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V100

-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-

SYJ300/500/700

-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-

3 Port Air Operated Valve Series SYJA300

-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Manifold gasket DXT200-9-1 Manifold base Gasket DXT200-9-2 Gasket DXT170-29-1 SYJ500-10-1A Phillips' head screw M2.5 X 7, Matt nickel plated Applicable base SS3YJ5-21R Manifold base Applicable base SS3YJ5-20 Manifold base Applicable base Sub-plate SS3YJ5-40 SS3YJ5-41 SS3YJ5-40R SS3YJ5-41R Blank plate SYJ500-10-1 Manifold base Gasket DXT170-29-1 Applicable base SS3YJ5-20 2.2-25 Series SYJ500

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-

3 Port Solenoid Valve SYJ300/500/700 Series

-21R SS3YJ5-40 SS3YJ5-41 SS3YJ5-40R SS3YJ5-41R Manifold base Gasket DXT200-9-5 Gasket DXT200-9-1 Gasket DXT170-29-1 SYJ500-10-1A Phillips' head screw M2.5 7, Non-gloss nickel plating Applicable base sub-plate SS3YJ5-40 SS3YJ5-41 SS3YJ5-40R SS3YJ5-41R Applicable base SS3YJ5-21R Manifold base Applicable base SS3YJ5-20 Manifold base Blank plate SYJ500-10-1 Manifold base Gasket DXT170-29-1 Applicable

CATALOG

14 33.5 14 18.5 26.1 10 1/4 KQF10-02 17 17 34.5 14 21 41.5 10 3/8 KQF10-03 19 17 36.5 15 21 41.5 12 1/4 KQF12-02 19 19 35 14 22 58.3 12 3/8 KQF12-03 19 19 37 14 22 58.3 12 1/2 KQF12-04 24 19 41 18 22 58.3 P R O D U C T S E L E C T O R N I P P L E : KQN (KQ2N) Use to connect the one-touch fittings D I F F E R E N T D I A M E T E R N I P P L E : KQN (KQ2N) Use to connect different size one-touch

VZ100/300/500

VK Applicable base Sub-plate VV3Z3-40-2 VV3Z3-40-1 VV3Z3-40R-2 VV3Z3-40R-1 Gasket VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Manifold base Applicable base Sub-plate VV3Z3-40-2 VV3Z3-40-1 VV3Z3-40R-2 VV3Z3-40R-1 VT Applicable base VV3Z3-20-1 VV3Z3-21R-1 Manifold

Vacuum System Peripherals:

For vacuum pump servies: Series ZX 13-14-19 3. Series ZM 13-14-20 4.

3 Way,3 Port Solenoid Valve NVZ Series

(M5) one buch One touch .NW3Z3-40R-@1-O NVZ3!4R-OOO Blsnk plale .sCy: DXT200-a-1A lltherc aae more lhan I stations, supply alr and exhaust lrom both sides of manllold.

NVZseies

(M5) one buch One touch .NW3Z3-40R-@1-O NVZ3!4R-OOO Blsnk plale .sCy: DXT200-a-1A lltherc aae more lhan I stations, supply alr and exhaust lrom both sides of manllold.

MXS

Model CXS A B C D E E1 F H J K L G P* Q* M MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BS 8 7 23 14 15.5 40.8 5 12 16.6 7 15.5 14.6 1.4 M8 X 1 M3 X 16 M3 X 16 CXT MXS-BS12 9.5 31 14.5 16 40.8 6 12 20.5 10 15 18.5 1.4 M8 X 1 M4 X 15 M4 X 15 MXS-BS16 11 37 17.5 19 46.7 7 14 23 12 18.5 21 1.4 M10 X 1 M5 X 18 M5 X 18 MX MXS-BS20 13 47 23.5 26 67.3 11 19 27 13 25.5 25 12 M14 X 1.5 M6 X 25 M6 X 25 MXS-BS25

MXS Series Air Slide Table

53.7 14 -M5 X 18 23 12 18.5 M5 X 18 MXS20 MXS-BS20 RB1411 13 47 26 78.3 19 12 M6 X 25 27 13 25.5 M6 X 25 MXS25 MXS-BS25 RB1412 16 53.5 26.5 79.3 19 12 M8 X 25 33 17 25.5 M8 X 25 Mounted to body MXS-BS 8, 12, 16 C A MXS-BS 20, 25 P A C B P B WIDTH ACROSS FLATS E D Mounted to table WIDTH ACROSS FLATS F D WIDTH ACROSS FLATS E H Q I J Dimensions of Retraction End Shock Absorber Unit (mm) Shock

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

-20 10-SS3YJ5-40-M5 10-SS3YJ5-40-01 10-SS3YJ5-41-M5 10-SS3YJ5-41-01 10-SS3YJ5-41-C4 10-SS3YJ5-41-C6 M5 x 0.8 0.47 0.71 0.98 0.71 1.0 0.68 1.0 0.43 0.52 0.36 0.49 0.37 0.35 0.27 0.13 0.21 0.25 0.20 0.26 0.17 0.25 0.74 0.81 0.92 0.80 0.96 1.0 1.0 0.32 0.28 0.24 0.23 0.25 0.25 0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5 x 0.8 1/8 1/8 1/8 1/8 1/8 10-SYJ52M Body ported for internal pilot Base mounted

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

-41-M5 10-SYJ54M Type 10-SS3YJ5-41-01 Type 10-SS3YJ5-41-C4 Type 10-SS3YJ5-41-C6 C6 1/8 Note) The values are for individually operated 2 position type manifold bases.

Table of Contents

Refer to pages 8-19-8 to 8-19-24.

CXS

Seal kits consist of items 19 through 21, and can be ordered by using the seal kit number corresponding to each bore size. 13 Series CXS Construction: Ball Bushing Bearing CXSL6 CXSL10 CXSL15 CXSL20 to 32 Parts list Parts list: Standard piping Description Material Synthetic resin Note 2) Note No. 18 19 20 21 22 23 24 25 26 27 28 29 Description Material Aluminum alloy Special steel Special

V

9.5 19 D I M E N S I O N S S E R I E S ZU A P P L I C A B L E T U B E OD 6 A P P L I C A B L E T U B E OD 6 Courtesy of Steven Engineering, Inc. !