Vacuum Pad

/N/T)01 ZPB-X3 25-(B/N/T)01 ZPB-X3 50-(B/N/T)01 ZPB-X3 75-(B/N/T)01 ZPB-X3 100-(B/N/T)01 ZP40 With three M3 bolts Buffer stroke () ZP50 40 50 63 80 100 125 Stroke 25 50 75 100 ZP63 With four M4 bolts ZP80 Buffer Specifications (Rotating) ZP100 With four M5 bolts Pad diameter 40 to 80 100, 125 ZP125 Stroke (mm) Spring reactive force 25, 50, 75 25, 50, 75, 100 At 0 stroke (N) 6.9 10 Note 1)

Vacuum Pad

/N/T)01 ZPB-X3 25-(B/N/T)01 ZPB-X3 50-(B/N/T)01 ZPB-X3 75-(B/N/T)01 ZPB-X3 100-(B/N/T)01 ZP40 With three M3 bolts Buffer stroke () ZP50 40 50 63 80 100 125 Stroke 25 50 75 100 ZP63 With four M4 bolts ZP80 Buffer Specifications (Rotating) ZP100 With four M5 bolts Pad diameter 40 to 80 100, 125 ZP125 Stroke (mm) Spring reactive force 25, 50, 75 25, 50, 75, 100 At 0 stroke (N) 6.9 10 Note 1)

Vacuum Pad

/N/T)01 ZPB-X3 25-(B/N/T)01 ZPB-X3 50-(B/N/T)01 ZPB-X3 75-(B/N/T)01 ZPB-X3 100-(B/N/T)01 ZP40 With three M3 bolts Buffer stroke () ZP50 40 50 63 80 100 125 Stroke 25 50 75 100 ZP63 With four M4 bolts ZP80 Buffer Specifications (Rotating) ZP100 With four M5 bolts Pad diameter 40 to 80 100, 125 ZP125 Stroke (mm) Spring reactive force 25, 50, 75 25, 50, 75, 100 At 0 stroke (N) 6.9 10 Note 1)

Vacuum Pad

/N/T)01 ZPB-X3 25-(B/N/T)01 ZPB-X3 50-(B/N/T)01 ZPB-X3 75-(B/N/T)01 ZPB-X3 100-(B/N/T)01 ZP40 With three M3 bolts Buffer stroke () ZP50 40 50 63 80 100 125 Stroke 25 50 75 100 ZP63 With four M4 bolts ZP80 Buffer Specifications (Rotating) ZP100 With four M5 bolts Pad diameter 40 to 80 100, 125 ZP125 Stroke (mm) Spring reactive force 25, 50, 75 25, 50, 75, 100 At 0 stroke (N) 6.9 10 Note 1)

Table of Contents

TU0425R-100-X3 Longer length reel Metric size: Suffix -X3 to the end of part number. Ex.) TU0425G-500-X3 20 m roll Inch size: Suffix -X4 to the end of part number. Ex.) TIUB01W-20-X4 Made to Order Availability Length Model Part no.

T

TS0425R-100-X3 Longer length reel Metric size: Suffix -X3 to the end of part number. Ex.) TS0425G-500-X3 20 m roll Inch size: Suffix -X4 to the end of part number. Ex.) TISA01BU-20-X4 Made to Order Availability Length Model Part no.

2

P R V Nil 1 2 3 Size Size Air compressor size Note) 100 100 kW 125 125 kW 150 150 kW Note) Note that the above values are for reference only.

Table of Contents - Tubing

I.D. 427 TU0425-100-X3 TU0604-100-X3 TU0805-100-X3 TU1065-100-X3 TU1208-100-X3 4 6 8 10 12 2.5 4 5 6.5 8 285 Max. operating pressure 142 0 4 32 70 105 140 10Clean Series Operating temperature F Only available in 20m rolls.

