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Digital Flow Switch (Remote type monitor unit)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM510--1 10 (5) PFM510--2 10 (5) PFM525--1 25 (12.5) PFM525--2 25 (12.5) PFM550--1 50 (25) PFM550--2 50 (25) PFM511--1 100 (50) PFM511--2 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 -55No.PF-OMJ0018-F Dimensions PFM3 Panel cut-out dimensions Panel thickness: 0.5 to 6.0 mm Individual Two or more in a row (n: The number of products

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: L (Bottom), Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: R (Bracket for w/o Flow Adjustment

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Bottom, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment Valve: ZS

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: L (Bottom), Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Bottom, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve

2

(See Fig. 2.)

VQ7-6/7-8

Blank plate (filter, regulator) 4 Number of manifold blocks required for mounting (stations) 2 2 2 2 2 2 2 1 2 VQ7-6-FHG-D 4 Use of control units 2 VQ7-6-FG-D 1) The supply pressure (Po) passes through the regulator with filter and is adjusted to the prescribed pressure.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

2 x 3.4 28 8 2 x 2.5 depth 5 PFMB7201-F02L 88 48 18 OUT2 OUT1 10.2 DC () DC (+) 17 43 1 (34.2) 3 1 IN 18 2 x 3.4 IN OUT 2 x Port size G1/4 Width across flats 21 68 28 8 2 x 2.5 depth 5 8 Series PFMB7 Dimensions PFMB7201S-C8 96 76 58 48 18 OUT1 OUT2 10.2 DC () DC (+) 43 1 51.5 (Max. 58.5) IN OUT (34.2) 3 13 1 IN 18 2 x 8 One-touch fitting 2 x 3.4 28 20 8 3 x 2.5 depth 5 PFMB7201S-C8L 88 58

Digital Flow Switch (Integrated display type)

to 92.7 4 to 186 8 to 371 Instantaneous CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Setting/Display flow range flow CO2 0.8 to 18.5 1.8 to 46.3 4 to 93 8 to 185 CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Min. setting/display unit 0.1 CFM x 10-2 0.1 CFM x 10-2 1 CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x

Digital Flow Switch

[HYS] Hysteresis mode [2ot] Switch operation of OUT2 2 [2_P] Normal output [F 2] [oU2] page 39 [P_2] Set value of OUT2 2 [100] 100 L/min [H_2] Hysteresis of OUT2 2 [ 10] 10 L/min [F 3] [rES] [rES] Response time [1.00] 1 second page 44 [F10] [FLo] [FLo] Display mode [inS] Display instantaneous flow page 45 [F13] [rEv] [rEv] Reversed display mode [oFF] Not reversed page 46 [F20] [inP]

PFxx-OMJ0005CN

-59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I PFM7S-(N)01/(N)02/F01 17 2 -61No.PF-OMJ0005CN-I PFM7S-(N)01L/(N)02L/F01L 2 17 -62No.PF-OMJ0005CN-I PFM7-F02 21 2 -63No.PF-OMJ0005CN-I PFM7-F02L 2 21 -64No.PF-OMJ0005CN-I PFM7S-F02 21 2 -65No.PF-OMJ0005CN-I PFM7S-F02L 2 21 -66No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7 2 -67No.PF-OMJ0005CN-I PFM7-C4L/C6L/C8L/N7L 2 -68No.PF-OMJ0005CN-I

PFxx-OMO0004CN

(31)[F 2]OUT2(39) 32 (28) -27No.PF-OMO0004CN-E [] 2 [F 0] 2 F0 F1 F99 2 [rEF] [Anr] [F 0][rEF] 29 [Uni] 1 [ L] L/min [oU1] OUT1 [HYS] [1ot] OUT1 [1_P] [F 1][oU1] [P_1] OUT1 [100] 100 L/min 31 [H_1] OUT1 [ 10] 10 L/min [CoL] OUT1 [SoG] ONOFF 2 [HYS] [oU2] OUT2 2 [2_P] [2ot] OUT2 [F 2][oU2] 39 2 [100] 100 L/min [P_2] OUT2 2 [ 10] 10 L/min [H_2] OUT2 [F 3][rES] [rES] [1. 00] 1

PFM3.eng

Measurement mode Mounting screws Bracket Press the button for 2 seconds or longer In measurement mode, press the button for 2 seconds or longer, to display [F 0]. The [F ] indicates the mode for changing each Function Setting. Press the button for 2 seconds or longer in function selection mode to return to measurement mode.

Table of Contents

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VQ7-6/7-8

AXT502-9A Blanking plate (Filter, Regulator) Blanking plate (Pressure switch) 4 Number of manifold blocks required for mounting (stations) 2 stations 2 stations 2 stations 2 stations 2 stations 2 stations 2 stations 1 station 2 VQ7-6-FHG-D 4 2 Use of Control Unit VQ7-6-FG-D 4 2 1.

VQ7-6/7-8

AXT502-9A Blanking plate (Filter, Regulator) Blanking plate (Pressure switch) 4 Number of manifold blocks required for mounting (stations) 2 stations 2 stations 2 stations 2 stations 2 stations 2 stations 2 stations 1 station 2 VQ7-6-FHG-D 4 2 Use of Control Unit VQ7-6-FG-D 4 2 1.