Process Pump Series PA3000/5000/PAX1000 Series PB1000 Recommended Valve PA3000 PA5000 VQZ140 (exhaust center) VQZ240 (exhaust center) Refer to page 21 for further details. 6 Series PA3000/5000 Performance Curves/Air Operated Type PA513 Flow rate characteristics PA313 Flow rate characteristics 50 50 Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2, 0.3MPa) Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2MPa) SUP=0.5MPa 40 40 SUP=0.5MPa
H N I C A L SPECIFICATIONS S E R I E S VQZ100/200/300 Type Of Seal Metal Seal Rubber Seal Fluid Air, Inert Gas Air, Inert Gas Maximum Operating Pressure 0.7MPa / 102PSI (High Pressure Type 0.8MPa / 116PSI) Valve Specifications Solenoid Specifications Minimum Operating Pressure 0.1MPa / 14.5PSI 0.15MPa / 22PSI Ambient & Fluid Temperature -10 to 50C -10 to 50C Max Operating Frequency 20Hz 5Hz
H N I C A L SPECIFICATIONS S E R I E S VQZ100/200/300 Type Of Seal Metal Seal Rubber Seal Fluid Air, Inert Gas Air, Inert Gas Maximum Operating Pressure 0.7MPa / 102PSI (High Pressure Type 0.8MPa / 116PSI) Valve Specifications Solenoid Specifications Minimum Operating Pressure 0.1MPa / 14.5PSI 0.15MPa / 22PSI Ambient & Fluid Temperature -10 to 50C -10 to 50C Max Operating Frequency 20Hz 5Hz
Discharge capability 1) Flow-rate characteristics PB1313A Flow-rate characteristics (5Hz) PB1313A5Hz 0.5 SUP=0.5MPa Discharge pressure (MPa) 0.4 SUP=0.4MPa MPa 0.3 SUP=0.3MPa 0.2 SUP=0.2MPa 0.1 0 0 200 400 600 800 1000 Discharge rate (mL/min) mL/min Caution -The above flow characteristic graph is for clean water (viscosity 1mPas, specific gravity 1.0).
Clean room Assembled and double-packaged in clean-room environment Note) With 3/8" inlet/outlet tube: 1 to 12l * The values appearing in the above table are representative of use in a room temperature environment and with tap water. 3 Series PA3000 Performance Automatically operated type Air pilot actuation type * Solenoid valve switching cycle PA3313-m03: Flow rate characteristics (5Hz
Discharge capability 1) Flow-rate characteristics PB1013A Flow-rate characteristics (5Hz) PB1013A flow-rate characteristics (When operated at PB1013A5Hz 5H ) 0.7 Discharge pressure (MPa) 0.6 SUP=0.7MPa 0.5 MPa SUP=0.5MPa 0.4 SUP=0.35MPa 0.3 SUP=0.2MPa 0.2 0.1 0 0 200 400 600 800 1000 Discharge rate (mL/min) mL/min Caution The above flow characteristic graph is for clean water (viscosity
Internal pilot: 1 to 5HZ and external pilot: 1 to 8Hz is reference. The charts on page 10 show the relation for the adjustment needle value and operation frequency. However, there is approx. 2Hz of variation depending on individuality. Operating conditions affect the operating frequency.
The ionizer generates ion at the preset frequency. 0: 1Hz 1: 3Hz 2: 5Hz 3: 10H 4: 15Hz 5: 20Hz 6: 30Hz 7: 60Hz Operation with pulse + Ion Ion (e.g.) Charged workpiece: Charged in negative Static neutralization is completed (6) Wiring of Power supply cable Connect the special power supply cable to the unit.
Standard Specifications Standard Specifications Type of seal Metal seal Rubber seal Fluid Air, Inert gas Air, Inert gas Max. operating pressure 100 psi (0.7MPa) High pressure type 113 psi (0.8MPa) Min. operating pressure 14 psi (0.1MPa) 21 psi (0.15MPa) Valve specifications Solenoid specifications Note 1) Note 1) Ambient and fluid temperature 14 to 122F 14 to 122F Max. operating frequency 20Hz 5Hz
Display of frequency IZT40IZT41 1Hz 3Hz 5Hz 8Hz 10Hz 15Hz 20Hz 30Hz DC DC IZT42 0.1Hz 0.5Hz 1Hz 3Hz 5Hz 8Hz 10Hz 15Hz 20Hz 30Hz Default frequency setting is 30 Hz. Set the optimum frequency depending on the operating environment and installed distance. 4-4-4. Offset voltage adjustment mode Offset voltage is adjusted before shipment.
