Sensor Range: 0 [Positive Pressure (0~1MPa)], Accuracy: A (±1%F.S.), Port Size: N01 [NPT 1/8 (w/M5 Female Thread)], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 0 [Positive Pressure (0~1MPa)], Accuracy: ±1%F.S., Port Size: N01 [NPT 1/8 (w/M5 Female Thread)], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 0 [Positive pressure (0 to 1 MPa)], Accuracy: ±2% F.S., Port Size: N01 [NPT 1/8 (w/M5 Female Thread)], Output Specification: L (IO-Link/Switch: 1 output), Lead Wire Termination: S (With M12-4 pin connector, 500 mm)

Sensor Range: 3 [For Compound Pressure (-100~100kPa)], Accuracy: ±2% F.S., Port Size: N01 [NPT 1/8 (w/M5 Female Thread)], Output Specification: L (IO-Link/Switch: 1 output), Lead Wire Termination: S (With M12-4 pin connector, 500 mm)

Sensor Range: 1 [For Vacuum (0~-101kPa)], Accuracy: ±2% F.S., Port Size: N01 [NPT 1/8 (w/M5 Female Thread)], Output Specification: L (IO-Link/Switch: 1 output), Lead Wire Termination: S (With M12-4 pin connector, 500 mm)

ISO Cylinder

C75Fl-lS 0.71 1.03 C75Yl-lS 0.71 1.03 201 to 250 mm stroke C75El-lS 1.17 C75Fl-lS 1.13 C75Yl-lS 1.13 Basic weight 1 to 50 mm stroke CD75El-lS 0.35 0.66 CD75Fl-lS 0.32 0.61 CD75Yl-lS 0.32 0.62 51 to 100 mm stroke CD75El-lS 0.56 0.86 CD75Fl-lS 0.54 0.82 CD75Yl-lS 0.54 0.82 101 to 150 mm stroke CD75El-lS 0.65 0.97 CD75Fl-lS 0.63 0.93 CD75Yl-lS 0.63 0.93 With magnet 151 to 200 mm stroke CD75El-lS

Compact Cylinder

Without auto switch With auto switch Without auto switch With auto switch Bore size (mm) Stroke range (mm) Stroke range (mm) Bore size (mm) L L1 L L1 LD LG LH LT A 62.2 72.2 75 85 88 98 B 36 46 43.5 53.5 53 63 LS 10 20 13.5 23.5 19 29 A B LS A 53 63 64.5 74.5 76 86 A 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 63 8 33.5 72.2 46

NCQ2/CQ2

7 17 13.5 23.5 7.5 17.5 A B LS 5 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 32 17 4 30 3.2 38.5 29.7 6.6 57.2 33 17 Special cap bolt LY LH 40 17 4 33 3.2 38.5 33 6.6 23.5 63.7 39.5 50 18 5 39 3.2 43.5 37.5 9 66.7 40.5 17.5 X Y X Y LG 4 x LD LT LZ LX Foot bracket material: Carbon steel LS + Stroke Bore size (mm) X Y LZ LX LY A + Stroke 32 11.2 5.8 71 57 57 Rod end male thread 40 11.2

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Bore size (mm) LT LH L1 LG L LD L L1 B 36 46 43.5 53.5 53 63 LS 10 20 13.5 23.5 19 29 A B LS A 63 8 33.5 63 72.2 46 20 63 3.2 46 5 18 11 43.5 80 10 43.5 80 85 53.5 23.5 74.5 4.5 59 7 20 13 53.5 100 12 100 98 63 29 86 6 71 7 22 13 53.5 Flange bracket material: Carbon steel Foot bracket material: Carbon steel Bore size (mm

Smooth Cylinder/Low Speed Cylinder

A B LS 22 22 24.5 27.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 40.3 40.3 46.2 49.7 10 10 12.5 12.5 45.3 45.3 56.2 59.7 27 27 34.5 37.5 15 15 22.5 22.5 LY LH LT LG X Y Y X LZ LX 4 x LD Bore size (mm) L L1 LD LG LH LT LX LY LZ X Y LS + Stroke A + Stroke 12 16 20 25 24 25.5 28.5 32.5 4.5 4.5 6.6 6.6 13.5 13.5 14.5 15 2.8 2.8 4 4 17 19 24 26 2 2 3.2 3.2 34 38 48 52 29.5 33.5 42 46 44 48

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

7 17 13.5 23.5 7.5 17.5 A B LS 32 17 17 57.2 33 38.5 6.6 4 30 3.2 57 57 Special cap bolt 40 17 23.5 63.7 39.5 38.5 6.6 4 33 3.2 64 64 50 18 17.5 66.7 40.5 43.5 9 5 39 3.2 79 78 Foot bracket material: Carbon steel CUJ Bore size (mm) LS + Stroke LZ X Y A + Stroke CU 32 71 11.2 5.8 Rod end male thread 40 78 11.2 7 CQS 50 95 14.7 8 CQM Rod end nut CQ2 Courtesy of Steven Engineering, Inc.-230

