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Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 50/30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket: Both

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: TN (NPT Thread), Full Stroke: 50mm, First Stroke: 30mm

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 50/30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket: Both

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: TN (NPT Thread), Full Stroke: 50mm, First Stroke: 30mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: NPT Thread, Full Stroke: 50mm, First Stroke: 30mm, Auto Switch: A73C--Reed, DC Volt.>5,<24, LED, Connector, Vertical, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 3 pcs.

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: NPT Thread, Full Stroke: 50mm, First Stroke: 30mm, Auto Switch: A73C--Reed, DC Volt.>5,<24, LED, Connector, Vertical, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 1 pc.

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: NPT Thread, Full Stroke: 50mm, First Stroke: 30mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

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Valve size Valve size 50 50 DOWN DOWN Existing At 300 mm/s Possible to drive cylinders Up to 50 Valve size Valve size 63 63 DOWN DOWN (80 at 100 mm/s) Existing Possible to drive cylinders Up to 63 80 Page 30 (125 at 100 mm/s) Sub-plate newly added! Sub-plate newly added!

High Vacuum Angle Valve

-1 XLG63-30-1H-1 XLGV63-30-1 50 XLA50-30-1 XLA50A-30-1 XLA50-30-1H XLA50A-30-1H XLAV50-30-1 XLAV50A-30-1 XLC50-30-1-1 XLC50-30-1H-1 XLCV50-30-1-1 XLF50-30-1 XLF50A-30-1 XLF50-30-1H XLF50A-30-1H XLFV50-30-1 XLFV50A-30-1 XLD50-30-1 XLD50-30-1H XLDV50-30-1 XLG50-30-1-1 XLG50-30-1H-1 XLGV50-30-1 XLH50-30-1 40 XLA40-30-1 XLA40A-30-1 XLA40-30-1H XLA40A-30-1H XLAV40-30-1 XLAV40A-30-1 XLC40-30-1

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30 30 40 40 50 50 Gripping point L (mm) Gripping point L (mm) Misc.

Aluminum High Vacuum Angle Valve

-1 XLG63-30-1H-1 XLGV63-30-1 50 XLA50-30-1 XLA50A-30-1 XLA50-30-1H XLA50A-30-1H XLAV50-30-1 XLAV50A-30-1 XLC50-30-1-1 XLC50-30-1H-1 XLCV50-30-1-1 XLF50-30-1 XLF50A-30-1 XLF50-30-1H XLF50A-30-1H XLFV50-30-1 XLFV50A-30-1 XLD50-30-1 XLD50-30-1H XLDV50-30-1 XLG50-30-1-1 XLG50-30-1H-1 XLGV50-30-1 XLH50-30-1 40 XLA40-30-1 XLA40A-30-1 XLA40-30-1H XLA40A-30-1H XLAV40-30-1 XLAV40A-30-1 XLC40-30-1

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50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

Table of Contents

Bore size/ Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

ISO Cylinder

C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Rod flange: Cl85Nl lG (With mounting bracket) Standard (W) FT Head flange: Cl85Nl lG (With mounting bracket) UF TF (WL + Stroke) FT UR FB [mm] Bore size FBH13 FT TF UF UR (W) (WL) 8 4.5 3.2 30 40 22 12.8 65.2 10 4.5 3.2 30 40 22 12.8 65.2 (72.2) 12 5.5 4 40 52 30 18 76 (80) 16 5.5 4 40 52 30 18 82 20 6.6 5 50 66 40 19 91 25 6.6 5 50

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style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Free Mount Cylinder

JIS Symbol Double acting, Single rod 5, 10, 15, 20, 25, 30, 40, 50 20, 25, 32 For "Long Stroke", refer to P. 36.