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VQ5000

SOL.B 7B ( ) ( + ) 7 stations SOL.A 8A ( ) ( + ) SOL.B 8B ( ) ( + ) 8 stations 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.A 9A ( ) ( + ) SOL.B 9B ( ) ( + ) 9 stations SOL.A 10A ( ) ( + ) SOL.B 10B ( ) ( + ) 10 stations ( + ) ( ) COM Note) There is no polarity.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

SOL.B 7B ( ) ( + ) 7 stations SOL.A 8A ( ) ( + ) SOL.B 8B ( ) ( + ) 8 stations 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.A 9A ( ) ( + ) SOL.B 9B ( ) ( + ) 9 stations SOL.A 10A ( ) ( + ) SOL.B 10B ( ) ( + ) 10 stations ( + ) ( ) COM Note) There is no polarity.

VS 8-2/VS 8-4

SOL.A 3A SOL.B 3B Station 3 SOL.A 4A SOL.B 4B Station 4 SOL.A 5A 10A COM 10B SOL.B 5B Station 5 SOL.A 6A SOL.B 6B Station 6 SOL.A 7A 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.B 7B Station 7 Double wiring (connected to SOL. A and SOL.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

D Both sides 2 to 20 stations SS5Y9-43-05B-C12 1 set (Type 43, 5-station manifold base part no.) SY9000-26-2A 1 set (Blanking plate assembly part no.) SY9140-5LOZ 2 sets (Single solenoid part no.) SY9220-5LOZ 2 sets (Double solenoid part no.)

SY

Symbol U D B Position U side D side Applicable stations D 2 to 10 SS5Y9-43-05B-C12 . 1 set (Type 43, 5 station manifold base part no.) SY9000-26-2A . 1 set (Blanking plate assembly part no.) SY9140-5LOZ . 2 sets (Single solenoid part no.)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Manifold base (5 stations) 10-SS5Y9-43-05-C12 P, R port outlets Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Option Symbol U D B Port outlet U side D side Applicable stations Symbol Nil D DO Mounting Direct mounting 10-SS5Y9-43-05B-C12 1 set (Type 43, 5-station manifold base part no.)

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Symbol Position U side D side Applicable stations D U D B 2 to 10 SS5Y9-43-05B-C12-Q .1 set (Type 43, 5 station manifold base part no.) SY9000-26-2A-Q .1 set (Blanking plate assembly part no.) SY9140-5LOZ-Q . 2 sets (Single solenoid part no.)

ZP

-10B: ZP3-13B: ZP3-16B: P.52 ZP3B-Y2BK6-B5 Mounting Adapter Part No.

ZP

-10B: ZP3-13B: ZP3-16B: P.52 ZP3B-Y2BK6-B5 Mounting Adapter Part No.

ZP

-10B: ZP3-13B: ZP3-16B: P.52 ZP3B-Y2BK6-B5 Mounting Adapter Part No.

AC Servo Motor Driver (Network card type ）

When the movement is returned at the stroke end 18 82 18EtherCAT COMMUNICATION (j) Method -11 and -43 (dogless Z-phase reference home position return) The following figure shows the operation of Homing method -11. The operation direction of Homing method -43 is opposite to that of Homing method -11.

Compact 5-Port Solenoid Valve

9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A Station 2 Station 3 Station 4 Station 5 10A COM 10B Station 6 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B Station 7 Station 8 If alignment is not specified, the internal wiring will be double wiring (connected to SOL. a and SOL. b) regardless

0.4

SOL.A 8A () (+) Station 8 SOL.B 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 8B () (+) 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.A 9A () (+) Station 9 SOL.B 9B () (+) SOL.A 10A () (+) Station 10 SOL.B 10B () (+) Note) When using the negative COM specification, use valves for negative COM. (+) () COM Note) Negative COM spec.

5-Port Solenoid Valve

9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A Station 2 Station 3 Station 4 Station 5 10A COM 10B Station 6 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B Station 7 Station 8 If alignment is not specified, the internal wiring will be double wiring (connected to SOL. a and SOL. b) regardless

SQ1000/2000

B 10A (+) () 10B (+) () () COM (+) Note) Positive COM spec. Negative COM spec.

1

P.43 P.43 P.43 P.71 SY70 SY30 Manifold Top ported Bottom ported Top ported Type 51 SY50 From page 43 P.43 P.43 P.71 P.43 SY70 SY33 Type 52 SY53 From page 63 P.63 P.63 P.81 P.63 SY73 SY30 Type 10 SY50 From page 95 P.95 P.95 P.113 P.143 P.163 P.171 P.179 P.187 P.95 P.123 P.133 P.151 SY70 Type 11 SY50 From page 95 P.95 P.95 P.143 P.163 P.171 P.179 P.187 P.95 P.113 P.123 P.133 P.151 SY70 SY33

0.4

SOL.A 10B Black 6 stations Manifold Specifications Example Stations 1 2 3 4 5 6 COM.

VQ4000

Refer to pages 2-5-40 to 2-5-43 for control unit.