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Digital Flow Switch (Remote type monitor unit)

CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 flow Min. setting/display unit 0.1 ft3 x 10-1 0.1 ft3 x 10-1 1 ft3 x 10-1 1 ft3 x 10-1 Conversion of accumulated pulse 0.1 1 1 1 ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse : Flow rate in the specification is the value at standard

PFM3.eng

[r EF] Reference condition [Anr.]

Digital Pressure Switch

Piping specification: -C4H, -C6H, -N7H, -C4L, -C6L, -N7L First, tighten by hand, then use a wrench appropriate for the hexagon flats of the body to tighten an additional 1/6 to 1/4 turn.

Digital Pressure Switch

Piping specification: -C4L, -C6L First, tighten by hand, then use a wrench appropriate for the hexagon flats of the body to tighten an additional 1/6 to 1/4 turn.

PSxx-OMU0002CN

-100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L 6mm N7L 1/4 inch -8No.PS-OMU0002CN-D / A ZS-46-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch

PSxx-OMU0005CN

-15No.PS-OMU0005CN-C (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -16No.PS-OMU0005CN-C (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4L-C6L 1/61/4 1~1.5Nm -17No.PS-OMU0005CN-C -18No.PS-OMU0005CN-C () TU0425( 42.5) -19No.PS-OMU0005CN-C FG -20No.PS-OMU0005CN-C Z/ISE20B(F)-S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -X () -S/-

2-Color Display

R Resolution-switch function 0.0 to 101.0 kPa 0.100 to 1.000 MPa 100.0 to 100.0 kPa It reduces the monitor to flicker. 1 MPa 100 kPa Rated pressure range 0 0 0 (Accuracy is not changed, only the displayed values.) 1/1000 1/100 0.1 MPa (100 kPa) 100 kPa 101 kPa R MPa/kPa switch function Set pressure range 0.105 to 1.050 MPa 105.0 to 105.0 kPa 10.0 to 105.0 kPa Vacuum, compound and/or positive

Table of Contents

R 1/8 23 Precautions Be sure to read before handling.

VQ7-6/7-8

Wiring specification L side R side L R O-ring NBR 4 AXT502-19 Side Bottom A B O-ring NBR 2 AXT502-20 Cylinder port size Plate SPCC 1 AXT502-22-2 Rc1/4 Rc3/8 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting 02 03 C6 Note 1) Gasket NBR 1 AXT502-31 Oval countersunk head screw SWRH3 2 M4 X 8 C8 Note 1) C10 Note 1) Note 1) Side ported only 31 Series VQ7-8 Manifold Exploded View D side

Digital Pressure Switch

Piping specification: -C4H, -C6H, -N7H, -C4L, -C6L, -N7L First, tighten by hand, then use a wrench appropriate for the hexagon flats of the body to tighten an additional 1/6 to 1/4 turn.

Digital Flow Switch (Integrated display type)

CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 flow Min. setting/display unit 0.1 ft3 x 10-1 0.1 ft3 x 10-1 1 ft3 x 10-1 1 ft3 x 10-1 Conversion of accumulated pulse 0.1 1 1 1 ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse : Flow rate in the specification is the value at standard

PFxx-OMJ0005CN

1 310 -1 310 -1 310 -1 ft ft ft ft 310 -1 0.1 ft 310 -1 1 ft 310 -1 1 ft 310 -1 / 0.1 ft 0.1 1 1 1 310 -1/pulse 310 -1/pulse 310 -1/pulse 310 -1/pulse ft ft ft ft 0.927= -23No.PF-OMJ0005CN-I [F 1] OUT1 OUT1 <> [F 1] [oU1] [1ot] () -24No.PF-OMJ0005CN-I 21 [P_1] [P1L][P1H] [P1.1][P1.2]([P1.1]3[P1.2]3) Pn [H_1] [CoL] ON OFF ON OFF [F 1] OUT1 -25No.PF-OMJ0005CN-I H_1(H_2) H1(H2) H1(H2

ZSE30/ISE30

Piping Specifications Part N7L C6L C4L N7H C6H C4H T1 01 NPT 1/8 M5 x 0.8 R 1/8 M5 x 0.8 Port size One-touch fitting Straight type 4 mm 5/32 inch 1/4 inch 6 mm One-touch fitting Elbow type 4 mm 5/32 inch 1/4 inch 6 mm Sensor pressure receiving area: Silicon, Piping port: C3602 (Electroless nickel plated), O-ring: HNBR Wetted part material O-ring: NBR, fitting: PBT O-ring: NBR With lead

Digital Pressure Switch

Linearity 1%F.S. Analogue output Output impedance approx. 1 k Output current (rated pressure range) 4 to 20 mA 2.5%F.S. 2.4 to 20 mA Current output 3 2.5%F.S. Linearity 1%F.S.

Table of Contents

VZ Applicable exhaust cleaners AMC610-10 (Connecting port size R 1), AMC810-14 (Connecting port size R 1 1/2) (2) Note 1) With multi-connector, or with D-sub connector: 8 stations max.

VQ7-6/7-8

1 25 25 25 25 X(PE) port 1/8 R1, R2 port 2-3/8 1/8 P Port 1/4, 3/8 R1, R2 port 2-3/8 P port 1/4, 3/8 X(PE) port 3-10-9 Series VQ7-6 Construction DIN Terminal Type Metal seal type Rubber seal type VQ7-6-FG-SVQ7-6-FG-S-R o o t r u t r u w y e q w y e q VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do