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Digital Flow Switch (Remote type monitor unit)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM510--1 10 (5) PFM510--2 10 (5) PFM525--1 25 (12.5) PFM525--2 25 (12.5) PFM550--1 50 (25) PFM550--2 50 (25) PFM511--1 100 (50) PFM511--2 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 -55No.PF-OMJ0018-F Dimensions PFM3 Panel cut-out dimensions Panel thickness: 0.5 to 6.0 mm Individual Two or more in a row (n: The number of products

Digital Pressure Switch

Press the button to return to [n](normal output), then press the button to set. Press the button for 2 second or longer. Return to function selection mode.

Digital Pressure Switch

Press the button to return to [n](normal output), then press the button to set. Press the button for 2 second or longer. Return to function selection mode.

PSxx-OMU0005CN

K T 2 X NPN 2 Y PNP 2 A1 A R NPN 2 + 1 () T PNP 2 + 1 A2 B S NPN 2 + 1 V PNP 2 + 1 1 B D + M SI 3 P psi 2 2: 3kPaMPa 1 ( 2m, ) W M5 M5 01 R1/8 N01 NPT1/8 C4L 4mm C6L 6mm -8No.PS-OMU0005CN-C / A ZS-46-A1 38L (2 ) B ZS-46-A2 38L (2 ) ZS-46-B + ZS-46-D ZS-46-5F 5 2 m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4L 6mm ZS-46-C6L -9No.PS-OMU0005CN-C OUT1 LCD OUT2

Digital Pressure Switch

Remarks Bracket A ZS-46-A1 Self tapping screws: Nominal size 3 x 8L (2 pcs.) Bracket B ZS-46-A2 Self tapping screws: Nominal size 3 x 8L (2 pcs.)

PSxx-OMU0002CN

FUNCAout -57No.PS-OMU0002CN-D [F98] / <> [F98] () () [F]() OUT1 OUT1 [n]( ) OUT1 OFF ON OUT2 -58No.PS-OMU0002CN-D OUT2 OUT2 [n]( ) OFF ON []() 2 [F98] 2 -59No.PS-OMU0002CN-D [F99] <> [F99] [on]() 5 [oFF]() [F99] -60No.PS-OMU0002CN-D ON/OFF 3 //([F 1]OUT1 [F 2]OUT2 )() 1 ()[-] () OUT1OUT2 ( ) ( ) OUT1OUT2 ( ) ( ) ( ) ( ) OUT1 OUT2 () () (OUT1(2))-() ()-(OUT1(

2-Color Display

Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A Formula for Obtaining the Set-Value P-1 P_1 or P_2 H_1 or H_2 H-1 P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 H_1 (H_2) = (A-B)/2 n-1 Min.

ZSE30A(F)/ISE30A

Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A Formula for Obtaining the Set-Value P-1 P_1 or P_2 H_1 or H_2 H-1 P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 H_1 (H_2) = | (A-B)/2| n-1 Min.

PSxx-OMS0006CN

/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16 10.3 C4LC6LN7L C A B C D C4L 15.2 17.5 4 8.2 C6L 15.2 18.3 4 10.4 N7L 20.9 20.6 6 11.1 -64No.PS-OMS0006CN-G A B -65No.PS-OMS0006CN-G 0.5~7 + 0.5~7 -66No.PS-OMS0006CN-G 2 (n ) <> <> (n -1) (n -1) -67No.PS-OMS0006CN-G Revision history A B [2016 9 ] C [2018 6 ] D [2020 2 ] E [2021 2 ] F [2022 1 ] G [2022 10 ] 4-14-1, Sotokanda, Chiyoda-ku

PSxx-OML0002CN

3 ISE30A -0.11 MPa Y ZSE30A 0-101 kPa ZSE30AF -100100 kPa K T 2 01 R1/8(M5) N01 NPT1/8 (M5) A1 A C4H 4mm5/32 inch C6H 6mm A2 B NH7 1/4 inch N7H A3 C C4L 4mm5/32 inch C6L 6mm B N7L 1/4 inch D + N NPN1 P PNP1 A NPN2 B PNP2 C NPN1+ D NPN1+ E PNP1+ F PNP1+ 1 L (2 m) 1 (2 m 1 G 1 M SI2 P (psi)1 1NP3 4 1 2kPaMPa -8No.PS-OML0002CN-G / A ZS-38-A1 (M35 L 2 ) B ZS-38-A2 (M35 L

Digital Pressure Switch

for 1 output, 2 m Lead wire with connector ZS-38-4L 4 cores for 2 outputs, 2 m Lead wire with connector + connector cover ZS-38-3G 3 cores for 1 output, 2 m Lead wire with connector + connector cover ZS-38-4G 4 cores for 2 outputs, 2 m Lead wire with connector for copy function ZS-38-5L 3 cores (for copy function), 1 m Lead wire with connector unit for copy function ZS-38-U for copy function

Table of Contents

OFF n-1 n-2 ISA2 Real-time flow rate Error correction Window comparator mode H: Hysteresis IS Note 1) n H H ON LED display Contents Solution ZSM A current of more than 80 mA is flowing to OUT1 Check the load and wiring for OUT1 NO OFF n-2 n-1 Real-time flow rate PF2 Note 1) Output mode is set to inverted output at the factory before shipment.

PFM3.eng

Measurement mode Mounting screws Bracket Press the button for 2 seconds or longer In measurement mode, press the button for 2 seconds or longer, to display [F 0]. The [F ] indicates the mode for changing each Function Setting. Press the button for 2 seconds or longer in function selection mode to return to measurement mode.

VQ7-6/7-8

U side n Silencer box Air release valve coil rating 5 Without With None 100VAC 50Hz/60Hz 200VAC 50Hz/60Hz 24VDC 12VDC Other Nil SB Nil 1 2 3 4 9 4 3 2 1 R side L side 2.

PFxx-OMJ0005CN

01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I PFM7S-(N)01/(N)02/F01 17 2 -61No.PF-OMJ0005CN-I PFM7S-(N)01L/(N)02L/F01L 2 17 -62No.PF-OMJ0005CN-I PFM7-F02 21 2 -63No.PF-OMJ0005CN-I PFM7-F02L 2 21 -64No.PF-OMJ0005CN-I PFM7S-F02 21 2 -65No.PF-OMJ0005CN-I PFM7S-F02L 2 21 -66No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7 2 -67No.PF-OMJ0005CN-I PFM7-C4L/C6L/C8L/N7L

Digital Flow Switch (Integrated display type)

01/(N)02/F01 -59No.PF-OMJ0006-J PFM7-(N)01L/(N)02L/F01L -60No.PF-OMJ0006-J PFM7S-(N)01/(N)02/F01 -61No.PF-OMJ0006-J PFM7S-(N)01L/(N)02L/F01L -62No.PF-OMJ0006-J PFM7-F02 -63No.PF-OMJ0006-J PFM7-F02L -64No.PF-OMJ0006-J PFM7S-F02 -65No.PF-OMJ0006-J PFM7S-F02L -66No.PF-OMJ0006-J PFM7-C4/C6/C8/N7 -67No.PF-OMJ0006-J PFM7-C4L/C6L/C8L/N7L -68No.PF-OMJ0006-J PFM7S-C4/C6/C8/N7 -69No.PF-OMJ0006-J PFM7S-C4L