Aluminum High Vacuum Angle Valve -30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1
DA DA C0.5 R sphere DA 30 C 30 DA C A H C A H A H T W1 H Symbol: A19 Symbol: A18 Symbol: A17 Symbol: A16 DA AL MM 30 MM 30 MM 30 MM 30 H A H A H A A C H Symbol: A23 Symbol: A22 Symbol: A21 Symbol: A20 DA 30 30 L RD MM MM 30 DA MM 30 DB DB T A H A T C B A H A L K H W H Symbol: A27 Symbol: A26 Symbol: A25 Symbol: A24 DA 30 MM DA 30 MM MM MM AL H LB K A L A H AL H AL L K H Symbol: A30 Symbol
Note 4) ( ) in column W is the dimensions of D-A93. D-X Individual -X Technical data 501 Free Mount Cylinder: Non-rotating Rod Type Double Acting, Single Rod Series CUK 6, 10, 16, 20, 25, 32 How to Order 30 CUK 6 30 D 30 30 M9BW CDUK With auto switch 6 D Made to order Refer to page 503 for the Made to Order specifications.
(Refer to page 8-30-7 for contact protection box.) Most sensitive position ( ): dimensions for D-A93.
15 24 9 62 14 13 5 20 M8 x 1.25 M20 x 1.5 133 142 15.5 10.5 8 1 25 22 9 30 25 10 19 10 13 8 45 8 30 15 30 9 62 14 17 6 26 5.5 M26 x 1.5 137 146 M10 x 1.25 19.5 10.5 33.5 8 1 32 22 9 30 25 10 19 12 13 8 45 10 30 15 9 64 14 17 6 26 5.5 M26 x 1.5 139 148 M10 x 1.25 19.5 10.5 37.5 34.5 4 1 40 24 10 11 11 38 15 30 14 16 50 12 39 88 18 22 8 21 7 M32 x 2 32 M14 x 1.5 177 188 13.5 46.5 42.5 41.2
Made to Order Change of Rod End Shape 1 CH2 Series Mounting type Bore size Rod size series Stroke Cylinder options X A0 Indicate the rod end shape pattern symbol A1 A2 A3 C0.5 30 30 30 30 D D D d d F Width across flats F F H H H A4 A5 A6 30 30 30 D D D d D d 30 30 Width across flats Width across flats F Width across flats F F H H H Note) Female thread effective depth should be no more
OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch Note 3) OUT ( ) Blue Mass (g) Model D-A90 D-A90V D-A93 D-A93V D-A96 D-A93, A93V 6 6 6 6 8 8 (m) Lead wire length 0.5 LED 30 30 30 30 41 41 3 Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 Resistor Dimensions Reed switch (mm) Zener diode D-A90/D-A93/D-A96 OUT () Blue Blue (Black) 2 2.8 4.5 2.7 4 22 (24.5) D-A96,
MI-A0801-10 MI-A0801-20 MI-A1201-10 MI-A1201-20 MI-A1201-30 MI-A2001-10 MI-A2001-20 MI-A2001-30 MI-A2501-30 MI-A2501-50 MI-A3201-30 MI-A3201-50 MI-A0802-10 MI-A0802-20 MI-A1202-10 MI-A1202-20 MI-A1202-30 MI-A2002-10 MI-A2002-20 MI-A2002-30 MI-A2502-30 MI-A2502-50 MI-A3202-30 MI-A3202-50 MI-A0803-10 MI-A0803-20 MI-A1203-10 MI-A1203-20 MI-A1203-30 MI-A2003-10 MI-A2003-20 MI-A2003-30 MI-A2503
Auto Switch Internal Circuits D-A90V Auto Switch Weights OUT (w) Brown Contact protection box CD-P11 CD-P12 Reed switch (g) D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model OUT (w) Blue Lead wire length 0.5m 6 6 6 6 8 8 Lead wire length 3m 30 30 30 30 41 41 D-A93V Auto Switch Dimensions LED Brown OUT (+) Brown D-A90, D-A93, D-A96 Contact protection box CD-P11 CD-P12 Reed switch Resistor Zener
M8 x 1.25 24 M20 x 1.5 1/8 9 62 14 133 142 25 22 19.5 17 9 30 25 10 19 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 62 14 137 146 32 22 19.5 17 9 30 25 10 19 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 30 M10 x 1.25 34.5 M26 x 1.5 1/8 9 64 14 139 148 40 24 21 22 10 38 41.2 15 30 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 39 M14 x 1.5 42.5 M32 x 2 1/4 11 88 18 177 188
30 34 30 31 30 30 30 30 30 37.5 35 42.5 33 37 71.5 81.5 38.5 31.5 38 31.5 73 69 81 69 50 34 34 38 34 35 34 34 34 34 34 41.5 39 46.5 37.5 42 76.5 86.5 42 35.5 42 35.5 78.5 77 86.5 77 63 41 41 44 41 41.5 41 41 41 41 41 50 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 80 49.5 49 52.5 49 50 49 49.5 49 49.5 49 58 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 61 56
156 180 181 205 206 230 231 255 40 Up to 200 63.5 14 49 22 18 10 6.6 40 4.5 (58.4) 56 30 30 71.4 175 200 200 228 225 253 250 278 For dimensions of pivot bracket, refer to page 309.
30 31 30 34 30 30 38 37 71.5 81.5 38.5 38 73 69 81 69 30 30 31.5 31.5 30 30 42.5 33 34 34 38 34 34 42 42 76.5 86.5 42 42 78.5 77 86.5 77 34 34 35.5 35.5 34 34 46.5 37.5 41.5 41 41 41 44 41 41 49 49 83.5 93.5 46.5 47 85.5 91 93.5 91 41 41 43 43 41 41 52 43 50 49.5 49 49 52.5 49 49.5 56 57.5 92 102 53.5 53.5 94 107 102 107 49 49 51 51 49.5 49 58.5 51.5 58.5 56.5 56 56 61 56 56.5 65 68 102.5
Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l CQSB12-5S -10S CQSB16-5S -10S CQSB20-5S -10S CQSB25-5S -10S Example) Bolt M3 x 25l 4 pcs. 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt 6.5 Mounting bolt 8.5 Single Acting, Spring Extend Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l
D-A90(V) Contact protection box OUT () Brown Reed switch CD-P11 (g) Weight OUT () Blue CD-P12 D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model D-A93(V) Lead wire length (m) 0.5 6 6 6 6 8 8 3 30 30 30 30 41 41 LED diode Brown OUT (+) Brown Contact protection box Dimensions Resistor Unit: mm Reed switch Zener diode D-A90/D-A93/D-A96 CD-P11 CD-P12 2 2.8 4.5 OUT () Blue 2.7 Blue 4 22 (24.5) Indicator
D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT () Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+)
D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 C Mounting bolt part no.
(Refer to page 8-30-7 for contact protection box.) Most sensitive position ( ): dimensions for D-A93.