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30 30 40 40 50 50 Gripping point L (mm) Gripping point L (mm) Misc.

Aluminum High Vacuum Angle Valve

-1 XLG63-30-1H-1 XLGV63-30-1 50 XLA50-30-1 XLA50A-30-1 XLA50-30-1H XLA50A-30-1H XLAV50-30-1 XLAV50A-30-1 XLC50-30-1-1 XLC50-30-1H-1 XLCV50-30-1-1 XLF50-30-1 XLF50A-30-1 XLF50-30-1H XLF50A-30-1H XLFV50-30-1 XLFV50A-30-1 XLD50-30-1 XLD50-30-1H XLDV50-30-1 XLG50-30-1-1 XLG50-30-1H-1 XLGV50-30-1 XLH50-30-1 40 XLA40-30-1 XLA40A-30-1 XLA40-30-1H XLA40A-30-1H XLAV40-30-1 XLAV40A-30-1 XLC40-30-1

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50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

Compact Hydraulic Cylinder

CHKm Standard Strokes JIS symbol CHN CHM Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 CHSm 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 CH2m 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 CHA 10, 15, 20, 25, 30, 35, 40,

Free Mount Cylinder

JIS Symbol Double acting, Single rod 5, 10, 15, 20, 25, 30, 40, 50 20, 25, 32 For "Long Stroke", refer to P. 36.

Table of Contents

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Air Cylinder

to 750 mm/s Air cushion 50 to 1000 mm/s JCM Symbol Rubber bumper 0.012 J 0.035 J 0.090 J Air cushion Double acting, Double rod, Rubber bumper Allowable kinetic energy (Effective cushion length) 0.07 J (9.4 mm) 0.18 J (9.4 mm) Stroke length tolerance +1.0 0 CM2 CM3 Standard Strokes CG1 Air cushion [mm] Bore size Standard stroke 6 15, 30, 45, 60 10 15, 30, 45, 60, 75, 100, 125, 150 16 15

Table of Contents

Bore size/ Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

ISO Cylinder

C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Rod flange: Cl85Nl lG (With mounting bracket) Standard (W) FT Head flange: Cl85Nl lG (With mounting bracket) UF TF (WL + Stroke) FT UR FB [mm] Bore size FBH13 FT TF UF UR (W) (WL) 8 4.5 3.2 30 40 22 12.8 65.2 10 4.5 3.2 30 40 22 12.8 65.2 (72.2) 12 5.5 4 40 52 30 18 76 (80) 16 5.5 4 40 52 30 18 82 20 6.6 5 50 66 40 19 91 25 6.6 5 50

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: NPT Thread, Full Stroke: 50mm, First Stroke: 30mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: NPT Thread, Full Stroke: 50mm, First Stroke: 30mm, Auto Switch: A73C--Reed, DC Volt.>5,<24, LED, Connector, Vertical, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 3 pcs.

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: NPT Thread, Full Stroke: 50mm, First Stroke: 30mm, Auto Switch: A73C--Reed, DC Volt.>5,<24, LED, Connector, Vertical, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 1 pc.

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: TN (NPT Thread), Full Stroke: 50mm, First Stroke: 30mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal

NCQ2/CQ2

Dimensions (Without auto switch) Double acting, Single rod: Female thread H thread effective depth C A + Stroke B + Stroke L 12 20 32 40 50 63 80 100 Bore size 5, 10 20, 30 40, 50 26.5 (28.5) 23 3.5 (5.5) 15, 25 5, 10 20, 30 40, 50 5, 10 20, 30 40, 50 10, 20 30, 40 50 10, 20 30, 40 50 10, 20 30, 40 50 10, 20 30, 40 50 Stroke (mm) 15, 25 35, 45 15, 25 35, 45 15, 25 35, 45 15, 25 35, 45 15,

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

NCG/CG1

30 31 35.5 43 43 D-C73C, D-C80C D-B5, D-B6 D-B59W Bore size (mm) B 28.5 28.5 29.5 32.5 40.5 40.5 Hs 24.5 27 30.5 35 40.5 47.5 A 30 30 31 35.5 43 43 B 28.5 28.5 29.5 32.5 40.5 40.5 B 22.5 22.5 23.5 26.5 34.5 34.5 B 25.5 25.5 26.5 29.5 37.5 37.5 Hs 27 29.5 33 37.5 43 50 A Hs 27 30 33.5 38 43.5 50.5 A 27 27 28 32.5 40 40 Hs 27.5 30 33.5 38 43.5 50.5 20 25 32 40 50 63 24 24 25 29.5 37 37 D-H7

Air Cylinder Series CM2

59 18.4 37 3.2 30 30 6.8 15 20 202 177 227 21.5 6 25 59 18.4 37 3.2 30 30 15 6.8 25 206 181 231 24.5 6 32 75 28 50 4 40 40 15 9 32 224 274 199 249 27 6 40 75 28 50 4 40 40 15 9 40 328 253 303 228 278 32.5 8 170 Air Cylinder: Non-rotating Rod Type Double Acting, Single Rod Series CM2K 20, 25, 32, 40 CJ1 How to Order CJP Cylinder stroke (mm) (Refer to Standard Stroke on page 172.)

Compact Cylinder

Dimensions (Without auto switch) Double acting, Single rod: Female thread H thread effective depth C B + Stroke L A + Stroke 20 32 40 50 63 80 100 12 Bore size 15, 25 5, 10 20, 30 40, 50 5, 10 20, 30 40, 50 26.5 (28.5) 23 3.5 (5.5) 5, 10 20, 30 40, 50 10, 20 30, 40 50 10, 20 30, 40 50 10, 20 30, 40 50 10, 20 30, 40 50 Stroke (mm) 15, 25 35, 45 15, 25 35, 45 15, 25 35, 45 15, 25 35, 45 15,

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

force (N) 0.4 MPa 0.4 MPa 75 75 External grip 0.3 MPa 0.3 MPa 50 50 0.2 MPa 0.2 MPa F 25 25 0.1 MPa 0.1 MPa 0 0 10 10 20 20 30 30 40 40 50 50 Gripping point L (mm) Gripping point L (mm) F F MHS4-50D MHS4-50D 200 200 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 150 150 Gripping force (N) Gripping force (N) F 0.4 MPa 0.4 MPa Internal grip 100 100 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 50 50

Smooth Cylinder/Low Speed Cylinder

Bolt for CQSYB without Auto Switch Cylinder model C Cylinder model C D 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Mounting bolt part no.