F M M M M Capsula 0.75 SA,DA F F F F F F M M M Capsula 3.17 SA,DA F F F FT-1, FC-1 0.13 SA F F M S 4B-1, 4W-1 0.48 SA,DA F F F F M M M S FC51,

VEX1

(300mm lead wire) 1 4 1 4 H Gromet (600mm lead wire) 02 3 03 1 4 1 4 D DIN connector 3 8 3 8 DO DIN connector (Without connector) 04 1 2 1 2 AN 04 5 06 1 2 3 4 1 2 3 4 1 Body ported G Grommet (300mm lead wire) AMC 10 1 1 1 H Grommet (600mm lead wire) E Grommet terminal 10 7 12 14 9 20 2 Wihout subplate 1 4 1 T Conduit terminal D DIN connector 1 4 1 2 1 2 G Grommet (300mm lead wire) Grommet

MB1

When replacing brackets, use the hexagon wrenches shown below. ) m m ( e z i s e r o B t l o B s t a l f s s o r c a h t d i W e u q r o t g n i n e t h g i T 0 4 , 2 3 7 4 2 1 C 8 4 2 3 B M 4 1 . 5 3 6 , 0 5 9 4 2 1 C 8 4 0 5 B M 5 1 1 0 0 1 , 0 8 t o o F 1 5 2 1 C A 8 4 0 8 B M 6 5 2 r e h t O 1 5 2 1 C B 8 4 0 8 B M 32 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK ASIA CHINA

ZX

(Ordering example) If installed on station 1 and station 3: ZZX106-R 1 pc. ZX1101-K15LZ-EL 6 pcs. ZX1-R1-1 ZX1-R1-3 ZX1-R16 4 pcs. F G T NPTF (Ordering example) ZXX106-R1 pc. (Manifold base) ZX1101-K15LZ-EC5 pcs. (Vacuum single unit) ZX1-BM11 pc.

Compact

o"o+ oeep 3 o Cross section C-C 3 l "!l Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

70astamb1

4w !7 !6 i o A CJ1 CJP CJ2 CM2 A Cylinder tube sectional view A-A CG1 !1!0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB Component Parts No. q w e r t y u i o !0 !1 !2 !3 No.

mb1

4w !7 !6 i o A CJ1 CJP CJ2 CM2 A Cylinder tube sectional view A-A CG1 !1!0 MB Component Parts No. q w e r t y u i o !0 !1 !2 !3 No.

HRX-OM-Q026

(IEC 60417-5032-1) How to see the serial number Q Z 001 December 2012 Q Z 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2012 Q Repeated from A to Z in alphabetic al order 1 O Repeated from O to Z in alphabetical order, with O for January and Z for December 2013 R 2 P 2014 S 3 Q Fig. 1-1 Position of the product label HRSH Series 1.4 Product Label 1-3 HRX-OM-Q026 Chapter 1 Safety