.· Recommended flow rate: SRF10 2 L/min, SRF30 5 L/min (inlet pressure: 0.3 MPa, fluid: water).· RoHS compliant.· Integrated fitting / with nut / tube extensions.· Pilot port thread types: Rc1/8, NPT1/8.· Body sizes: 1, 3.· Fitting types: LQ1, LQ2, none.

The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact area is washed with freon ultra sonic and DI water. Clean regulator, fluoro resin type; Body sizes: 1/4 (10), 3/8 (30), 3/4 (50); LQ1 or LQ2 fittings available; Fitting sizes: 1/4, 3/8, 1/2, 3/4

The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact area is washed with freon ultra sonic and DI water. Clean regulator series; One piece structure w/LQ fitting; Tube porting available; Tube sizes (inch): 1/4, 3/8; Tube sizes (mm): 6, 8, 10

The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact area is washed with freon ultra sonic and DI water. Clean regulator series; One piece structure w/LQ fitting; Tube porting available; Tube sizes (inch): 1/4, 3/8; Tube sizes (mm): 6, 8, 10

The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact area is washed with freon ultra sonic and DI water. Clean regulator, fluoro resin type; Body sizes: 1/4 (10), 3/8 (30), 3/4 (50); LQ1 or LQ2 fittings available; Fitting sizes: 1/4, 3/8, 1/2, 3/4

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

W1 TY TF TT TH Z TR TS TO TE TX TC TA TU TD-H10 (Hole) TL CXW 40 50 63 80 100 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 62 60 45 12 17 93 9 10 17 119 85 102 10 60 80 15 CA1-S04 74 60 45 12 17 103 9 10 17 129 95 112 10 60 80 15 CXS CA1-S06 90 73 55 14 22 107 11 10 20 150 110 130 15 70 100 18 110 100 75 17 24 129 13.5 12 26 192 140 166 15 90 120 25 CA1-S08 CXT 130 100 75 17 24 135 13.5 12

Table of Contents

Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5 5 19, 3/4" 19, 3/4" TI/ TIL How to Order Valve PA LVC 2 0 S07 A PAX Option PB Body class Nil 1 4 None With flow rate adjustment With indicator Tubing size Symbol 2 3 4 5 Body class 2 3 4 5 Orifice dia. 4 8 12 20 Valve type Symbol S03 S04 S05 S06 S07 S06 S07 S08

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Z TA TD-H10 (Hole) TL TU TC TX TE TO TR TT TS TH TF TY W1 CLS 40 50 63 80 100 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 10 93 80 60 10 102 85 119 17 9 17 12 45 60 62 15 CA1-S04 10 103 80 60 10 112 95 129 17 9 17 12 45 60 74 15 CB CA1-S06 10 107 100 70 15 130 110 150 20 11 22 14 55 73 90 18 12 129 120 90 15 166 140 192 26 13.5 24 17 75 100 110 25 CV/MVG CA1-S08 12 135 120 90 15 188 162

CNA

. +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 15 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 CA1-S06 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 3.3-18 Series CNA Accessory Dimensions Y Type Double

Body Class: 3 (Orifice ø8), Valve Type: 0 (Normally Closed), Tube Size: S08 (ø8)

Body Class: 3 (Orifice ø8), Valve Type: 0 (Normally Closed), Tube Size: S08 (ø8), Pilot Port: N (Body Class 3, 4, 5 - NPT 1/8"), Material: N (Body: PFA, Actuator Endplate: PPS, Diaphragm: PTFE)

Series KV2 Fittings

Weight (grams) Bag/Box Quantity 1/4** 3/8** 1/2** 1/2** 7/16-20 UNF 5/8-18 UNF 5/8-18 UNF 3/4-16 UNF KV2H07-S04 KV2H11-S06 KV2H13-S06 KV2H13-S08 14.29 17.46 22.23 22.23 27.4 33.0 39.5 36.8 17 21 22 22 3.5 5.4 8.5 8.5 14 26 40 61 100/800 100/400 100/200 100/200 ** Non-Standard Product, consult factory for lead time.

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket

Body Style: H (Straight Male Connector, Union, SAE Flare), Tube A: 13 (1/2), Tube B: Not Applicable, Thread-Tube Size: S08 (3/4-16UNF, SAE Flare)

Body Size: 30, Type: S (One Piece Structure w/LQ Fitting), Tube Size: 10 (ø10 x ø8 mm), Pilot Port: N (NPT)

Body Size: 30, Type: T (Tube Porting), Tube Size: 11 (ø3/8" Tube Extensión - ø3/8" x ø1/4" Integral Fitting), Pilot Port: N (NPT)

Body Size: 30, Type: S (One Piece Structure w/LQ Fitting), Tube Size: 11 (ø3/8" Tube Extensión - ø3/8" x ø1/4" Integral Fitting)

Body Size: 30, Type: S (One Piece Structure w/LQ Fitting), Tube Size: 07 (ø1/4" Tube Extensión - ø1/4" x ø5/32" Integral Fitting), Pilot Port: N (NPT)

Body Size: 30, Type: T (Tube Porting), Tube Size: 11 (ø3/8" Tube Extensión - ø3/8" x ø1/4" Integral Fitting)