VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

VDW

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.

NCQ2/CQ2

8 43 34 9.5 M5 x 0.8 7 10 #10-32UNF 4.5 13 0 0.043 M5 x 0.8 M5 x 0.8 25 5 to 50 19 5.5 28 40 2 10 52 10 10 1/4-28UNF 47 37 11 5 12 12 M6 x 1.0 15 0 0.043 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 M5 x 0.8 13.3 5/16-24UNF 39.5 53.5 32 10 to 50 21.5 34 5.5 45 2 4.5 60 14 14 12.5 13 16 M8 x 1.25 7 14 49.5 21 NPT 1/8 0 0.052 RC 1/8 Note 1) 63.5 49.5 75, 100 For details about the rod end nut and accessory

V100

VZ22 20 Rc 1/8 VZ22 30 Rc 1/8 (Example) VV3Z2-20-081 (8 stations) VV3Z2-50081-C6 (8 stations) VZ212-1G-M5 5 pcs. VZ215-5M5 pcs. VZ212-1G-M5 2 pcs. VZ215-5M3 pcs. VVZ200-32A-1 1 pc.

2

Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS 2 0 F A 1 1 M5 06 G Body size 1 AS 2 0 S F A 1 2 01 06 G Body size 2/3/4 Body size Made to Order Refer to page 484 for details. 2 1/8, 1/4 3 3/8 4 1/2 Push-lock type Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Note) Face seal method is used for the G thread type.

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

number will be VF113c, VF123c. 3-4-5 6 Series VF1000 How to Order Port size (P, A, B) Thread type Only when 01 (1/8) M5 01 M5 x 0.8 Nil F N T Rc G NPT NPTF 1 8 EA, EB port: M5 x 0.8 Option F With bracket Body ported VF1 1 2 1 L 01 0 Not installed when delivered Manifold VF1 1 3 0 1 L 01 Port size (A, B) Body option Type of actuation Coil rated voltage M5 01 M5 x 0.8 Electrical entry 0 Standard

3 Port Solenoid Valve Metal Seal Series VZ200 1

VZ22 20 Rc 1/8 VZ22 30 Rc 1/8 (Example) VV3Z2-20-081 (8 stations) VV3Z2-50081-C6 (8 stations) VZ212-1G-M5 5 pcs. VZ215-5M5 pcs. VZ212-1G-M5 2 pcs. VZ215-5M3 pcs. VVZ200-32A-1 1 pc.

Series KP/KPQ/KPG

tubing (M5) Effective area mm D1 Model L1 TPH TPS A H (width across flats) (M5) Applicable tubing O.D. mm Connection threads R Note 1) Weight g L2 D2 M L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 KPQL04-M5 KPQL04-01 KPQL04

Series KP/KPQ/KPG

tubing (M5) Effective area mm D1 Model L1 TPH TPS A H (width across flats) (M5) Applicable tubing O.D. mm Connection threads R Note 1) Weight g L2 D2 M L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 KPQL04-M5 KPQL04-01 KPQL04

CV/MVGQ

Z Y X S NN NB NA MM LZ LY LX LT LH LC LA H F D C B A Bore size (mm) 10 16 90 [91] 7 5 46 M8 x 1 9.5 12.5 M4 x 0.7 32 16.5 24 1.6 9 4.5 38 28 8 4 14 12 15 91 [92] 9 6 47 M10 x 1 9.5 12.5 M5 x 0.8 42 25 33 2.3 14 5.5 46 28 8 5 20 18 15 Rod Side Flange Style (F) CVJ5F Rod extended/retracted when energized M5 x 0.8 M5 x 0.8 53.5 [54.5] M5 x 0.8 Manual override 28 [34.5] Width across flats B1

CV/MVGQ

Z Y X S NN NB NA MM LZ LY LX LT LH LC LA H F D C B A Bore size (mm) 10 16 90 [91] 7 5 46 M8 x 1 9.5 12.5 M4 x 0.7 32 16.5 24 1.6 9 4.5 38 28 8 4 14 12 15 91 [92] 9 6 47 M10 x 1 9.5 12.5 M5 x 0.8 42 25 33 2.3 14 5.5 46 28 8 5 20 18 15 Rod Side Flange Style (F) CVJ5F Rod extended/retracted when energized M5 x 0.8 M5 x 0.8 53.5 [54.5] M5 x 0.8 Manual override 28 [34.5] Width across flats B1

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

VK P/R port M5 X 0.8, Rc (PT) 1/8, C4 (4 One-touch fitting) C6 (6 One-touch fitting) M5 X 0.8 Rc (PT)1/8 Port size M5 X 0.8 A port VZ M5 X 0.8 X port (1) M5 X 0.8 M5 X 0.8 VT Body ported style SYJ5l2/SYJ5l2R 3.4 (0.19) Valve effective area (mm2)(Cv) (2) VT M5: 3.3 (0.18) 1/8: 4.8 (0.27) C4, C6: 3.8 (0.21) Base mounted style SYJ5l4/SYJ5l4R M5: 3.8 (0.21) 1/8: 4.7 (0.26) VP Note 1) Only for

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

20 20 stations Applicable individual exhaust spacer assembly SYJ5000-17-1A Applicable interface regulator assembly ARBYJ5000-00-P R port Rc(PT) 1 8 A, B port M5 X 0.8 M5 M5 X 0.8 A, B port side How to Order 41 Type (5 Port/Base mounted) SS5YJ5-41-05 --M5 Stations 2 stations 02 : R port Rc(PT) : 1 8 20 stations 20 A, B port M5 X 0.8 M5 M5 X 0.8 A, B port side P port Rc(PT) 1 8 Applicable solenoid

New

2 x M5 Thread depth N B 2 x P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal F Cable 6 to 12 Q D D S G1/2 Qp2 F 34 (44) 31.5 32 R 25 T C K C R E E Sp2 A A B1 2 x P 1 (IN), 2 (OUT) port B1 2 x P 1 (IN), 2 (OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H J H G1/2 (mm) Grommet Grommet (with surge Dimensions Size Port size A B B1 C D E F voltage

VCC

Description C-w D-t C-t D-o F-e D-e D-r O-ring between manifold blocks VVCC12-OR-1 Special FKM O-ring 1 1 set unit VV2CC1 VV3CC1 VVMCC1 (common) 4 One-touch fitting One-touch fitting 1 VVCC12-50A-L1C4 1 set unit 6 One-touch fitting O-ring HNBR 1 VVCC12-50A-L1C6 O-ring O-ring Special FKM 1 1 set unit VVCC12-OR-3 O-ring Special FKM 2 O-ring assembly between port blocks VV3CC1 VVMCC1 1 set

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Description C-w D-t C-t D-o F-e D-e D-r O-ring between manifold blocks VVCC12-OR-1 Special FKM O-ring 1 1 set unit VV2CC1 VV3CC1 VVMCC1 (common) 4 One-touch fitting One-touch fitting 1 VVCC12-50A-L1C4 1 set unit 6 One-touch fitting O-ring HNBR 1 VVCC12-50A-L1C6 O-ring O-ring Special FKM 1 1 set unit VVCC12-OR-3 O-ring Special FKM 2 O-ring assembly between port blocks VV3CC1 VVMCC1 1 set

High Vacuum Angle Valve

, Chief part: Stainless steel, FKM (Standard seal material) Surface treatment External: Hard anodized Internal: Raw material Pilot pressure [MPa(G)] 0.4 to 0.7 Pilot port size XLA M5 Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.