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) Table 8-1 Specification for fluorinated fluid (wide temperature) double inverter (HRZD020-WS-WS) Model HRZD020-WS-WS Channel 1 2 Cooling method Water cooled refrigerant type Temperature control system PID control PID control Cooling capacity*1 kW 9.5 (Circulating fluid at 20C) 9.5 (Circulating fluid at 20C) Operating temperature range C -30 to 90 -30 to 90 Temperature stability C 0.1*2

HRZ Series 8.1 Specification 8-5 8-5 HRX-OM-X010 Chapter 8 Appendix 8.1.2 Cooling capacity Fluid : Fluorinated Fluid Flow rate : Rated flow Facility water temp. : 25deg.C HRZ***-WS-F 12 HRZ010-WS-F 10 HRZ008-WS-F Cooling capacitykW 8 HRZ004-WS-F 6 4 HRZ002-WS-F 2 0 -20 -10 0 10 20 30 40 50 60 70 80 90 Circulating fluid setting temp.deg.C Figure 8-1 Cooling capacity (HRZ-WS-F) *Common to 50

HB HT HC N X A W K 2 x plug H 2 x P (Piping port) HA CB T 4 x counter bore dia.

Brake lever Caster w/ brake (2 pcs. on the front) M12 anchor bolt M8 nut (2 pcs.)

n = 4 to 24 n = 1 to 3 n = 4 to 24 n = 1 to 3 42.3 62.5 n: Number of stations 3 5 4 3 2 1 1 3 1 2 3 4 5 n: Number of stations Pitch 10.5 Pitch P = 16 (SY5000) P = 19 (SY7000) Make sure to mount in the right direction. Make sure to mount in the right direction. (20) SY5000: SY50M-86(N) SY7000: SY70M-86(N) Name plate is the number of stations (1 to 24).

Same side Same side Different sides Different sides D-C7/C80 50 50 + 45 (n 2) 10 15 15 + 45 ( n 2) (n = 2, 4, 6) 2 D-H7/H7W D-H7NF 60 + 45 (n 2) 60 15 10 15 + 50 ( n 2) (n = 2, 4, 6) Mounting D-C73C/C80C D-H7C D-B5 D-B64 D-G5NTL 2 65 + 50 (n 2) 65 15 10 Warning 15 + 50 ( n 2) (n = 2, 4, 6) 15 75 2 10 1. Do not rotate the cover.

Power consumption: Facility water: Max.82% reduction (SMC comparison) Max.90% reduction (SMC comparison) 20 l/min Conventional model HRZ010-WS Conventional model HRZ010-WS 6.2 kWh/h 2 l/min 1.1 kWh/h Operating conditions: 10C, 0 kW with 50% load, 2 kW with 50% load Operating conditions: 10C, 0 kW with 50% load, 2 kW with 50% load High Performance + Temperature stability: 0.1C (when a load

CE2 L1 ML2B 2. Static moment M2 = WL1 = 10 x 0.2 = 2 [Nm] 2 = M2/M2max = 2/16 = 0.125 W = 1 [kg] = 10 [N] W C J G5-S Examine M2. Since M1 & M3 are not generated, investigation is unnecessary. M CV MVGQ L1 CC We = 5 x 103 WgU = 5 x 103 x 1 x 9.8 x 300 = 15 [N] Me3 = 1/3We (L2A) = 1/3 x 15 x 0.182 = 0.91 [Nm] 3 = Me3/Me3max = 0.91/10 = 0.091 3.

CE2 L1 ML2B 2. Static moment M2 = WL1 = 10 x 0.2 = 2 [Nm] 2 = M2/M2max = 2/16 = 0.125 W = 1 [kg] = 10 [N] W C J G5-S Examine M2. Since M1 & M3 are not generated, investigation is unnecessary. M CV MVGQ L1 CC We = 5 x 103 WgU = 5 x 103 x 1 x 9.8 x 300 = 15 [N] Me3 = 1/3We (L2A) = 1/3 x 15 x 0.182 = 0.91 [Nm] 3 = Me3/Me3max = 0.91/10 = 0.091 3.

(For Wmax, find the value in 2> when U = 500mm/s.) L2 L1 2. Static moment M2 = WL1 = 100.2 = 2 [Nm] 2 = M2/M2 max = 2/16 = 0.125 W = 1 [kg] = 10 [N] W Review M2. Since M1 & M3 are not generated, review is unnecessary. M L1 3. Dynamic moment We = 5 x 10-3WgU = 5 x 10-31.9.8500 = 25 [N ] Me3 = 1/3We(L2-A) = 1/3250.182 = 1.52 [Nm] 3 = Me3/Me3max = 1.52/6 = 0.25 Me3 Review Me3.

L2 L1 2. Static moment M2 = WL1 = 10 0.2 = 2 [Nm] 2 = M2/M2max = 2/16 = 0.125 W = 1 [kg] = 10 [N] W REA Examine M2. Since M1 & M3 are not generated, investigation is unnecessary. REB M REC L1 CY 3. Dynamic moment We = 5 x 103 WgU = 5 x 103 1 9.8 500 = 25 [N] Me3 = 1/3We (L2 A) = 1/3 25 0.182 = 1.52 [Nm] 3 = Me3/Me3max = 1.52/6 = 0.25 CX Me3 Examine Me3.

External pilot solenoid 1 Y A G 1 T Z B1 10 1 70 2 SGH SGHA Air operated 1 A G B1 10 1 2 70 q w e r t y u i o !0 !1 !2 q Series w Valve type e Seal material 70 r Pressure range t Thread type y Port size 1 2 3 4 1 2 A B 10 15 20 25 Nil G N T SGH100 SGH200 SGH300 SGH400 SGH100 SGH200 SGH300 SGH400 N.C. N.O.

Air passage Brake plate Brake shoe 2 Air tube (Brake released state) (Brake operating state) Brake Capacity Allowable Kinetic Energy Holding Force (Maximum static load) 25 32 40 25 32 40 Bore size (mm) Bore size (mm) Allowable kinetic energy (J) 1.21 500 N 800 N Holding force 320 N 0.43 0.68 1.