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HRX-OM-X010

HRZ Series 8.1 Specification 8-5 8-5 HRX-OM-X010 Chapter 8 Appendix 8.1.2 Cooling capacity Fluid : Fluorinated Fluid Flow rate : Rated flow Facility water temp. : 25deg.C HRZ***-WS-F 12 HRZ010-WS-F 10 HRZ008-WS-F Cooling capacitykW 8 HRZ004-WS-F 6 4 HRZ002-WS-F 2 0 -20 -10 0 10 20 30 40 50 60 70 80 90 Circulating fluid setting temp.deg.C Figure 8-1 Cooling capacity (HRZ-WS-F) *Common to 50

Refrigerated Thermo-chiller

fluid temperature (C) Heating Capacity HRZ010-WS/010-W1S/010-W2S 7 HRZ010-WS 6 Heating capacity (kW) 5 HRZ010-W1S 4 3 HRZ010-W2S 2 1 0 20 10 0 10 20 30 40 50 60 70 80 90 Circulating fluid temperature (C) Pump Capacity (Thermo-chiller Outlet) HRZ010-WS HRZ010-W1S 1 0.5 [Outlet port: Max.]

HRX-OM-I051

of Model Label . 1-7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures. 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Disposal of refrigerant and compressor oil. 1-15 1.7.2 Circulating fluid disposal. 1-16 1.7.3 System disposal . 1

HRX-OM-M005

) Table 8-1 Specification for fluorinated fluid (wide temperature) double inverter (HRZD020-WS-WS) Model HRZD020-WS-WS Channel 1 2 Cooling method Water cooled refrigerant type Temperature control system PID control PID control Cooling capacity*1 kW 9.5 (Circulating fluid at 20C) 9.5 (Circulating fluid at 20C) Operating temperature range C -30 to 90 -30 to 90 Temperature stability C 0.1*2

Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B d M6 x 1.0 M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 4 8 8 10

5-Port Solenoid Valve

Symbol Stations Note 02 2 stations Double wiring*1 *1 The SY5000 manifold base is used for the bottom-ported SY3000.

Table of Contents

2 1 1 1 1 1 L, H -X 1 X416 20LH, HL 1 1 1 2 1 1 Data L, H, LS, SL, HS, SH L, H X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjusting unit is mounted on one side only.

Table of Contents

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

REA/REB

Nil 1 pc.

Sine Rodless Cylinder Series REA/REB

PW QW W N X WS Q Z L T M Nil TN TF REAR10 19.5 15 39.5 14 20 68 80 8 M3 x 0.5 4.5 3.5 26 M5 x 0.8 4 38 9 REAR15 21 18 54.5 18 25 98 84 7 M4 x 0.7 6 4.3 32 M5 x 0.8 5 53 14 REAR20 20.5 22 64 40 17 NPT 1/8 107 95 7 M4 x 0.7 7 5.6 38 Rc 1/8 5 62 11 REAR25 21.5 28 72 40 20 NPT 1/8 105 7 117 M5 x 0.8 6.5 5.6 43 Rc 1/8 G 1/8 6 70 15 REAR32 24 35 79 26 50 NPT 1/8 116 130 7 M6 x 1 8.5 7 54

REA/REB

72 97 REAS20 Rc 1/8 40 70 90 90 38 73 16.5 25.5 87 115 REAS25 Rc 1/8 40 70 100 90 42 73 16.5 25.5 0.5 1 97 115 REAS32 Rc 1/8 40 75 122 110 50 91 18.5 28.5 0.5 1 119 138 REAS40 Rc 1/4 65 105 145 120 64 99 20.5 35.5 1 1 142 155 PA dimensions are for split from center. 10-2-34 34 Sine Rodless Cylinder Slider Type: Slide Bearing Series REAS Proper Auto Switch Mounting Position (Detection at

REA/REB

72 97 REAS20 Rc 1/8 40 70 90 90 38 73 16.5 25.5 87 115 REAS25 Rc 1/8 40 70 100 90 42 73 16.5 25.5 0.5 1 97 115 REAS32 Rc 1/8 40 75 122 110 50 91 18.5 28.5 0.5 1 119 138 REAS40 Rc 1/4 65 105 145 120 64 99 20.5 35.5 1 1 142 155 PA dimensions are for split from center. 10-2-34 34 Sine Rodless Cylinder Slider Type: Slide Bearing Series REAS Proper Auto Switch Mounting Position (Detection at

/

port 2 port 1 port 2 port 1 port 2 port r r r !

155

2 3/4 1 3/8 1/2 3/4 1 3/8 1/2 3/4 1 4.6 6.5 11.8 18.3 3.5 4.8 7.1 11.0 1.25 2.7 4.5 7.3 0.5 MPa 1.0 MPa 1.6 MPa ( ): Mass including the bracket Add the mass of an auto switch additionally.

NCQ2/CQ2

8 NPT 1/8 M5 x 0.8 140.5 Rc 1/8 115.5 M5 x 0.8 NPT 1/8 54 + Stroke 40 + Stroke 50 + Stroke 139 164 125 150 139 164 40 Rc 1/8 NPT 1/8 Rc 1/8 150 Rc 1/8 125 NPT 1/8 NPT 1/8 56.5 + Stroke 40.5 + Stroke 50.5 + Stroke 50 141.5 141.5 166.5 166.5 125.5 150.5 Rc 1/4 NPT 1/4 Rc 1/4 150.5 Rc 1/4 125.5 NPT 1/4 NPT 1/4 Note)External dimensions with rubber bumper are same as standard type as shown above

Compact 5-Port Solenoid Valve

25 pins) P/PC: Flat ribbon cable (26 pins) Straight Symbol Stations Note 02 2 stations Double wiring*1 Symbol Stations Note 02 2 stations Double wiring*1 12 12 stations 02 2 stations Specified layout*2 (Up to 24 solenoids available) 12 12 stations 02 2 stations Specified layout*2 (Up to 24 solenoids available) 24 24 stations 24 24 stations *1 Indicate the sizes on the manifold specification