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There were no hits with the full part number, but there were 9 hits in the keyword search.

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Digital Flow Switch (Remote type sensor unit)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM510--1 10 (5) PFM510--2 10 (5) PFM525--1 25 (12.5) PFM525--2 25 (12.5) PFM550--1 50 (25) PFM550--2 50 (25) PFM511--1 100 (50) PFM511--2 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 Flow adjustment needle revolution Flow characteristics (reference value) -23No.PF-OMJ0016-J Pressure loss (at 350 [kPa]) -24No.PF-OMJ0016-J Dimensions

1

Stroke Z MB CA2 NDh8 Mounting nut Rod end nut MM GA NDh8 D MM NN GA Piping port 2 x M5 x 0.8 CQ2 CQS NN C D Luberetainer B 0 0.3 JA Z + 2 x Stroke S + Stroke H NA F A NA F H + Stroke A B 0 0.3 MXH MXQ MGP CY CX With air cushion: CJ2WB Bore size Stroke AZ CK1 C(L)K C(L)KU Mounting nut WA WA CKQ Rod end nut CKZ2N 45 GA Piping port 2 x M5 x 0.8 GA C WRF B 0 0.3 NA NA B 0 0.3 Z + 2 x Stroke

5 Port Solenoid Valve Series SY3000/5000/7000/9000

[35.1] SQ 32.5 For manifold gasket positioning 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 20.5 23 VFS VFR L plug connector (L): SY5120-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector (M): SY5120-M(-F ) DIN terminal (D, Y): C4, N3 C6, N7 C8, N9 SY5120-WO(-F ) 1 2 M8 connector (WO): C4, N3 C6, N7 C8, N9 VQ7 1 2 C4, N3 C6, N7 C8, N9 D Y 1 2 SY5120(-F ) 60.9 Applicable cable O.D. 3.5 to

CATALOG

X B 5 _ C D N R O D T H R E A D R O D B O R E S I Z E S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 6 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/8 2 2-1/2 Inches Example: 04 = 4 Stroke E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Consult SMC Customer Service For

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size Applicable series C4 C6 C6 C8 Symbol Port size Applicable series N3 N7 N7 N9 Note) Z: Positive common specifications only.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

C6: 6 (SMC) C8: 8 (SMC) C10: 10 (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) N11: 3/8" (SMC) (11) (47.7) [Communication connector D-sub] (76.8) (External pilot specification) BUS OUT BUS P 1 P 1 P 1 2 B 2 B 2 B 2 B 2 B 2 B 2 B 82.7 76.7 76.7 63.8 (60.3) BUS IN 11.6 13.5 37.6 36.1 4 A 4 A 4 A 4 A E 4 A 4 A A PWR 3/5 E E 3/5 3/5 PWR 12 53.2 (10) (Pitch) P = 20.5 21.2 53.2 (14.7) One-touch fitting [

5 Port Solenoid Valve

2 x C8, C6, N7, (1(P), 3(R) port) C8: 8 one-touch fitting C6: 6 one-touch fitting N7: 1/4" one-touch fitting Dotted line indicates DIN rail mounting bracket (-D).

0.4

C6: 6 (SMC) C8: 8 (SMC) C10: 10 (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) N11: 3/8" (SMC) (11) (47.7) [Communication connector D-sub] (76.8) (External pilot specification) BUS OUT BUS P 1 P 1 P 1 2 B 2 B 2 B 2 B 2 B 2 B 2 B 82.7 76.7 76.7 63.8 (60.3) BUS IN 11.6 13.5 37.6 36.1 4 A 4 A 4 A 4 A E 4 A 4 A A PWR 3/5 E E 3/5 3/5 PWR 12 53.2 (10) (Pitch) P = 20.5 21.2 53.2 (14.7) One-touch fitting [