Display of frequency 1Hz 3Hz 5Hz 8Hz 10Hz 15Hz 20Hz 30Hz DC DC Default frequency setting is 30 Hz. Set the optimum frequency depending on the operating environment and installed distance. 4-4-4. Offset voltage adjustment mode Offset voltage is adjusted before shipment.
No 0-1Hz 1-3Hz 2-5Hz 3-8Hz 4-10Hz 5-15Hz 6-22Hz 7-33Hz 8-5 6 7 ; < = : 9 8 Generate only plus ion 9-Generate only minus ion 6. Selection and setting of equipment 6-1. Sensing DC mode 1. selection of bar length Select the length applicable to work size base on [2. static charge elimination area of 7-1. static charge elimination characteristics (reference)] 2.
SMC endurance test conditions Normal temperature (Room temperature) 5Hz Rated voltage Max. operating pressure The valve was opened and closed, checked for internal and external leakage and proper operation. We confirmed that the product satisfies the product specifications up to 2,000,000 cycles. 16 XSA-OMS0001-A 7. Troubleshooting This section summarizes troubleshooting the product.
Fluid Air Operating pressure range 0.2 to 0.5MPa Internal pilot type Ambient and fluid temperature 5 to 50C Response time (for 0.5MPa) Note 1) 25ms or less Maximum operating frequency 5Hz Manual operation Non-locking push type, Push-turn slotted locking type Pilot valve individual exhaust type, Main valve/pilot valve common exhaust With vacuum pressure gauge Pilot exhaust type Lubrication
Valve specifications Pilot type Type of actuation Air Fluid Main valve Poppet Maximum operating pressure 0.7MPa Effective area 3mm Maximum vacuum pressure 84kPa Operating pressure 0.25 to 0.6MPa Supply pressure range 0.25 to 0.55MPa 5 to 50C Cv factor 0.17 Operating temperature range Polyethylene sintered body (30m) Electrical entry Plug connector Suction filter Maximum operating frequency 5Hz
ZSE1-00ZSM1-0 Vacuum pressure switch 30 m PE (Polyethylene) Suction filter Valve Specifications How to operate Pilot type NBR poppet 3 mm2 Compact and lightweight 15.5 mm width, 400 g (full system) Main valve Effective area Cv factor Operating pressure range Electrical entry Max. operating frequency Voltage Power consumption 0.17 0.25 to 0.7 MPa Plug connector, Grommet (available on DC) 5Hz
Valve Solenoid Max.operating frequency 20Hz 5Hz Individual EXH Pilot valve EXH Not required Lubrication Non-locking push style/Locking slotted style Manual override 150/30 m/s2 Shock/Vibration resistance (2) Dust proof Enclosure 12V, 24V DC and 100V, 110V, 200V, 220V AC 10% of rated voltage Coil rated voltage Allowable voltage Class B or equivalent Coil insurance 1W DC (42mA), 0.5W DC (21mA
Valve Solenoid Max.operating frequency 20Hz 5Hz Individual EXH Pilot valve EXH Not required Lubrication Non-locking push style/Locking slotted style Manual override 150/30 m/s2 Shock/Vibration resistance (2) Dust proof Enclosure 12V, 24V DC and 100V, 110V, 200V, 220V AC 10% of rated voltage Coil rated voltage Allowable voltage Class B or equivalent Coil insurance 1W DC (42mA), 0.5W DC (21mA
Specifications Metal seal Seal Rubber seal Air, lnert gas Fluid Air, lnert gas 0.7MPa (High pressure type: 1.0MPa) Max. operationg pressure 0.15MPa Single Double 2 position Min. operating pressure 0.1MPa only for VQZ3000, 3 position 0.15MPa Valve specifications 0.1MPa 3 position 0.2MPa (1) (1) 10 to 50C Ambient and fluid temperature 10 to 50C SY Single Double Max. operating frequency 20Hz 5Hz
Air, lnert gas Air, lnert gas Fluid 0.7MPa (High pressure type: 1.0MPa) 0.7MPa Max. operating pressure 0.15MPa Single Double 2 position Max. operating pressure 0.1MPa only for VQZ3000, 3 position 0.15MPa Valve specifications Solenoid specifications 0.1MPa 3 position 0.2MPa (1) (1) 10 to 50C Ambient and fluid temperature 10 to 50C SY Single Double 2 position Max. operating frequency 20Hz 5Hz