Rated Flow Range: 10 to 1000 l/min, Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: -, Unit Specification: -, Calibration Certificate: -, Flow Direction: -

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: Units Selection Function, Calibration Certificate: A (Yes)

Rated Flow Range: 10 to 1000 l/min, Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: Units Selection Function, Calibration Certificate: Yes, Flow Direction: -

Rated flow ranges: PF3A801H: 10 to 1000 lpm; PF3A802H: 20 to 2000 lpm; Large 4 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time as well as pressure and temperature; Can be converted to threaded model using modular connectors and piping adapters; Accuracy: +/- 3.0% F.S. flow/pressure, +/- 2.5°C temperature

Rated flow ranges: PF3A801H: 10 to 1000 lpm; PF3A802H: 20 to 2000 lpm; Large 4 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time as well as pressure and temperature; Can be converted to threaded model using modular connectors and piping adapters; Accuracy: +/- 3.0% F.S. flow/pressure, +/- 2.5°C temperature

Rated flow ranges: PF3A801H: 10 to 1000 lpm; PF3A802H: 20 to 2000 lpm; Large 4 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time as well as pressure and temperature; Can be converted to threaded model using modular connectors and piping adapters; Accuracy: +/- 3.0% F.S. flow/pressure, +/- 2.5°C temperature

One-touch Fittings

L2 A M Applicable tubing O.D.

1

1.5 m 3 m (L2) The SY5000 manifold base is used for the bottom ported of the SY3000.

2

M Model H (Width across flats) Note) D L1 L2 A M Effective area (mm2) Min. port size Applicable tubing O.D.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

3 m 5 m Assembly part no.

Table of Contents

K Reducer Elbow: KQ2L M Applicable fitting size d (inch) Model L2 A M Min. port size Applicable tubing O.D.

V100

plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

5-Port Solenoid Valve

serial transmission L1 = 12.5 x n1 + 16 x n2 + a + b x n3 L2 = 12.5 x n1 + 16 x n2 x 48 M = L1/12.5 + 1 Decimal fractions are truncated.

KJ

(width across flats) Applicable tubing (mm) Effective area (mm2) Connection Weight (g) L4 d L2 L3 M A L1 Model thread R I.D.

Electric Actuators

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for

Table of Contents

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for

Fluoropolymer Piping Equipment

Connection threads R/NPT A E E H L1 L1 L2 M N Min. port size L1, L1 LVA N LQ3L11-M 4 1/8" 12.5 10 9 11 26 25 16.5 14 4 2.5 LQ3L12-M 3 2 LQ3L21-M 6 1/8" 18.5 17 16 16 33.5 32.5 22.5 20 4 4 LQ3L22-M 1/4" 16.5 6 LQ3L31-M 10 1/8" 24 LVH L2 M (A) LVD LVQ 4.4 4.4 LQ3L32-M 8 LQ3L33-M 10 1/4" 22 6.4 6.4 LQ3L34-M 8 LQ3L35-M 10 3/8" 21.5 10 7.5 LQ3L36-M 8 6.4 LQ3L38-M 1/2" 24.5 47.5 44.5 32.5 9.5 LQ3L41

4/5 Port Solenoid Valve

Load factor: ( (Load weight x 9.8) /Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 8 x 1 m AS3301F-08 AN110-01 Series MB/CA2 Series CJ2 Series CM2 4 x 1 m Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AS2301F-04 6 x 1 m 4 x 1 m AS1301F-04 AN120-M5 SYJ5120-M5 SYJ5140-01 AN101

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Scale: 30% Dimension L: Formulas for dimensions L1 to L4 L3 = 12.5 x n1 + 16 x n2 + 52 L3 12.5 M = ( + 1) omit decimals L1 = 12.5 x M + 23 L2 = L1 10.5 L4 = (L1 L3)/2 n1: Number of SY3000 stations n2: Number of SY5000 stations Note) Dimensions L1 to L4 of SS5Y5-M45Stations D are the same as SS5Y5-M45Stations U.

Table of Contents

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.