Table of Contents

30 30 40 40 50 50 Gripping point L (mm) Gripping point L (mm) Misc.

Aluminum High Vacuum Angle Valve

-1 XLG63-30-1H-1 XLGV63-30-1 50 XLA50-30-1 XLA50A-30-1 XLA50-30-1H XLA50A-30-1H XLAV50-30-1 XLAV50A-30-1 XLC50-30-1-1 XLC50-30-1H-1 XLCV50-30-1-1 XLF50-30-1 XLF50A-30-1 XLF50-30-1H XLF50A-30-1H XLFV50-30-1 XLFV50A-30-1 XLD50-30-1 XLD50-30-1H XLDV50-30-1 XLG50-30-1-1 XLG50-30-1H-1 XLGV50-30-1 XLH50-30-1 40 XLA40-30-1 XLA40A-30-1 XLA40-30-1H XLA40A-30-1H XLAV40-30-1 XLAV40A-30-1 XLC40-30-1

Table of Contents

50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

Compact Hydraulic Cylinder

CHKm Standard Strokes JIS symbol CHN CHM Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 CHSm 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 CH2m 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 CHA 10, 15, 20, 25, 30, 35, 40,

Air Cylinder

to 750 mm/s Air cushion 50 to 1000 mm/s JCM Symbol Rubber bumper 0.012 J 0.035 J 0.090 J Air cushion Double acting, Double rod, Rubber bumper Allowable kinetic energy (Effective cushion length) 0.07 J (9.4 mm) 0.18 J (9.4 mm) Stroke length tolerance +1.0 0 CM2 CM3 Standard Strokes CG1 Air cushion [mm] Bore size Standard stroke 6 15, 30, 45, 60 10 15, 30, 45, 60, 75, 100, 125, 150 16 15

Table of Contents

Bore size/ Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

ISO Cylinder

C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Rod flange: Cl85Nl lG (With mounting bracket) Standard (W) FT Head flange: Cl85Nl lG (With mounting bracket) UF TF (WL + Stroke) FT UR FB [mm] Bore size FBH13 FT TF UF UR (W) (WL) 8 4.5 3.2 30 40 22 12.8 65.2 10 4.5 3.2 30 40 22 12.8 65.2 (72.2) 12 5.5 4 40 52 30 18 76 (80) 16 5.5 4 40 52 30 18 82 20 6.6 5 50 66 40 19 91 25 6.6 5 50

NCQ2/CQ2

Dimensions (Without auto switch) Double acting, Single rod: Female thread H thread effective depth C A + Stroke B + Stroke L 12 20 32 40 50 63 80 100 Bore size 5, 10 20, 30 40, 50 26.5 (28.5) 23 3.5 (5.5) 15, 25 5, 10 20, 30 40, 50 5, 10 20, 30 40, 50 10, 20 30, 40 50 10, 20 30, 40 50 10, 20 30, 40 50 10, 20 30, 40 50 Stroke (mm) 15, 25 35, 45 15, 25 35, 45 15, 25 35, 45 15, 25 35, 45 15,

Table of Contents

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

NCG/CG1

30 31 35.5 43 43 D-C73C, D-C80C D-B5, D-B6 D-B59W Bore size (mm) B 28.5 28.5 29.5 32.5 40.5 40.5 Hs 24.5 27 30.5 35 40.5 47.5 A 30 30 31 35.5 43 43 B 28.5 28.5 29.5 32.5 40.5 40.5 B 22.5 22.5 23.5 26.5 34.5 34.5 B 25.5 25.5 26.5 29.5 37.5 37.5 Hs 27 29.5 33 37.5 43 50 A Hs 27 30 33.5 38 43.5 50.5 A 27 27 28 32.5 40 40 Hs 27.5 30 33.5 38 43.5 50.5 20 25 32 40 50 63 24 24 25 29.5 37 37 D-H7

Free Mount Cylinder

JIS Symbol Double acting, Single rod 5, 10, 15, 20, 25, 30, 40, 50 20, 25, 32 For "Long Stroke", refer to P. 36.

