Table of Contents

M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46

VDW

3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 3 stns. x 1 2 stns. x 2 3 stns. x 2 3 stns. x 3 Note) Manifold base is consisted of the junction of 2 and 3 station bases.

Electro-Pneumatic Proportional Valve

or less 1MPa 12, 24VDC 0 to 2W 0 to 4W Class B Series PVQ How to Order P V Q 13 5 L 03 M5 Valve type Body materials Symbol A Nil Body Brass C37 Note for PVQ13 for PVQ31, 33 13 31 33 N.C.

2

3 !4 o !0 !1 !2 e !3 !4 !5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 Flow Control Equipment AS AS-FS w Meter-in type Meter-out type Component Parts No.

One-touch Fittings

[inch] Model D Weight [g] X Y O N Thickness Nylon Urethane D Q Q 2 x O 1/8 KQ2T01-00A1 7.1 6.7 9.5 14.9 18.5 13.3 5.4 6 3.2 7.1 3.4 2.9 2.5 2.3 5/32 KQ2T03-00A1 8.2 7.7 10 15.3 19.4 13.3 5.7 6 3.2 8.2 6.4 4.4 3 2.8 3/16 KQ2T05-00A1 9.1 8.4 11 15.7 20.3 13.3 6.2 6 3.2 9.1 8.4 7 3.5 3.2 2 x N M Q L1 L2 Q D D L1 M L1 M Release button dimensions X Y Different Diameter Tee: KQ2T D1 2 x Applicable

CATALOG

1 1 1/2 7 5/8 1.57 1 3/8 2.72 7 3/8 325 (3.25) 1 1/4 1 1/8 1 15/16 1 1/2 3/4-16 1/2 11/64 1/2 3/4 1.18 3 13/16 2 3/4 1/2 7/8 5/8 6 7/8 3/8-24 4 1/2 2.34 4 1/4 4.7 0 1 1 1/2 7 5/8 1.57 2.72 1 3/8 7 3/8 400 (4) 3/4-16 1 1/8 2 1/4 1 1/4 1 1/2 1/2 15/64 1/2 3/4 1.18 4 1/2 3 1/2 1/2 7/8 5/8 6 7/8 D I M E N S I O N S F R O N T F L A N G E T Y P E NC A1F + = Stroke addition EA F FB TF W Y P BORE

V

H O W T O O R D E R S E R I E S S X 3 0 0 0 / 5 0 0 0 V A L V E T Y P E S 4 5 F, 4 5 P SX 40 L0Z S E R I E S 3 SX3000 5 SX5000 M A N U A L O V E R R I D E Non Locking Push Type D Push Locking Slotted Type C O N F I G U R AT I O N 1 2 Position Single 2 2 Position Double 3 3 Position Closed Center 4 3 Position Exhaust Center 5 3 Position Pressure Center C O M M O N S P E C I F I C AT I O N

V100

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

3 Port Solenoid Valve Series VQ100

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

LEC-OM034xx

Branch Branch N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 Shield Controller CN4 Controller CN4 Description Pin No. Description Pin No. EMG+ 1 EMG+ 1 EMG2 EMG2 SD+ 3 SD+ 3 SD4 SD4 EN_SW+ 5 EN_SW+ 5 ON 6 ON 6 DC24V 7 DC24V 7 GND 8 GND 8 Shield Shield 32 - 9.

Compact Vacuum Unit

When increasing or decreasing the number of manifold stations, order the manifold base (q) exclusive for the required number of stations and the required number of single units of the body type 3 valve (w). Refer to How to Order (pages from 1 to 3) for the part numbers for placing an order.

Cylinder with Lock

3 io@1!4w@2 !8q@3$1@5@8$2#8#5@7#1@4@9#7 #0$0 !5!6 er uy t !9 #4@6!7!2 #6 #3#2#9 $3 80, 100 Component Parts Component Parts No. Description Material Qty.

Table of Contents

Model A B C D E F G F G Flat Flat with ribs Model A B C D E F G F G Flat Flat with ribs P Q R U C U C U C U C U C ZPY10 10 13 16 ZPY40 40 50 43 53 19.5 29.5 47.5 73.5 25 15 63.5 7.5 3.8 18.5 28.5 46.5 72.5 62.5 6.5 3.3 ZPY50 12 12 15 20 25 18 3.5 1.2 1.8 1.7 ZPY13 N4 (Nylon tube 4/2.5) 14.5 5 1.8 22 38 59 64 3 ZPY16 12.5 22.5 38.5 59.5 64.5 N6 (Nylon tube 6/4) Deep 16.5 7 2.5 Deep H: M6 x

Title not found

Cylinder Bore Sizes (in inches) Valve Type Cv Type* 34 1 118 112 2 214 212 3 314 4 6 Micro-Line 0.11 SA F S S LTV 0.18 SA,DA F F F F M M M M S S Nova 1.00 SA,DA F F F F F F F M M Duramatic 0.18 SA,DA F F F F M M M M S S Duramatic 0.63 SA,DA F F F F F M M M M Capsula 0.75 SA,DA F F F F F F M M M Capsula 3.17 SA,DA F F F FT-1, FC-1 0.13 SA F F M S 4B-1, 4W-1 0.48 SA,DA F F F F M M M S FC51,

Title not found

Cylinder Bore Sizes (in inches) Valve Type Cv Type* 34 1 118 112 2 214 212 3 314 4 6 Micro-Line 0.11 SA F S S LTV 0.18 SA,DA F F F F M M M M S S Nova 1.00 SA,DA F F F F F F F M M Duramatic 0.18 SA,DA F F F F M M M M S S Duramatic 0.63 SA,DA F F F F F M M M M Capsula 0.75 SA,DA F F F F F F M M M Capsula 3.17 SA,DA F F F FT-1, FC-1 0.13 SA F F M S 4B-1, 4W-1 0.48 SA,DA F F F F M M M S FC51,

Air Cylinder Series MB

4w !7io CJ1 CJP CJ2 CM2 CG1 !1!0 MB MB1 CA2 CS1 CS2 MB125 Component Parts No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

VEX1

(300mm lead wire) 1 4 1 4 H Gromet (600mm lead wire) 02 3 03 1 4 1 4 D DIN connector 3 8 3 8 DO DIN connector (Without connector) 04 1 2 1 2 AN 04 5 06 1 2 3 4 1 2 3 4 1 Body ported G Grommet (300mm lead wire) AMC 10 1 1 1 H Grommet (600mm lead wire) E Grommet terminal 10 7 12 14 9 20 2 Wihout subplate 1 4 1 T Conduit terminal D DIN connector 1 4 1 2 1 2 G Grommet (300mm lead wire) Grommet