Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

VK SYJ514 N.C. Base mounted (With sub-plate) 57 (Without sub-plate 43) 59 (Without sub-plate 45) Rc(PT)1/8 4.5 (0.25) SYJ524 N.O. VZ Note 1) At DC. When AC is used, add 1g.

Multistage Ejector (N)ZL Series

SYJ514 With valve 15 Release valve (N.C.)

Multistage Ejector Series ZL

With valve SYJ514 15 Release valve (N.C.)

70pvpump

Specifications 3 port solenoid valve SYJ514/714 SYJ514 SYJ714 Model Piping Valve construction Type of actuation Max.operating pressure Min.operating pressure Effective area (Cv factor) Base mounted Rubber seal Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Table of Contents

4 SYJ514 With valve Supply valve (N.C.) !5 SYJ514 With valve Release valve (N.C.) !

Multistage Ejector Series ZL112/212 1

4 SYJ514 With valve Supply valve (N.C.) !5 SYJ514 With valve Release valve (N.C.) !

SYJ300/500/700

Made to Order Specifications (For details, refer to pages 4-4-54 to 55.) 4-4-18 19 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Grommet L/M plug connector DIN terminal M8 connector SYJ512 SYJ522 SYJ514

3 Port Solenoid Valve SYJ300/500/700 Series

SYJ514 N.C. Base mounted type (With sub-plate) 57 (Without sub-plate 43) 59 (Without sub-plate 45) 1/8 NPTF 4.5 (0.25) SYJ524 N.O.

Vacuum System Peripherals:

vacuum Compact size:Width 10 mm (SY100, SYJ300) Width 15 mm (SYJ500) Width 18 mm (SYJ700) Low power consumption 0.5 W Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) Piping specifications SYJ312/322 M3 x 0.5 0.9 Body ported SYJ512/522 M5 x 6.8 0.53 SYJ712/722 1 8 2.8 SY114/124(A) M3 x 0.5 0.14 SYJ314/324 0.41 1.8 M5 x 0.8 Base mounted (With sub-plate) SYJ514

Process Pump

We recommend that the inner package should be opened inside a clean room or clean environment. 10 Series PB Related Products 1 3 Port Solenoid Valve SYJ314/514 /714 Specifications SYJ314 SYJ514 SYJ714 Model Piping Valve construction Type of actuation Maximum operating pressure Minimum operating pressure Base mounted Rubber seal N.C. 0.7 MPa 0.15 MPa 1.2 0.41 0.32 1.1 0.46 0.32 C[dm3/(sbar

2

Applicable model KQ02-P01NJ KQ2E02-00NJ KQ23-P01NJ KQ2E23-00NJ KQ04-P01NJ KQ2E04-00NJ KQ06-P01NJ KQ2E06-00NJ KQ04-P01N KQ2E23-00N, KQ2E04-00N, KQ2E23-02N KQ2E04-01N, KQ2E04-02N, KQ2LE04-00N KQ06-P01N KQ2E06-00N, KQ2E06-01N, KQ2E06-02N KQ2E06-03N, KQ2LE06-00N Pipe nut KQ08-P01N KQ2E08-00N, KQ2E08-01N, KQ2E08-02N KQ2E08-03N, KQ2LE08-00N KQ10-P01N KQ2E10-00N, KQ2E10-02N, KQ2E10-03N KQ2LE10-00N

3 Port Solenoid Valve Series VQ100 1

Plug lead unit manifold 2 08 01N VV3Q1 Plug-in unit manifold VV3Q12-051 set Manifold base part no. VQ110-5L 4 set Valve part no. (1st to 4th stations) VVQ100-10A-2 1 set Blanking plate part no. (5th stations) Applicable solenoid valve (Plug lead type) VQ10-L VQ10-M VQ10-G 1 VQ100 Series Prefix the asterisk to the part nos. of the solenoid valve, etc.

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

Function: 1 (2 Position Single), Piping: 4 (Base Mounted), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: S (Surge Suppressor), Manual Override: None, Port Size: 01 (Base Mounted w/Sub-plate 1/8), Thread: N (NPT)

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: S (Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: 01 (Body Ported 1/8), Thread: N (NPT)

Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: S (Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: 01 (Body Ported 1/8), Thread: N (NPT)

Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: S (Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: 01 (Base Mounted

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: M (Common EXH), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: S (Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8), Thread: N (NPT)

Type of Actuation: 2 (2 Position Double), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: S (Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: 01 (Base Mounted

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: S (Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8), Thread: N (NPT)