Air Cylinder Series CM2

59 18.4 37 3.2 30 30 6.8 15 20 202 177 227 21.5 6 25 59 18.4 37 3.2 30 30 15 6.8 25 206 181 231 24.5 6 32 75 28 50 4 40 40 15 9 32 224 274 199 249 27 6 40 75 28 50 4 40 40 15 9 40 328 253 303 228 278 32.5 8 170 Air Cylinder: Non-rotating Rod Type Double Acting, Single Rod Series CM2K 20, 25, 32, 40 CJ1 How to Order CJP Cylinder stroke (mm) (Refer to Standard Stroke on page 172.)

Compact Cylinder

Dimensions (Without auto switch) Double acting, Single rod: Female thread H thread effective depth C B + Stroke L A + Stroke 20 32 40 50 63 80 100 12 Bore size 15, 25 5, 10 20, 30 40, 50 5, 10 20, 30 40, 50 26.5 (28.5) 23 3.5 (5.5) 5, 10 20, 30 40, 50 10, 20 30, 40 50 10, 20 30, 40 50 10, 20 30, 40 50 10, 20 30, 40 50 Stroke (mm) 15, 25 35, 45 15, 25 35, 45 15, 25 35, 45 15, 25 35, 45 15,

Smooth Cylinder/Low Speed Cylinder

Bolt for CQSYB without Auto Switch Cylinder model C Cylinder model C D 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Mounting bolt part no.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

force (N) 0.4 MPa 0.4 MPa 75 75 External grip 0.3 MPa 0.3 MPa 50 50 0.2 MPa 0.2 MPa F 25 25 0.1 MPa 0.1 MPa 0 0 10 10 20 20 30 30 40 40 50 50 Gripping point L (mm) Gripping point L (mm) F F MHS4-50D MHS4-50D 200 200 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 150 150 Gripping force (N) Gripping force (N) F 0.4 MPa 0.4 MPa Internal grip 100 100 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 50 50

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

Air Cylinder Series MB

L RR U Z ZZ 32 40 50 63 80 100 125 32 40 50, 63 80, 100 125 to 500 to 500 to 600 to 600 to 800 to 800 to 1000 23 23 30 30 42 42 50 10.5 11 15 15 23 23 28 13 13 17 17 26 26 30 28 28 40 40 60 60 64 154 158 182 182 228 228 267 164.5 169 197 197 251 251 295 10 10 14 14 22 22 25 14 14 20 20 30 30 32 160 164 190 238 279 170.5 175 205 261 307 Double clevis Model without air cushion is designed

Air Cylinder

M8 x 1.25 24 M20 x 1.5 1/8 9 14 25 22 19.5 17 9 30 25 10 19 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 14 32 22 19.5 17 9 30 25 10 19 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 30 M10 x 1.25 34.5 M26 x 1.5 1/8 9 14 40 24 21 22 10 38 41.2 15 30 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 39 M14 x 1.5 42.5 M32 x 2 1/4 11 18 Dimensions by Stroke (mm) Stroke 1 to 50 51

5

30 34 30 31 30 30 30 30 30 37.5 35 42.5 33 37 71.5 81.5 38.5 31.5 38 31.5 73 69 81 69 50 34 34 38 34 35 34 34 34 34 34 41.5 39 46.5 37.5 42 76.5 86.5 42 35.5 42 35.5 78.5 77 86.5 77 63 41 41 44 41 41.5 41 41 41 41 41 50 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 80 49.5 49 52.5 49 50 49 49.5 49 49.5 49 58 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 61 56

Electric Actuator/Slider Type

LEY25 (Top/Parallel)/LEY25D (In-line) LEY32 (Top/Parallel) LEY32D (In-line) Stroke [mm] Note 1) 30, 50, 100, 150, 200, 250, 300, 350, 400 30, 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 30, 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 Work load [kg] Horizontal Note 2) 18 50 50 30 60 60 30 60 60 Vertical 8 16 30 9 19 37 12 24 46 Pushing force lbf [N] Note 3) (Set value: 45 to 90%)