CQ2

(mm) Without auto switch With auto switch Bore (mm) Stroke range (mm) J K L C D M E I H P M5 X 0.8 A B F 5.5 P Q 11.5 B A F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 40 36.5 46.5 38.5 48.5 23 33 29.5 39.5 30.5 40.5 Rc(PT)1/8 M8 X 1.25 4.5 14 33 40 7.5 7 10.5 13 16 34 45 60 32 7.5 10.5 Rc(PT)1/8 8 11 Rc(PT)1/8 M8 X 1.25 5 14 39.5 46.5 8 7 11 13 16 40 52 69 Rc(PT)1/8 40 10.5

4/5 Port Solenoid Valve

58.2 3 64.7 3 3 42.2 19.5 19.5 19.5 19.5 11 11 11 11 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6 (For mounting) 20 20 20 2-2.6 (For mounting) (2.3) (2.3) 20 (2.3) 23 23 23 23 27 Refer to back page 11 for dimentions with connector cable. 28 Series SYJ5000 2 Position Double [ ]: AC G H Grommet (G), (H): SYJ5220-M5 Built-in one-touch fitting: SYJ5220G H C4, N3 C6, N7 G: Approx. 300 H: Approx

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

) 20 20 20 2-2.6 (For mounting) (2.3) (2.3) 20 (2.3) 23 23 23 23 27 Refer to page 563 for dimensions with connector cable. 519 10-SYJ5000 5 port solenoid valve Series 2 position double [ ]: AC G H Grommet (G), (H): 10-SYJ5223-M5 Built-in One-touch fitting 10-SYJ5223G H C4,N3 C6,N7 G: Approx. 300 H: Approx. 600 (Lead wire length) 87.2[91.6] 43 3.5 11 5 B A B A 19 10 10.6 Manual override

Soft Start-up Valve

AV*-OMZ0091-A PRODUCT NAME Soft Start-up Valve MODEL / Series / Product Number AV2000-(F,N)02(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV3000-(F,N)03(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV4000-(F,N)04(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV5000-(F,N)06~10(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AVA2000-(F,N)02(B,G,S)(-R,Z)-A AVA3000-(F,N)03(B,G,S)(-R,Z)-A AVA4000-(F,N)04(B,G,S)(-R,Z

Table of Contents

(mm) Thread Weight g Applicable tubing A B C D E F H Model 3 2 1 M3 x 0.5 M5 x 0.8 M-3AU-2 M-5AU-2 4.5 7 9 10 3 4 5 7.7 0.9 0.7 1.5 4 2 x 1 .2 4 Thread Component Parts E D Material Brass Brass No. 1 2 3 Description Sleeve Barb fitting Gasket Note Electroless nickel plated Electroless nickel plated F K NBR, Stainless steel M B C A H Width across flats H Barb elbow: M-3ALU-2, M-5ALHU-2 D Applicable

KJ

H Model Tubing O.D.

Vacuum Gripper

ModelZPGU-7A-X2 ModelZPGC-7A-X2 (Suction cup formFlat type) (Suction cup formFlat type with ribs) Dimensions Dimensions Model A B D E F Y Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG10C-7A-X2 10 12 1.7 17.5 22 3 17.5 22 13 ZPG13U-7A-X2 13 15 13 ZPG13C-7A-X2 13 15 1.8 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG20U-7A-X2 20 23 ZPG20C-7A-X2 20 23 1.7 19.5 24 4 19.5 24 15 ZPG25U

KQ2

Hexagon Socket Head Male Connector: KQ2S H (width across flats) 2.5 8 18.7 18.2 15.6 14.1 23 19.5 19.1 24 24 28 25.5 27.5 30 Connection thread R M M5 x 0.8 M6 x 1.0 Applicable tubing O.D.

Proposals for Energy Saving

ON YES Hysteresis mode OFF P-1 P-2 Real-time flow rate "P" H H Sensors Measuring Instruments ON Window comparator mode H: Hysteresis NO OFF P-1 P-2 Real-time flow rate OUT1 Output mode ON YES Hysteresis mode OFF n-1 n-2 Real-time flow rate "n" H H ON Window comparator mode H: Hysteresis OFF NO n-2 n-1 Real-time flow rate Accumulated pulse output ( ) Accumulated switch output ( )

V100

9 8 9 14.5 3 14.5 3 14.5 3 14.5 3 20 20 20 20 23 23 23 23 27 Refer page 4-4-61 for dimensions with connector cable. 4-4-22 23 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Base Mounted (With sub-plate) [ ] for AC Grommet (G), (H): SYJ54G H -01 1/8 (A port) 18 8.5 V100 SY 2-4.5 (For mounting) 4 34 SYJ Manual override A VK 24 P R VZ 33.5 G: Approx. 300 H: Approx. 600 (Lead

Shock Absorbers and Rate Controls

(SMAII BORE} UFM10 x t ) UF r/220 uF s/16 18 + UF I-72 [ ' Dtr_ C l' I j rIl l l T F I r H o .L 8 a.22 & _l -! g.3t g 1 R r I -1 .2( 20 F G (otolog llo.

