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V100

-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-

SYJ300/500/700

-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-

3 Port Air Operated Valve Series SYJA300

-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Manifold gasket DXT200-9-1 Manifold base Gasket DXT200-9-2 Gasket DXT170-29-1 SYJ500-10-1A Phillips' head screw M2.5 X 7, Matt nickel plated Applicable base SS3YJ5-21R Manifold base Applicable base SS3YJ5-20 Manifold base Applicable base Sub-plate SS3YJ5-40 SS3YJ5-41 SS3YJ5-40R SS3YJ5-41R Blank plate SYJ500-10-1 Manifold base Gasket DXT170-29-1 Applicable base SS3YJ5-20 2.2-25 Series SYJ500

3 Port Solenoid Valve SYJ300/500/700 Series

-21R SS3YJ5-40 SS3YJ5-41 SS3YJ5-40R SS3YJ5-41R Manifold base Gasket DXT200-9-5 Gasket DXT200-9-1 Gasket DXT170-29-1 SYJ500-10-1A Phillips' head screw M2.5 7, Non-gloss nickel plating Applicable base sub-plate SS3YJ5-40 SS3YJ5-41 SS3YJ5-40R SS3YJ5-41R Applicable base SS3YJ5-21R Manifold base Applicable base SS3YJ5-20 Manifold base Blank plate SYJ500-10-1 Manifold base Gasket DXT170-29-1 Applicable

CATALOG

1/8 KQL10-01S 17 18.5 17 26.5 27 32 21 21.6/14.9 25 10 1/4 KQL10-02S 17 18.5 17 26.5 30 33 21 35.2/25.0 26 10 3/8 KQL10-03S 17 18.5 17 26.5 32 34.5 21 35.2/25.0 36 10 1/2 KQL10-04S 22 18.5 17 26.5 36 37 21 35.2/25.0 63 12 1/4 KQL12-02S 17 20.9 17 28.5 31 35.5 22 50.2/39.7 28 12 3/8 KQL12-03S 17 20.9 17 28.5 33 37 22 50.2/39.7 38 12 1/2 KQL12-04S 22 20.9 17 28.5 37 39.5 22 50.2/39.7 65 16

3 Way,3 Port Solenoid Valve NVZ Series

(M5) one buch One touch .NW3Z3-40R-@1-O NVZ3!4R-OOO Blsnk plale .sCy: DXT200-a-1A lltherc aae more lhan I stations, supply alr and exhaust lrom both sides of manllold.

NVZseies

(M5) one buch One touch .NW3Z3-40R-@1-O NVZ3!4R-OOO Blsnk plale .sCy: DXT200-a-1A lltherc aae more lhan I stations, supply alr and exhaust lrom both sides of manllold.

VZ100/300/500

-2 VV3Z3-40R-1 Gasket VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Manifold base Applicable base Sub-plate VV3Z3-40-2 VV3Z3-40-1 VV3Z3-40R-2 VV3Z3-40R-1 VT Applicable base VV3Z3-20-1 VV3Z3-21R-1 Manifold base VP Manifold base Part no.: DXT200-8-6A Round head

Vacuum System Peripherals:

17 Date issued: Photo copying this page is recommended.

MXS

Buffer Specifications MXS6 MXS8 MXS12 MXS16 MXS20 MXS25 Model Bore size (mm) 6 8 12 16 20 25 50 to 500mm/s (Horizontal mounting 50 to 300mm/s) Piston speed Buffer stroke (mm) 5 10 At 0mm stroke At max. stroke 3 5 10 13 17 21 Buffer stroke load (N) 6 8 13 17 25 29 Note) Refer to p.3.11-5 for cautions on buffer.

MXS Series Air Slide Table

13 45.5 MXS-AS20-X11 15 37.5 I MXS-AS20-X12 25 47.5 J H MXS-AS25 5 32.5 MXS25 MXS-AS25-X11 15 42.5 25.5 M8 X 25 M8 X 25 17 6 31 19 26.5 M14 X 1.5 16 53.5 MXS-AS25-X12 25 52.5 Note: Never replace the original adjuster bolts with urethane bumpers with shock absorbers or stopper bolts.

Piping: 40R (Base Mounted), Stations: 2 Stations, A, B Port: 01T (NPTF1/8)

Piping: 40R (Base Mounted), Stations: 4 Stations, A, B Port: 01T (NPTF1/8)

Piping: 40R (Base Mounted), Stations: 5 Stations, A, B Port: 01T (NPTF1/8)

Piping: 40R (Base Mounted), Stations: 8 Stations, A, B Port: 01T (NPTF1/8)

Piping: 40R (Base Mounted), Stations: 12 Stations, A, B Port: 01T (NPTF1/8)