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DC 99 100 60 40 40 60 80 60 -10 Note 2) 60 40 1 AC DC AC, DC Note) Surge voltage suppressor is attached to the lead wire. Maximum Minimum -10 -5 Note 3) Note 1) D.E.N.P., etc., inside ( ) indicate option codes. Note 2) Dew point is -10C or below.

60, 70, 80, 90, 100 Weight/( ): Denotes the values with D-A93.

60 50 0 to 120 30 to 200 0 to 60 0 to 250 20 to 150 X X X X The above table covers only general characteristics of subject rubber materials.

60 85 110 80 230 250 300 480 Note 1) Not clear, but translucent due to material.

Applicable pad 04S Applicable pad 06S Applicable pad 08S Applicable pad 10S Applicable pad 15S 60 70 60 60 60 4 4 4 4 4 1.5 1.5 1.5 1.5 1.5 4.1 0.8 1.5 2.5 4.1 6.1 3.1 1.6 4.1 10.1 6.9 4.9 2.1 3.9 10.9 Refer to pages 70 and 71 for adapter applicable to the ZP2 series. 30 Symbol/Type Heavy-duty Pad H: Heavy-duty (Flat with rib) HT: Heavy-duty (Thin flat with rib) Pad diameter 32, 150, 250

T VMG Union Y P. 60 KCU Use to branch line in the same direction. 2 branched ports has a self-seal function. Check adaptor P. 60 KCJ Use to add the selfseal mechanism to the usual One-touch fittings, Series KQ. Bulkhead union P. 60 KCE Use to connect tubes through a panel. One of two ports has a self-seal function.

KFV-04 KFV-06 KFN-04 KFN-06 KFW-04 KFW-06 KFS-04 KFS-06 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

60 50 0 to 120 30 to 200 0 to 60 0 to 250 20 to 150 X X X X The above table covers only general characteristics of subject rubber materials.

Applicable pad 04S Applicable pad 06S Applicable pad 08S Applicable pad 10S Applicable pad 15S 60 70 60 60 60 4 4 4 4 4 1.5 1.5 1.5 1.5 1.5 4.1 0.8 1.5 2.5 4.1 6.1 3.1 1.6 4.1 10.1 6.9 4.9 2.1 3.9 10.9 Refer to pages 70 and 71 for adapter applicable to the ZP2 series. 30 Series ZP2 How to Order GS ZP2 T 06 S A3 With adapter Vacuum inlet direction Mounting Direction Vertical Symbol Symbol

60 50 50 NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR Conductive silicon rubber 0 to 120 30 to 200 0 to 60 0 to 250 0 to 100 10 to 200 X X X X X X X X X X X X X X X X X X X X X X X The above table covers only general characteristics of subject rubber materials.

Bore size (mm) 2 Model Note) 10 16 20 25 32 10 ZCUKC ZCUKQ ZCDUKC ZCDUKQ M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 ZCUKD ZCUKR ZCDUKD ZCDUKR 16 20 25 32 U R Note) When using ZC(D)UK 10, use ZP02 to 08U-X11. Pad shape is flat only.

Note) These figures show the SS5Y7-50F2-05B-C10.

(-Q) C8 VQ4 SS5Y5-60(-Q) C10 VQ5 SS5Y7-60(-Q) C12 VQC Note) The value is for manifold base with 5 stations and individually operated 2 position type.

(-Q) C8 10-SS5Y5-60(-Q) C10 10-SS5Y7-60(-Q) C12 Note) The values are for individually operated 2 position type manifold bases with 5 stations. 105 Body Ported 10-SY3000/5000/7000 Type 60 How to Order Valve Note) AC-type models that are CE-compliant have DIN terminals only.

SS5Y52, #1 40 Type20 Note) [ ]: Values for AC < >: Values with surge voltage suppressor SY7000: SS5Y7-20Stations Grommet (G) Scale: 35% L1 L2 10 Manual override 4-4.5 (mounting hole) 6-Rc 1/4 (P, EA, EB port) 19 21 52.8 39.8 B B B B B 39.4 60.7 <61.4> [62.3] 134.4 <135.8> [137.6] P EB EA P EA EB 121.4 <122.8> [124.6] 21 21 30 60 20 26 A A A A A 11.5 16.5 (lead wire length) Approx. 300 (Pitch

60 21 (For mounting) A A A A 83.9 6 x 1/4" 20 (A, B port) {P(1), EA(5), EB(3) port} (Pitch) P = 19 1/4" {A(4), B(2) port} 18 Stations n 2 1 67 41.7 38.3 26.5 L-type plug connector with cover (LL) 53-SS5Y7-20Terminal type (TT) 53-SS5Y7-20Stations Stations 204.2 191.2 170.6 157.6 95.6 71.7 Max. 10 L (Lead wire length) L (Lead wire length) 39 41.7 67 67 Stations n 2 stations 3 stations 4 stations

Manifold Specifications SS5Y5-60 SY560 SS5Y3-60 SY360 Model SS5Y7-60 SY760 Applicable valve Manifold type Stacking DIN rail mounted type P (SUP)/R (EXH) type Common SUP/Common EXH Valve stations 2 to 20 stations Note 1) Ports A, B location Valve C10 (10 One-touch fitting) C8 (8 One-touch fitting) C12 (12 One-touch fitting) Ports P, R Rc(PT) 1/8 C4 (4 One-touch fitting) C6 (6 One-touch fitting