Digital Flow Monitor Normal output Reversed output Hysteresis mode Window comparator mode Accumulated output mode (Increment) Accumulated output mode (Decrement) Accumulated pulse output mode Error output mode OFF mode : Applicable errors are Er0, 1, 2, 4, 6 to 8, 14, and 40.
[F 5] [ FnC] Select FUNC (switching Analogue output 2/ External input) [ oUt] Analogue output PF3A706H Equivalent to M5 3 Nm10% 8 PF3A712H 9 Equivalent to M6 5.2 Nm10% : Arbitrary display mode can be added to the sub display by setting the [F10] sub display.
(For accumulated increment) [H_1 ] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.
6 to 12 LVA 27.5 F Q S F (Q) 34 LVH LVD LVQ 25 U LQ R C R C LVN (44) G1/2 TI/ TIL E B A H D E (S) G1/2 2-P Port size PA B A H D 2-M Thread depth N 2-P Port size PAX 2-M Thread depth N L PB L K K N.C.
M L H A M W E LQ1H11-M LQ1H12-M LQ1H21-M LQ1H22-M LQ1H23-M LQ1H24-M LQ1H31-M LQ1H32-M LQ1H33-M LQ1H34-M LQ1H35-M LQ1H36-M LQ1H41-M LQ1H42-M LQ1H43-M LQ1H44-M LQ1H51-M LQ1H52-M LQ1H53-M LQ1H54-M LQ1H61-M LQ1H62-M LQ1H63-M LQ1H64-M 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 1/8 21 1/8" 25 10 11.5 10 Class 1 31.5 1/8" 15 35 16.5 14 14 H (A) L 29 1/4" W M 36.5 1/4" 20 42.5
L H A M W E LQ1H1A-M LQ1H2A-M LQ1H2B-M LQ1H2C-M LQ1H2D-M LQ1H2E-M LQ1H2F-M LQ1H3A-M LQ1H3B-M LQ1H3C-M LQ1H3D-M LQ1H4A-M LQ1H4B-M LQ1H4C-M LQ1H4D-M LQ1H5A-M LQ1H5B-M LQ1H5C-M LQ1H5D-M LQ1H6A-M LQ1H6B-M LQ1H6C-M LQ1H6D-M 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 21 1/8" 25 11.5 10 10 31.5 1/8" 35 16.5 14 15 14 29 1/4" 36.5
(mm) (Note) A Mass (g) D2 L1 L2 M D1 Model LQ Nylon Urethane 6 1 8 KQ2K04-U01 18.5 30 14 10 4 10 10.4 3.4 3.4 MQR 16 17 1 4 KQ2K04-U02 20.5 30.5 13 7 1 8 KQ2K06-U01 3 8 KQ2K06-U03 21.5 20.5 18.5 10 31 T 6 1 4 KQ2K06-U02 17 10 14 12.8 8.7 8.7 13 18 32 23 17 12 1 8 1 4 KQ2K08-U01 KQ2K08-U02 20 22 11 15 35 14 15.2 12 8 Applicable tubing 20.5 18.5 19.7 13.6 3 8 KQ2K08-U03 17 23 36 24 1 8 KQ2K10
Connection threads R/NPT W M L E W H A Model E L A M LQ3H11-M LQ3H12-M LQ3H21-M LQ3H22-M LQ3H31-M LQ3H32-M LQ3H33-M LQ3H34-M LQ3H35-M LQ3H36-M LQ3H38-M LQ3H41-M LQ3H42-M LQ3H43-M LQ3H44-M LQ3H51-M LQ3H52-M LQ3H53-M LQ3H61-M LQ3H62-M LQ3H63-M 4 3 10 11 33.5 10 29.5 14 28.5 9 32.5 1/8" 39.5 37.5 38.5 36.5 1/8" 1/4" (E,E) Port size R (NPT) 6 17 16 43.5 14 20 16 42.5 10 8 10 8 10 51 48 1/8" 55
3/4" 3/4" 30 39 16 15 LQ1B44-M 10 7.4 LQ1B45-M 8 21.5 20 17 34 29.5 23 8 5.5 7 29 14 28 26 54 39 LQ1B5D-M 1/2" 9 LQ1B5G-M 3/4" 1/4" 27.5 33.5 6 6 LQ1B49-M 12 1/4" 27.5 7 29 14 28 26 54 33.5 39 6 6 LQ1B5H-M 3/4" 3/8" 29 35 10 10 LQ1B51-M 19 1/2" 30.5 10 10 38 LQ1B6A-M 1" 3/4" 36 LQ1B52-M 12 9.4 16 16 LQ1B6B-M 3/4" 15 LQ1B53-M 19 3/4" 30 39 16 15 7 29 14 28 26 54 39 LQ1B6C-M 1" 1" 35 22.5
