HRX-OM-M005

Item Setting range Descriptions Factory default DI PV, DI SP, N/A, TEMP PV, TEMP SP, FLOW PV, FLOW SP, PRESS Used to specify the type of analog output signal. DI PV, DI SP is displayed only if the DI control kit (optional) is provided.

HRX-OM-X010

Item Descriptions Setting Range Factory Default Store the TEMP SP and FLOW SP value with serial communication.

Vacuum Module Series ZX

ZX1-DR1 SP How to Order Unit for Replacement ZCUK (1) Valve unit (4) Adsorption confirmation switch unit Refer to page 872 for details.

HRX-OM-I051

Item Setting range HRZL : -20.0 to 40.0C HRZ-L2 : 10.0 to 40.0C HRZ-H : 20.0 to 90.0C HRZ-W : -20.0 to 90.0C 1 TEMP SP 2 FLOW SP 10 to 40LPM(2.6 to 10.6GPM) FLOW SP is only indicated on HRZ010-W*S and Setting is available.

HRX-OM-K003

Item Setting range 1 TEMP SP 20.0 to 90.0C 2 FLOW SP 10 to 40LPM(2.6 to 10.6GPM) FLOW SP is only indicated on HRW-HS and Setting is available*2. [Tips] See Mode Selection screen in Chapter 5 on page 5-6 for details on SER REMOTE (*1).

Large Size Vacuum Module: Series ZR

(Solenoid valve: 24 VDC, M plug connector type) ZP SP How to Order Refer to page 940 for further part no. information.

Adsorption Plate

Adsorption surface area Closeup picture This value represents the average diameter when air vents are converted to a circle. 1 mm Body part Aluminum casted Adsorption surface (Sintered metallic element) Stainless steel 751 Adsorption Plate SP Series RoHS SP SP How to Order ZCUK AMJ SP 30 1 1 AFJ Sintered metallic element particle diameter Adsorption Plate AMV 30 0.3 standard ZH -X185 Adsorption

HRX-OM-Y098

[Example of setting] Circulating fluid SP: 20C (1) High Temp. CH1 circulating fluid temperature rise (AL10): 22C (2) Low Temp.

HRX-OM-X037

[Example of setting] Circulating fluid SP: 20C (1) High Temp. CH1 circulating fluid temperature rise (AL10): 22C (2) Low Temp.

HRX-OM-W060

[Example of setting] Circulating fluid SP: 20C (1) High Temp. CH1 circulating fluid temperature rise (AL10): 22C (2) Low Temp.

Air Pilot Operated

PORTING {No. of porb) "xx" sP 0111 :{" NPTF Side t5l sP 0112 7." NPTF Side (5) 42 sP 0113 %" NPTF Side (5), '/t" NPTF Bottorn (5) 4:l sP 0114 Y." NPTF Botlom (5) sP 0115 %" NPTF Side (5) Lefl & Righl End Plates hcludes (3)O.Rings ARP 565015 (1) Ptuo AXT a369 Lett & Fight End Plates Short w/o Conduit NpT Threads. Includes (3) O-Rings AFP 568-01S Trerods .

Air Pilot Operated Series NVSA

PORTING {No. of porb) "xx" sP 0111 :{" NPTF Side t5l sP 0112 7." NPTF Side (5) 42 sP 0113 %" NPTF Side (5), '/t" NPTF Bottorn (5) 4:l sP 0114 Y." NPTF Botlom (5) sP 0115 %" NPTF Side (5) Lefl & Righl End Plates hcludes (3)O.Rings ARP 565015 (1) Ptuo AXT a369 Lett & Fight End Plates Short w/o Conduit NpT Threads. Includes (3) O-Rings AFP 568-01S Trerods .

Vacuum Ejector Series ZM

ZMA ZQ ZH ZU 00 ZZM ZL Stations Without exhaust ports on both sides ZY ZF Exhaust spacer assembly: ZM SP ZP Nil T F Rc NPTF G SP ZCUK AMJ Construction AMV AEP Gasket Spacer E HEP Round head combination screw Related Equipment 67.5 Standard model + 14.5 Individual exhaust port (EXH) 1/8 (Rc, NPTF, G) Exhaust 1005 Series ZM Made to Order Specifications 3 Please contact SMC for detailed specifications

DOC1001322

SP *0.45MPa (4) The pump operation is controlled to maintain the set flow rate when control mode (operation mode) is set .

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

NBR (g) Model Mass Model Mass SP (g) ZPX40HBN-01-B 8 ZPX 80HBN-01-B10 150 275 Pad dia.

Direct Solenoid

SP O2('5 (1'{' NPIF PORTg |l{ct-uDEs 1 Block XI 01 t2 3 Soc Hd Sc.ws NXT010.19A (1G24X1%1 1 Gaskol NXT010.14 2 Fltlsh Plugs r/4"NPT ORDERII{G PART NO. SP O30' (3,l .

Ejector Valve Unit Series ZYY/ZYX

Brown DC (+) ZF (OUT1) Black + Covering retainer Core wire crimping area Load ZP 12 to 24 VDC 80mA Core wire Lead wire Socket Blue DC () SP Hook Covering 3.

Compact Vacuum Ejector Series ZA

ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ AMV AEP HEP Related Equipment 861

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Suction Filter Prevent from occurring vacuum equipment trouble due to dust from vacuum pad ZA ZX Port size ZR Features Page Filtration (m) Air flow (l/min(ANR)) Series Screw-in Applicable tubing O.D. for one-touch fittings ZM ZMA ZQ ZFA Long maintenance cycle type (Large filter surface) ZH P.1105 30 1/8: 50 ZU 1/4: 200 1/8, 1/4 Adaptable for a manifold application ZL ZY Metal body ZF ZP SP

Free Mount Cylinder for Vacuum Series ZCUK

SP Non-rotationg rod ZCUK Auto switch A guide is provided as standard equipment Non-rotating rod accuracy (no load: when the rod is retracted on the detent plate side): 10, 16 0.8 20, 25, 32 0.5 Reed auto switch: D-A9 (Heavy-duty cord, in-line entry) D-A9V (Heavy-duty cord, perpendicular entry) AMJ AMV Solid state auto switch: D-M9, D-M9W (Heavy-duty cord, in-line entry) D-M9V, D-M9WV (Heavy-duty