Rated Flow Range: 20 to 2000 l/min, Output Specifications: Out: PNP; Func: Analog Voltage Ouput <-> External Input, Lead Wire: -, Unit Specification: -, Calibration Certificate: -, Flow Direction: -

Table of Contents

(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

Basic type / Direct mount type Series CY3B/CY3R

Centralized piping on right L R R L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

2 @7 t y o u @8 r #2 @1 @2 @5 @4 @3 CY1HT32 @6 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 No. !8 !

Magnetically Coupled Rodless Cylinder

Centralized piping on right R R L L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

CY1

7 e #3 #4 @1 @2 r t #1 @9 !2 o !1 #0 !4 #2 !3 !

Industrial Filters

ORIENTATION 2 x R DRAIN A B C FQ1 OUT IN OUT R3/4 FN Rp1/4 203 203 R3/4 EB ES DRAIN R3/4 90 90 260 DRAIN FGES type (V-band type) (mm) FGEL type (V-band type) (mm) FGET type (Bolt tightening type) (mm) A A A B C B C B C Model FGESA FGESB FGESC Port size R Model FGELA FGELB FGELC Port size R Model FGETA FGETB FGETC Port size R 671 850 671 850 366 612 910 1, 2 1, 2 1, 2 554 554 931 1350 931

CC-Link-E

S. ) Bi t dat a area O u tp u t b i t d ata Bi t dat a area In p u t b i t d ata R Y00 to R Y0B Set val ue of hol di ng pressure f or error N ot e R X00 to R X0F U nused R X10 to R X19 I nval i d ( area of syst em ) RY0C, RY0D U nused RX1A Fl ag f or error RY0E Banned f or use RX1B Rem ot e READ Y R X1C to R X1F I nval i d ( area of syst em ) RY0F 0: RY00 t o RY0B i nval i d dat a 1: RY00

DeviceNet-E

t w o byt es respect i vel y.

Mechanically Jointed Rodless Cylinders

3 @4 r o !1 !

Bag Filter

FGF FGF FGH FQ1 Bag-stated element FN Latch mechanism EB ES With a bag configuration, the aperture is wide and foreign matter is captured inside the element for easy removal. Furthermore, foreign matter captured inside the element will not spill over into the c a s e i n t e r i o r o r t h e surrounding area. Select from a wide range of filtration accuracy.

Profi-E

O PERATI O N M AN U AL E/P REG U LATO R M O D EL N AM E I TV1000, I TV2000, I TV3000 seri es Seri es For PRO FI BU S CO N TEN TS Cont ent s P1 Saf et y I nst ruct i ons P2 Precaut i ons f or H andl i ng P34 W i ri ng and LED di spl ay P56 M ount i ng and I nst al l at i on P6 Sw i t ch set t i ng P7 Pressure set t i ng P8 Syst em conf i gurat i on / Appl i cat i ons / Speci f i cat i ons

Cylinder with Lock

L1 l1 (Min.) l2 R SR (Max.)

Rated Flow Range: 02 (20 to 2000 l/min), Output Specifications: ES (Out: PNP; Func: Analog Voltage Ouput <-> External Input), Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: M (SI Unit Only)

Rated Flow Range: 20 to 2000 l/min, Output Specifications: Out: PNP; Func: Analog Voltage Ouput <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: SI Unit Only, Calibration Certificate: -, Flow Direction: -

ITV_D-E

O R LESS H YSTERESI S 0. 5% F. S. O R LESS PREPEATABI LI TY 0. 5% F. S. O R LESS SEN SI TI VI TY 0. 2% F. S.

Slider Type/Ball Bushing Bearing

Determination of kinetic energy of load (E) E > Es E Es Bore size determination Tentative determination of L type W V 2 E = () 2 1000 Note 2) E > Es Determination of pressure (P) when making intermediate stop P > Ps P Ps Consider made-to-order products, depending on an operating condition. Tentative determination of L type (For intermediate stops, refer to page 1515.)

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

MX MTS MY Centralized piping on right CY MG CX R R L DL -X R L Slide table actuation direction 20Centralized piping on left Data R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

MX MTS MY Centralized piping on right CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX L R R DL -X R L Slide table actuation direction 20Centralized piping on left Data R L L R R L Slide table actuation direction 4.

Low Profile Guide Type

Centralized piping on right R R L L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 2. The plug position of the piping port can be changed to suit the operating conditions. When screwing in the plug for the second time, wrap a sealant tape around the plug to prevent leakage. (1) M5 First tighten lightly until the rotation stops.