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V100

-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-

2

18 9 26 5 50 AC40-A Y500T-A 5.2 96 48 89.6 40 18 9 26 5 50 AC40-06-A Y400T-A Y200T-A Replacement Parts Description Material Part no.

One-touch Fittings

A 06 00 KQ2 H Tube Tube Type Port size/Applicable tubing O.D.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

-20 10-SS3YJ5-40-M5 10-SS3YJ5-40-01 10-SS3YJ5-41-M5 10-SS3YJ5-41-01 10-SS3YJ5-41-C4 10-SS3YJ5-41-C6 M5 x 0.8 0.47 0.71 0.98 0.71 1.0 0.68 1.0 0.43 0.52 0.36 0.49 0.37 0.35 0.27 0.13 0.21 0.25 0.20 0.26 0.17 0.25 0.74 0.81 0.92 0.80 0.96 1.0 1.0 0.32 0.28 0.24 0.23 0.25 0.25 0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5 x 0.8 1/8 1/8 1/8 1/8 1/8 10-SYJ52M Body ported for internal pilot Base mounted

SYJ300/500/700

-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1.0 0.68 1.0 0.43 0.52 0.36 0.49 0.37 0.35 0.27 0.13 0.21 0.25 0.20 0.26 0.17 0.25 0.74 0.81 0.92 0.80 0.96 1.0 1.0 0.32 0.28 0.24 0.23 0.25 0.25 0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5 x 0.8 1/8 1/8 1/8 1/8 1/8 Type 10-SS3YJ5-40-M5 Type 10-SS3YJ5-40-01 Base mounted for internal pilot C4 1/8 1/8 M5 x 0.8 1/8 Type 10-SS3YJ5-41-M5 10-SYJ54M Type 10-SS3YJ5-41-01 Type 10-SS3YJ5-41-C4 Type

Electro-Pneumatic Proportional Valve

Analyzer, instrumentation Specifications PVQ10 03: 0.3, 04: 0.4, 06: 0.64, 08: 0.8 Model PVQ30 16: 1.6, 23: 2.3, 40: 4.0 Orifice (mm) Fluid Ambient and fluid temperature Port size Max. operating pressure (MPa) Hysteresis Repeatability Proof pressure Rated voltage Power consumption Coil insulation Air, inert gas 0 to +50oC M5 03: 0.7, 04: 0.45, 06: 0.2, 08: 0.1 Rc 1/8 16: 0.7, 23: 0.35, 40

3 Port Air Operated Valve Series SYJA300 1

Change of fluid passage Flow Characteristics Flow characteristics 1 2 (P A) C [dm 3/(sbar)] 27 38 Port size 2 3 (A R) C [dm 3/(sbar)] 27 40 2 1 (A P) C [dm 3/(sbar)] 25 40 3 2 (R A) C [dm 3/(sbar)] 26 38 b 0.38 0.30 b 0.37 0.32 b 0.36 0.22 b 0.37 0.20 Cv 7.0 9.8 Cv 7.4 9.8 Cv 7.3 9.8 Cv 6.8 9.6 1/2 3/4 N.C. N.O.

Compact Vacuum Unit

/ZB041 Exhaust Characteristics Flow-rate Characteristics (Supply pressure: 51 psi (0.35 MPa)) 0.53 14.5 14.5 (15) (100) (100) Vacuum pressure psi (kPa) Vacuum pressure psi (kPa) 0.42 11.6 11.6 (12) (80) (80) Air consumption Vacuum pressure 0.32 8.7 8.7 (9) (60) (60) 0.21 5.8 5.8 (6) (40) (40) 0.11 2.9 2.9 (3) (20) (20) Suction flow 0 0 0 14.5 (0.1) 29 (0.2)43.5 (0.3) 58 (0.4)72.5 (0.5) 87

Compact Vacuum Unit Ejector/ Vacuum Pump System

See page 37 40 - Doc. no.

ZB-OM00301

No.ZB-OM00301 / ZB No.ZB-OM00301 2 9 12 13 15 16 16 V Assy 17 21 25 26 28 28 29 30 30 31 31 32 35 37 38 39 40 Assy 40 Assy 41 42 1 - No.ZB-OM00301 1) (ISO/IEC) (JIS) 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.

3 Port Air Operated Valve Series SYJA300

-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Manifold gasket DXT200-9-1 Manifold base Gasket DXT200-9-2 Gasket DXT170-29-1 SYJ500-10-1A Phillips' head screw M2.5 X 7, Matt nickel plated Applicable base SS3YJ5-21R Manifold base Applicable base SS3YJ5-20 Manifold base Applicable base Sub-plate SS3YJ5-40 SS3YJ5-41 SS3YJ5-40R SS3YJ5-41R Blank plate SYJ500-10-1 Manifold base Gasket DXT170-29-1 Applicable base SS3YJ5-20 2.2-25 Series SYJ500

3 Port Solenoid Valve SYJ300/500/700 Series

-21R SS3YJ5-40 SS3YJ5-41 SS3YJ5-40R SS3YJ5-41R Manifold base Gasket DXT200-9-5 Gasket DXT200-9-1 Gasket DXT170-29-1 SYJ500-10-1A Phillips' head screw M2.5 7, Non-gloss nickel plating Applicable base sub-plate SS3YJ5-40 SS3YJ5-41 SS3YJ5-40R SS3YJ5-41R Applicable base SS3YJ5-21R Manifold base Applicable base SS3YJ5-20 Manifold base Blank plate SYJ500-10-1 Manifold base Gasket DXT170-29-1 Applicable

Piping: Base Mounted, Stations: 2 Stations, A, B Port: NPT1/8, Bracket: -

Piping: Base Mounted, Stations: 3 Stations, A, B Port: NPT1/8, Bracket: -

Piping: Base Mounted, Stations: 4 Stations, A, B Port: NPT1/8, Bracket: -