H1 Width across flats L2 When connected Effective area mm2 L1 Min. bore size Body size Mass g M Model Applicable hose KKH3S-50N 14 14 5/8 32.3 42.6 45.1 13.7 12.2 4.5 H1 H2 20.2 -60N 6/9 48.9 18.3 5.4 1/8 44.4 46.9 16.5 17 17 -65N 6.5/10 46.6 19.2 5.9 D KKH4S-50N 14 5/8 54.1 57.8 13.7 57.0 12.2 4.5 M L1 -60N 6/9 70.5 5.4 20.4 17 56.8 60.5 16.5 -65N 6.5/10 1/4 19 28.0 5.9 24.1 68.0 L2 -80N
H1 H2 12 8 12 32.6 29 5 11 16 KQB2 14 17 10 14 14 17 36.6 40.4 32.2 35.8 5.8 6.6 13 15 25 43 69 68 71 68 122 d KS KX 21 17 21 44.8 39.4 7.6 18 M M L2 KM 21 17 21 48.1 41.7 8.5 19 L1 27 22 27 52.3 45.9 9.3 25 KF M Union Elbow: KFG2L H/DL L/LL Applicable tubing size (mm) O.D.
Dry Suction lift 4 m Wet VX3 0 to 100C (Not be frozen.
Applicable thread Gasket M-3G2 M3 M-5G2 M5 M-6G M6 Brass Description Part no.
Dimensions Normally Closed: VXP2270/2380/2390 Normally Open: VXP2272/2382/2392 Grommet: G VC VDW VQ VX2 Port size VX VX3 Conduit: C DIN terminal: D VXA VN LVC LVA LVH Cable 6 to 12 LVD LVQ LQ LVN TI/ TIL Conduit terminal: T PA PAX PB Model Grommet Electrical entry Conduit Conduit terminal DIN terminal Q N M N M N M M N Q L K J H F E D C B A P Applicable thread Pc Normally open Normally closed
OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.
Series VXR21/22/23 Dimensions Normally Closed: VXR210/220/230 Normally Open: VXR212/222/232 Grommet: G Port size Conduit: C DIN terminal: D Cable 6 to 12 Conduit terminal: T Model Grommet Electrical entry Conduit Conduit terminal DIN terminal Q N 59 60 60 Port size P Rc N Q L K J H F E A B C D M 74 (81) 88 (98) 90 (100) N M 67 (74) 80 (90) 82 (92) M 67 (74) 80 (90) 82 (92) N M 67 (74) 80
Description Bracket assembly LQ-GBL J type K type L type M type (for short piping) 34 Series LV High Purity Chemical Valve Special Tools Dimensions LQ-GJ LQ-GK VC VDW LQ-GJ 36 30 VQ 45 (adjustable) VX2 117 76 24 LQ-GK 36 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
LQ-GK 1, 2 LVN Inch size J type K type LQ-GL LQ-GM 1, 2, 3, 4, 5, 6 L type M type High Purity Fluoropolymer Tubing P. 17-5-136 Series Tubing O.D. 4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" Material: Super PFA Metric size TL Inch size TIL 17-5-96
LQ GPM Insert pin set (with the parts case) Insert pin Nil Metric size N Inch size Body class Metric size Inch size 1, 2 03 (3) 03 (1/8") 5, 6 19 (19) 19 (3/4") 6 25 (25) 25 (1") LQ GP M 2 07 Insert pin (single) Body class (Refer to Table 1) Tubing size symbol (Refer to Table 1) How to Order/Type J, K Handy type LQ G J Insert pin material Insert pin/Holder type Nil Resin Nil Metric size N
Series VQ20 L dimension 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No. L 6 8 11 13 15 17 20 22 24 27 29 31 34 36 38 40 43 45 47 50 85.5 110.5 148 173 198 223 260.5 285.5 310.5 348 373 398 435.5 460.5 485.5 510.5 548 573 598 635.5 Series VQ30 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No.