CRB2/CRBU2/CRB1

180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 10 1.2 1.5 15 2.9 3.7 20 6.1 7.9 30 15 20.2 21 25 40 31.5 41 30 32 49 51 66 68 70 73 94 97 118 121 88 93 138 143 188 193 186 197 281 292 376 387 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33 34 48 52 98 104 136 146 272 294 50 Single vane Double vane 63

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

G46-4-l02-X3 0.4 MPa Pressure gauge G46-2-l01-X3 G46-2-l02-X3 Round type Note 2) 0.2 MPa G46-7-l01-X3 G46-7-l02-X3 0.7 MPa Clean Room Compliant, Copper-free, Fluorine-free (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-l01MS-X3 G49-4-l02MS-X3 0.4 MPa Pressure gauge G49-2-l01MS-X3

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

G46-4-l02-X3 0.4 MPa Pressure gauge G46-2-l01-X3 G46-2-l02-X3 Round type Note 2) 0.2 MPa G46-7-l01-X3 G46-7-l02-X3 0.7 MPa Clean Room Compliant, Copper-free, Fluorine-free (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-l01MS-X3 G49-4-l02MS-X3 0.4 MPa Pressure gauge G49-2-l01MS-X3

Table of Contents

Y3 X3 ZY -07L Max. vacuum pressure: 53 kPa Y3 X3 ZY -07S Max. vacuum pressure: 84 kPa Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 50 50 100 100 100 100 Vacuum pressure Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) 40 40 80 80 80 80 Vacuum pressure (kPa

Air Fittings & Tubing

Suffix -X3 to the end of part number. Ex.) T0425B-500X3 Available 150m for 10, 200m for 8, 500m for 4 and 6. Contact SMC for other lengths. Suffix -X3 to the end of part number. Ex.)

Ejector Valve Unit Series ZYY/ZYX 1

Y3 X3 ZY -07L Max. vacuum pressure: 53 kPa Y3 X3 ZY -07S Max. vacuum pressure: 84 kPa Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 50 50 100 100 100 100 Vacuum pressure Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) 40 40 80 80 80 80 Vacuum pressure (kPa

Ejector Valve Unit Series ZYY/ZYX

Y3 X3 ZY -07L Y3 X3 ZY -07S Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics -100 50 -100 -100 50 -100 Vacuum pressure Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) -80 40 -80 -80 40 -80 Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum

Ejector Valve Unit, Series ZYY/ZYX

Exhaust Characteristics/Flow Rate Characteristics Y3 X3 ZY -07L Max. vacuum pressure: 53KPa {400mmHg} Y3 X3 ZY -07S Max. vacuum pressure: 84KPa{630mmHg} Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow rate characteristics 50 50 -100 -100 -100 -100 Vacuum pressure Suction flow rate l/min(ANR) Air consumption flow rate l/min(ANR) Suction flow rate l/min(ANR)

Polyurethane Tubing Series TU/TIUB  — 20 m roll  — 100 m roll Model/Specifications For general pneumatic tubing — Option — Manufactured upon receipt of order (Please consult with SMC.) Flexible Tubing size Polyurethane tubing Metric size (Series

TU0425R-100-X3 Metric size: Suffix -X3 to the end of part number. Ex.) TU0425G-500-X3 Longer length reel 20 m roll Inch size: Suffix -X4 to the end of part number. Ex.) TIUB07W-20-X4 Made to Order Availability Length Model Part no.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

G49-4-02MS-X3 0.4 MPa Pressure gauge G49-2-01MS-X3 G49-2-02MS-X3 Round type Note 2) 0.2 MPa G49-7-01MS-X3 G49-7-02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

G49-4-02MS-X3 0.4 MPa Pressure gauge G49-2-01MS-X3 G49-2-02MS-X3 Round type Note 2) 0.2 MPa G49-7-01MS-X3 G49-7-02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.

T/TIA

T0425R-100-X3 Longer length reel Metric size: Suffix -X3 to the end of part number. Ex.) T0425G-500-X3 20 m roll Inch size: Suffix -X4 to the end of part number. Ex.) TIA01BU-20-X4 KQ2 Reinforced corrugated cardboard specification longer length reel 6, Black and White only: Suffix -X64 to the end of part number. Ex.) T0604B-500-X64 KQB2 Made to Order Availability Length Model Part no.