5

Foot: CQ2YL/CDQ2YL Foot (mm) Bore size (mm) Stroke range (mm) Without auto switch With auto switch L L1 LD A B LS A B LS L B + Stroke 32 5 to 50 57.2 33 17 67.2 43 27 17 38.5 6.6 75, 100 67.2 43 27 REA Special cap bolt LH LY 40 5 to 50 63.7 39.5 23.5 73.7 49.5 33.5 17 38.5 6.6 75, 100 73.7 49.5 33.5 REB 50 10 to 50 66.7 40.5 17.5 76.7 50.5 27.5 18 43.5 9 75, 100 76.7 50.5 27.5 Y X Y X LS

CQ2

When auto switch is not required, delete it. 2.3-68 Compact Cylinder/Non-rotating Rod: Double Acting Single Rod Series CDQ2K L B+Stroke Foot/CQ2KL, CDQ2KL Foot (mm) W/o auto switch With auto switch LS L L1 LD LG LH LX LY Bore (mm) Stroke (mm) 5 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 A B LS A B Special cap bolt 53.7 63.7 56.7 66.7 62.2 72.2 13.5 23.5 7.5 17.5 10 20 29.5 39.5 30.5

CRBU

R73CN OOperating time OOperating temperature range -10 to 60C 1.2ms OShock resistance 300m/s2 {30, 6G} (Reed switch), 1000m/s2 {102G} (Solid state switch) 1.2-4 Free Mount Style Rotary Actuator Series CRBU Single vane style specifications Model CRBUW10-lS CRBUW15-lS CRBUW20-lS CRBUW30-lS 90, 180, 270 Rotation angle Air (Non-lube) Fluid Proof pressure (MPa) 1.05 1.5 5 to 60C Ambient and fluid

Table of Contents

146 204 32 M10 x 1.25 M26 x 1.5 Up to 1000 22 19.5 17 32 12 26 13 11 45 6 8 46.5 5.5 22 42.5 1/8 159 217 40 M14 x 1.5 M32 x 2 Up to 1000 24 21 22 41 14 32 16 12.5 50 8 10 56.2 7 26.5 51 1/4 181 247 Axial foot style: RECL G H Width across flats B2 F G K A NA 2-RcP F AL Standard port 2-NN Pluged (M5 x 0.8) H1 H2 Width across flats B1 I D C B 4-LD LH MM 2-4 3.2 N N X X Y S + Stroke Y LX Z LS

Compact Cylinder Series CQS

40.3 40.3 51.2 54.7 A 22 22 29.5 32.5 B 10 10 17.5 17.5 LS 50.3 50.3 62.7 66.2 A 32 32 41 44 B 20 20 29 29 LS SMC LY LH 12 16 20 25 35 to 200 35 to 200 75 to 200 75 to 300 5 to 30 5 to 30 5 to 50 5 to 50 35.3 35.3 41.2 44.7 SMC LT LZ LX 4 x LD LG X Y Y X LS + Stroke Bore size (mm) L L1 LD LG LH LT LX LY LZ X Y A + Stroke 12 16 20 25 13.5 13.5 14.5 15 24 25.5 28.5 32.5 4.5 4.5 6.6 6.6 2.8

Air Cylinder Series CM2

S ZZ LS S ZZ LS S ZZ LS S ZZ LS S ZZ 87 20 20 127 156 152 112 181 177 137 206 21.5 6 87 25 25 127 160 152 112 185 177 137 210 24.5 6 D89 32 32 129 162 154 114 187 179 139 212 204 164 237 27 6 40 40 159 196 184 138 221 209 163 246 234 188 271 113 259 213 296 32.5 8 -X Individual -X Technical data 163 Series CM2 Rod Side Flange Style (F) CM2F Bore size Stroke S T Width across flats B1 H1 H2

NCG/CG1

st 101 to 125 st 126 to 200 st Bore size (mm) 20 25 32 40 ZZ ZZ ZZ ZZ LS 70 70 70 76 LS 95 95 95 101 LS 120 120 120 126 160 185 145 145 151 135 165.5 190.5 215.5 140.5 167.5 192.5 217.5 142.5 185 210 235 160 Other dimensions are the same as basic style.

Air Cylinder

LC Mounting hole Stroke CJ2M 10 16 Z H F GA Mounting nut Piping port 2 x M5 x 0.8 GB F NN Mounting nut Cover surface NN MM Rod end nut D LY LB LT LH LT LX LZ A 4 x LC Mounting hole X Y NB X Y NA S + Stroke LS + Stroke Z + Stroke For details of the mounting nut, refer to page 63.

Air Cylinder Series MB

RZ Foot: (L) Cushion valve Port RY LY 4 x LD CJ1 LH CJP RT X X LT LX Y Y LS + Stroke ZZ + Stroke LZ CJ2 (mm) Foot CM2 Without Air Cushion ZZ Bore size (mm) Bore size (mm) Stroke range LS X Y LD LH LT LX LY LZ RT RY RZ LS ZZ CG1 32 40 50 63 80 100 125 32 40 50 63 80 100 125 50 134 138 156 156 184 188 222 168 176 198 201 240 244 294 22 24 27 27 30 32 45 9 11 11 14 14 16 20 7 9 9 12 12 14 14