High Vacuum Angle Valve

(FKM) 1.3 x 1010 (FKM) A w, e, r 1.3 x 108 1.3 x 108 B w, e 1.3 x 108 1.3 x 1010 (FKM) C r 1.3 x 1010 (FKM) 1.3 x 108 D w 1.3 x 108 1.3 x 1010 (FKM) E w, r 1.3 x 108 1.3 x 108 Seal material Symbol Seal material Compound no.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

EXxx-OMN0037CN

2 M12 (4 ) No. 1 LED 2 () 3 4 5 () -15No.EX-OMN0037CN-A 1 24 V() 2 + 3 0 V() 4 5 FE M12 (4 ) 1 24 V 2 A/D DC24 V 3 0 V 4 5 FE FE 100 k 50 IP67 -16No.EX-OMN0037CN-A 0V 2 EX600 4 (-)2 (+) 4 3 4 -17No.EX-OMN0037CN-A LED LED OFF 0 1 () (SI ) -18No.EX-OMN0037CN-A EX600-AXA M12 (5 ) 1 2 (1 /) () DC24 V Class22 A 0.5 A/ 12 bit 010 V15 V05 V 020 mA420 mA 16 bit -1010

CLK1

Unclamp side lock (F) 3-Rc 1/4 Clamp side port 3-Rc 1/4 Unclamp side port 52 N L + Stroke Rear cushion valve Top width across flats 3 4-M6 x 1 Thread depth 12 17 1010 GA W GB 45 45 14 30 BX M 3 25 43 IA BY Max.Wc 40 30 D 13 35 36 Ws Width across flats K Width across flats 44 0.050 0.093 +0.027 0 +0.3 0 +0.4 0 F Shaft: 12d9 Clevis width CLK1A: 16.5 R15 Hole: 12H8 CLK1B: 19.5 S + Stroke 27

Clamp Cylinder with Lock Series CLK1

Unclamp side lock (F) 3-Rc 1/4 Clamp side port 3-Rc 1/4 Unclamp side port 52 N L + Stroke Rear cushion valve Top width across flats 3 4-M6 x 1 Thread depth 12 17 1010 GA W GB 45 45 14 30 BX M 3 25 43 IA BY Max.Wc 40 30 D 13 35 36 Ws Width across flats K Width across flats 44 0.050 0.093 +0.027 0 +0.3 0 +0.4 0 Shaft: 12d9 F Clevis width CLK1A: 16.5 R15 Hole: 12H8 CLK1B: 19.5 S + Stroke 27

Table of Contents

392 588 784 980 1180 1370 1570 1760 1960 1960 OUT 50 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 330 495 660 825 990 1160 1320 1490 1650 1650 IN 624 936 1250 1560 1870 2180 2500 2810 3120 3120 OUT 63 20 560 840 1120 1400 1680 1960 2240 2520 2800 2800 IN 1010

MGG

1130 1260 1260 OUT 40 16 212 318 424 530 636 742 848 954 1060 1060 IN 392 588 784 980 1180 1370 1570 1760 1960 1960 OUT 50 20 330 495 660 825 990 1160 1320 1490 1650 1650 IN 624 936 1250 1560 1870 2180 2500 2810 3120 3120 OUT 63 20 560 840 1120 1400 1680 1960 2240 2520 2800 2800 IN 1010 1510 2010 2520 3020 3520 4020 4530 5030 5030 OUT 80 25 908 1360 1820 2270 2720 3180 3630 4090 4540 4540

Guide Cylinder Series MGG

1130 1260 1260 OUT 40 16 212 318 424 530 636 742 848 954 1060 1060 IN 392 588 784 980 1180 1370 1570 1760 1960 1960 OUT 50 20 330 495 660 825 990 1160 1320 1490 1650 1650 IN 624 936 1250 1560 1870 2180 2500 2810 3120 3120 OUT 63 20 560 840 1120 1400 1680 1960 2240 2520 2800 2800 IN 1010 1510 2010 2520 3020 3520 4020 4530 5030 5030 OUT 80 25 908 1360 1820 2270 2720 3180 3630 4090 4540 4540

