2

70 70 0 100 200 300 400 0 100 200 300 Outlet air flow rate (L/min [ANR]) Outlet air flow rate (L/min [ANR]) How to read the Performance Chart and select the model Model q: P1 = 0.3 MPa Model w: P1 = 0.3 MPa Solid lines and dashed lines beginning at the top indicate the performance of inlet air temperature at 25C and inlet air pressure P1 = 0.3 MPa, 0.5 MPa, 0.7 MPa respectively.

CATALOG

Collision Speed (mm/s) 200 200 1500 200 1500 Max.

15

70 10 75 Stroke [mm] 100 1000 70 10 75 LEY u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s LES 10 10 LEYG32M Load mass m [kg] Load mass m [kg] LEYG32M LEPY LEPS LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LER LEYG25M LEYG25M LEH 0.1 0.1 LEY -X5 Stroke [mm] 100 1000 70 10 75 Stroke [mm] 100 1000 70 10 75 11LEFS Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max

Air Slide Table

V = 200 2.0 2.0 1.0 1.0 0.0 0.0 0 10 20 30 40 50 60 70 80 90 0 10 20 30 40 60 50 70 Allowable overhang L [mm] Allowable overhang L [mm] MXQ20(A)-75Z MXQ20(A)-100, 150Z 7.0 7.0 V = mm/s V = mm/s 6.0 6.0 Load mass m [kg] Load mass m [kg] V = 50 5.0 5.0 V = 50 V = 150 V = 150 V = 100 V = 100 4.0 4.0 3.0 3.0 V = 200 V = 200 2.0 2.0 1.0 1.0 0.0 0.0 200 150 100 50 0 250 0 20 40 60 80 100 120 Allowable

Table of Contents

and the eccentric distance of 70 mm on graph (5), based on vertical mounting, ball bushing, 75 mm stroke, and the speed of 200 mm/s.

A

Collision Speed (mm/s) 200 200 1500 200 1500 Max.

Table of Contents

100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Battery-less

30 40 Pushing force set value [%] LESYH16mEm 400 Lead 6: LESYH16 EB 350 300 250 Force [N] 200 150 Lead 12: LESYH16 EA 100 50 0 80 50 60 70 30 40 Pushing force set value [%] LESYH25mEm 450 400 Lead 8: LESYH25 EB 350 300 Force [N] 250 200 150 Lead 16: LESYH25 EA 100 50 0 80 50 60 70 30 40 Pushing force set value [%] 94 LESYH Series Battery-less Absolute (Step Motor 24 VDC) * These graphs

Compact Cylinder

D 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 50 55 60 65 70 75 80 85 90 125 150 D 55 60 65 70 75 80 85 90 95 130 155 65 70 75 80 85 90 95 100 105 140 165 Cylinder model C D 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 120 145 Mounting bolt part no. Cylinder model C Cylinder model C Mounting bolt part no.

NCQ2/CQ2

and 200 bores.

TABLE OF CONTENTS

300) 200 (200) 150 (200) 100 (125) 100 35 (40) N.O.

CATALOG VC10

300) 200 (200) 150 (200) 100 (125) 100 35 (40) N.O.

Electric Actuator/Slider Type

70 10 75 100 1000 70 10 75 Stroke [mm] Stroke [mm] u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s 10 10 Load mass m [kg] Load mass m [kg] LEYG32M LEYG32M LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LEYG25M LEYG25M 0.1 0.1 100 1000 70 10 75 100 1000 70 10 75 Stroke [mm] Stroke [mm] Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max. speed = 200 mm/s or less

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Caution 5 150 100 200 300 1.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt C' D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 125 150 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 130 155 D 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 65 70

Made to Order

70 70 80 80 110 110 c 43 43 43 50 50 70 70 ZZ 318 318 336 378.5 378.5 476 496 With auto switch 180: 382.5, 200: 387.5 d 36 36 36 45 50 60 70 e 27 27 27 37.5 37.5 50 50 f 40 40 40 45 45 55 55 h 110 110 110 132.5 132.5 175 175 i 90 90 90 115 115 140 140 Bore size (mm) 125 140 160 180 200 250 300 M30 x 1.5 M30 x 1.5 M30 x 1.5 M42 x 1.5 M42 x 1.5 M56 x 2 M56 x 2 c + Adjustment h + Stroke

Electric Actuator with Integrated Guide

Motor output (W) Motor model Compatible driver model Power supply voltage (V AC) Motor dimension (mm) 100/115 MSD021P1E MSM021P1A Matsushita Electric Industrial Co., Ltd. 95 MSM022P1A 200 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation 89 200 HC-PQ23 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yasukawa Electric Corporation 96.5 200/230 SGDE-02AP SGME-02AF12 Refer

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Pressure 0.6 MPa 0.5 MPa 0.5 MPa 200 200 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 150 150 0.2 MPa 0.2 MPa 100 100 0.1 MPa 0.1 MPa 50 50 0 0 10 10 50 50 20 20 30 30 40 40 60 60 70 70 Gripping point L (mm) Gripping point L (mm) MHS3-63D MHS3-63D 500 500 Pressure 0.6 MPa Pressure 0.6 MPa 400 400 Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa 300 300 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 200 200 0.2

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

[mm] 100 1000 70 10 75 LEY u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s LES 10 10 Load mass m [kg] Load mass m [kg] LEYG32M LEYG32M LEPY LEPS LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LER LEYG25M LEYG25M LEH 0.1 0.1 LEY -X5 Stroke [mm] 100 1000 70 10 75 Stroke [mm] 100 1000 70 10 75 11LEFS Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max. speed = 200

Electric Actuators

T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire 100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 LC1-1B1H1Without brake (Horizontal specification) Main circuit