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V100

-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-

SYJ300/500/700

-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-

3 Port Air Operated Valve Series SYJA300

-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Manifold gasket DXT200-9-1 Manifold base Gasket DXT200-9-2 Gasket DXT170-29-1 SYJ500-10-1A Phillips' head screw M2.5 X 7, Matt nickel plated Applicable base SS3YJ5-21R Manifold base Applicable base SS3YJ5-20 Manifold base Applicable base Sub-plate SS3YJ5-40 SS3YJ5-41 SS3YJ5-40R SS3YJ5-41R Blank plate SYJ500-10-1 Manifold base Gasket DXT170-29-1 Applicable base SS3YJ5-20 2.2-25 Series SYJ500

3 Port Solenoid Valve SYJ300/500/700 Series

-21R SS3YJ5-40 SS3YJ5-41 SS3YJ5-40R SS3YJ5-41R Manifold base Gasket DXT200-9-5 Gasket DXT200-9-1 Gasket DXT170-29-1 SYJ500-10-1A Phillips' head screw M2.5 7, Non-gloss nickel plating Applicable base sub-plate SS3YJ5-40 SS3YJ5-41 SS3YJ5-40R SS3YJ5-41R Applicable base SS3YJ5-21R Manifold base Applicable base SS3YJ5-20 Manifold base Blank plate SYJ500-10-1 Manifold base Gasket DXT170-29-1 Applicable

CATALOG

10 23 23 11 MXF16 3.41 5.69 7.96 10 12 10 28 28 12 MXF20 6.66 9.14 13.70 18.27 11 17 11 34 34 17 *Note) 16mm only for MXF8-10.

3 Way,3 Port Solenoid Valve NVZ Series

(M5) one buch One touch .NW3Z3-40R-@1-O NVZ3!4R-OOO Blsnk plale .sCy: DXT200-a-1A lltherc aae more lhan I stations, supply alr and exhaust lrom both sides of manllold.

NVZseies

(M5) one buch One touch .NW3Z3-40R-@1-O NVZ3!4R-OOO Blsnk plale .sCy: DXT200-a-1A lltherc aae more lhan I stations, supply alr and exhaust lrom both sides of manllold.

VZ100/300/500

-2 VV3Z3-40R-1 Gasket VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Manifold base Applicable base Sub-plate VV3Z3-40-2 VV3Z3-40-1 VV3Z3-40R-2 VV3Z3-40R-1 VT Applicable base VV3Z3-20-1 VV3Z3-21R-1 Manifold base VP Manifold base Part no.: DXT200-8-6A Round head

Vacuum System Peripherals:

When ordering the mixed specifications of single and double solenoids, Specify the wiring. 11 11 stations 2 to 19 stations Both sides ... ... When creating the mixed specifications, complete the stations table on the right. 19 19 stations When creating the special specifications, complete the stations table on the right.

MXS

5.5 5.5 11 MY1 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 MXS6L-10 MXS6L-20 MXS6L-30 MXS6L-40 MXS6L-50 3.11-29 Series MXS Dimensions MXS 8L

MXS Series Air Slide Table

3H9 2.5 deep +0.025 0 5 M 0.5 18 20 Z ZZ (NN-1) x H G H 11 5.5 5.5 11 A B 3.2 6.5 7 7 12 4 NN-M4 x 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5

Piping: 40R (Base Mounted), Stations: 2 Stations, A, B Port: 01T (NPTF1/8)

Piping: 40R (Base Mounted), Stations: 4 Stations, A, B Port: 01T (NPTF1/8)

Piping: 40R (Base Mounted), Stations: 5 Stations, A, B Port: 01T (NPTF1/8)

Piping: 40R (Base Mounted), Stations: 8 Stations, A, B Port: 01T (NPTF1/8)

Piping: 40R (Base Mounted), Stations: 12 Stations, A, B Port: 01T (NPTF1/8)