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

392 1960 OUT 50 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1490 1320 1650 1160 990 495 660 825 330 1650 IN 2810 2500 3120 2180 1870 936 1250 1560 624 3120 OUT 63 20 2520 2240 2800 1960 1680 840 1120 1400 560 2800 IN 4530 4020 5030 3520 3020 1510 2010 2520 1010

Table of Contents

If it lacks rigidity, it could apply an unbalanced load on the cylinders, leading to a considerable reduction in the durability of the cylinders. 10-17-3 4 Model Selection IN OUT Data (D) Theoretical Output Bore size (mm) Piston area (mm2) Rod size (mm) Operating direction Operating pressure (MPa) (N) 0.2 62.8 52.8 98.2 82.4 161 138 252 220 392 330 624 560 1010 908 1570 1430 2460 2260 3080

CC

If it lacks rigidity, it could apply an unbalanced load on the cylinders, leading to a considerable reduction in the durability of the cylinders. 4.12-3 How to Select an Applicable Model IN OUT Data D Theoretical output table Bore (mm) Piston area (mm2) Rod size (mm) Operating direction Operating pressure (MPa) Unit: N 0.2 62.8 52.8 98.2 82.4 161 138 252 220 392 330 624 560 1010 908 1570

CC

If it lacks rigidity, it could apply an unbalanced load on the cylinders, leading to a considerable reduction in the durability of the cylinders. 10-17-3 Model Selection IN OUT Data (D) Theoretical Output Bore size (mm) Piston area (mm2) Rod size (mm) Operating direction Operating pressure (MPa) (N) 0.2 62.8 52.8 98.2 82.4 161 138 252 220 392 330 624 560 1010 908 1570 1430 2460 2260 3080

Guide Cylinder/Compact Type Series MGC

stroke cylinder/Adjustable retraction type 491 0UT 98.2 147 196 246 295 344 393 442 491 10 25 -XC11 Dual stroke cylinder/Single rod type 412 IN 82.4 124 165 206 247 288 330 371 412 -XC13 Auto switch rail mounting style 0UT 804 161 241 322 402 482 563 643 724 804 12 32 -XC22 Fluororubber seals 691 IN 138 207 276 346 415 484 553 622 691 -XC35 With coil scraper 1260 0UT 252 378 504 630 756 882 1010

E/P Pressure Regulator

Specifications Model 2090 1010 2010 3010 1030 2030 3030 1050 2050 3050 Min.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Gas Select compatible materials of construction for the gas Operating pressure Vacuum to 125 psig (0.9 MPa) Proof pressure 200 psig (1.4 MPa) Ambient and operating temperature 14 to 160F (10 to 71C) (No freezing) Cv 0.29 0.5 Leak rate 1 x 1010 Pam3/sec Connections Compression, Rc, R, NPT Actuation pressure 60 to 110 psig (0.4 to 0.76 MPa) Actuation port connection M5 x 0.8 Actuation port

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Booster Regulator/Air Tank

Gauge ports changed from 1/16" to 1/8" (VBA1A, 2A) Elbow silencer Except VBA2A, 4A Gauge port VBA10A Air-operated type Max. operating pressure 1.6 MPa Fourfold pressure increase type VBA22A VBA11A VBA43A VBA42A 1008 P.1010 Twice 2 to 4 times Pressure increase ratio Knob-operated type (Direct operation) Air-operated type (Remote operation) Knob-operated type (Direct operation) Operation Set

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

1130 1260 1260 OUT 40 16 212 318 424 530 636 742 848 954 1060 1060 IN 392 588 784 980 1180 1370 1570 1760 1960 1960 OUT 50 20 330 495 660 825 990 1160 1320 1490 1650 1650 IN 624 936 1250 1560 1870 2180 2500 2810 3120 3120 OUT 63 20 560 840 1120 1400 1680 1960 2240 2520 2800 2800 IN 1010 1510 2010 2520 3020 3520 4020 4530 5030 5030 OUT 80 25 908 1360 1820 2270 2720 3180 3630 4090 4540 4540

E/P Pressure Regulator

Specifications 1030 2030 3030 1050 2050 3050 Model 2090 1010 2010 3010 Min.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

(FKM) 1.3 x 1011 (FKM) A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Sealmaterial Symbol Seal material Compound no.