Compact Cylinder with Air Cushion

Standard type (through hole, double end tapped common)/RQB, RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H thread effective depth C E1 E2 Q F 4-5.4 through D M E 1 Flat washer 4 pcs.

CRBU

Refer to p.1.0-23 and 1.0-24 for further information.

RQ

1.0 10 5 28 23 43.5 Refer to page 7-7-14 for details on rod end nut and accessories.

MK

(mm) Operating Piston area (cm2) RHC direction 1.0 0.7 0.5 0.3 200 139 100 60.8 2 R 20 12 MTS 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 CC 490 341 245 149 4.9 H 600 418 300 182 6 R 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R 40 16 1250 870 625 380 12.5 H 1648 1149 825 502 16.5 R 50 20 1961 1365 980 596 19.6 H 2801 1950 1400 851 28 R 63 20 3121 2172 1560 948 31.2 H Note) Theoretical

Vacuum Gripper

ModelZPGU-7A-X2 ModelZPGC-7A-X2 (Suction cup formFlat type) (Suction cup formFlat type with ribs) Dimensions Dimensions Model A B D E F Y Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG10C-7A-X2 10 12 1.7 17.5 22 3 17.5 22 13 ZPG13U-7A-X2 13 15 13 ZPG13C-7A-X2 13 15 1.8 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG20U-7A-X2 20 23 ZPG20C-7A-X2 20 23 1.7 19.5 24 4 19.5 24 15 ZPG25U

Vacuum Gripper

ModelZPGU-7A-X2 ModelZPGC-7A-X2 (Suction cup formFlat type) (Suction cup formFlat type with ribs) Dimensions Dimensions Model A B D E F Y Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG10C-7A-X2 10 12 1.7 17.5 22 3 17.5 22 13 ZPG13U-7A-X2 13 15 13 ZPG13C-7A-X2 13 15 1.8 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG20U-7A-X2 20 23 ZPG20C-7A-X2 20 23 1.7 19.5 24 4 19.5 24 15 ZPG25U

Vacuum Gripper

ModelZPGU-7A-X2 ModelZPGC-7A-X2 (Suction cup formFlat type) (Suction cup formFlat type with ribs) Dimensions Dimensions Model A B D E F Y Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG10C-7A-X2 10 12 1.7 17.5 22 3 17.5 22 13 ZPG13U-7A-X2 13 15 13 ZPG13C-7A-X2 13 15 1.8 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG20U-7A-X2 20 23 ZPG20C-7A-X2 20 23 1.7 19.5 24 4 19.5 24 15 ZPG25U

3 Port Solenoid Valve Series VQ100 1

43.5 43.3 W 44.8 38.9 H 32.2 37.2 VG Latching type 100 VAC or more 16.4 A A VP n-M5 A port Formula: L1 = 10n + 13, L2 = 10n + 7, n: Station (Maximum 20 stations) Dimensions S070 n L L1 L2 2 33 27 3 43 37 4 53 47 5 63 57 6 73 67 7 83 77 8 93 87 9 10 113 107 11 123 117 12 133 127 13 143 137 14 153 147 15 163 157 16 173 167 17 183 177 18 193 187 19 203 197 20 213 207 1 23 17 103 97 VQ VKF Plug

3 Port Solenoid Valve Series VQ100

43.5 43.3 W 44.8 38.9 H 32.2 37.2 VG Latching type 100 VAC or more 16.4 A A VP n-M5 A port Formula: L1 = 10n + 13, L2 = 10n + 7, n: Station (Maximum 20 stations) Dimensions S070 n L L1 L2 2 33 27 3 43 37 4 53 47 5 63 57 6 73 67 7 83 77 8 93 87 9 10 113 107 11 123 117 12 133 127 13 143 137 14 153 147 15 163 157 16 173 167 17 183 177 18 193 187 19 203 197 20 213 207 1 23 17 103 97 VQ VKF Plug