Fieldbus System

External pilot port] (Fitting for the type with P/E ports on U and/or D sides) (15.3) Applicable tube O.D.: 4, 5/32" (Slide locking manual override) 7.4 BUS OUT C6: 77.3 N7: 81.1 ( ) P 1 P 1 (73.8) 76.7 68.8 63.1 BUS IN 56.6 (73.2) 58.5 5.3 E 3/5 3/5 E B 13.6 2 B 2 B 2 B 2 B 2 PWR PE 4 A 4 A 4 A 4 A 4 A X B A B A 3/5E A 4 A 4 (For DIN rail mounting) 7.5 11.8 1P B 2 2 [Communication connector

7ND9071en

Class I, Division 2, Groups A, B, C, and D; T4/T5/T6 Ex nA IIC T4/T5/T6 Gc or Ex nA ia IIC T4/T5/T6 Gc Ga Class I, Zone 2 AEx nA IIC T4/T5/T6 Gc or Ex nA ia IIC T4/T5/T6 Gc Ga Ui 30 V, Pmax = device limits itself, Ci 22 nF, Li 53 H, external load resistance 0780 I41 P+F; NJ3-18GK-S1N, 2-wire type, DC; > 3 mA; < 1 mA, NAMUR NO. Temperature range: -25 to +85 C / -13 to +185 F.

5-Port Solenoid Valve

D sides) ( ) C6: 3.6 N7: 7.4 M5 x 0.8 [4(A), 2(B) port] One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 2 : 3.2, 1/8" : 4, 5/32" : 6, 1/4" Connector Connecting Base (Station n) (Station 1)--D-sub, Flat Ribbon ( ) C6: 77.3 N7: 81.1 P 1 P 1 (73.8) Terminal Block 3/5 E 3/5 E B 2 B B 2 B 2 B 2 2 Lead Wire A 4 A 4 A 4 A 4 A 4 Circular Connector EX500 * These figures show the SS5Y3

5 Port Solenoid Valve SY Series

13.1 28.5 [35.5] (15) 10 0.8 2 P EA EB 21.5 die-cast hole (For manifold gasket positioning) 19 M5 x 0.8 (P, EA, EB port) L plug connector (L): SY3220-L(-F ) 1 2 1 2 C4, N3 C6, N7 M plug connector (M): SY3220-M(-F ) C4, N3 C6, N7 M8 connector (W0): SY3220-W0(-F ) C4, N3 C6, N7 1 2 (Lead wire length) 108.6 [113] Approx. 300 28.5 [35.5] 13.1 33 15.5 M8 x 1 39.6 [46.6] Approx. 300 (Lead wire

Digital Flow Switch (Remote type monitor unit)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM510--1 10 (5) PFM510--2 10 (5) PFM525--1 25 (12.5) PFM525--2 25 (12.5) PFM550--1 50 (25) PFM550--2 50 (25) PFM511--1 100 (50) PFM511--2 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 -55No.PF-OMJ0018-F Dimensions PFM3 Panel cut-out dimensions Panel thickness: 0.5 to 6.0 mm Individual Two or more in a row (n: The number of products

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C6: 6 (SMC) N7: 1/4" (SMC) [Communication connector D-sub] (76.8) (External pilot specifications) BUS OUT BUS P 1 P 1 P 1 2 B 2 B 2 B 2 B 2 B 2 B 2 B 82.7 76.7 76.7 63.8 (60.3) BUS IN 11.6 13.5 37.6 36.1 4 A 4 A 4 A 4 A E 4 A 4 A A PWR 3/5 E E 3/5 3/5 PWR 12 53.2 (10) (Pitch) P = 20.5 21.2 53.2 (14.7) One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: R (Bracket for w/o Flow Adjustment

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment Valve:

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

D type for 2 to 8 stations; No.10 SY3000-43-1A-10 One-touch fitting for1/4 VVQ1000-50A-N7 One-touch fitting for5/32 VVQ1000-51A-N3 One-touch fitting for1/4 VVQ1000-51A-N7 SY5000 One-touch fitting for5/16 VVQ1000-51A-N9 Note 1)P and R ports cannot be changed. Note 2)Use caution that O-rings must be free from scratches and dust. Otherwise, air leakage may result.