Rated Flow Range: 20 to 2000 l/min, Output Specifications: Out: NPN; Func: Analog Voltage Output <-> External Input, Lead Wire: -, Unit Specification: -, Calibration Certificate: -, Flow Direction: -

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

E d R f j Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts J 2 x M depth 5 A G H B1 B b 2 x P Port size i DS: DIN terminal DZ: DIN terminal with light 70 CS: Conduit 58.3 51.9 500 R R DN: DIN terminal without connector WN: WN: M12 connector without cable 44.1 34.3 R R [mm] Size Port size P A B B1 C E G H J M 30 1/4, 3/8 21 <22> 57 28.5 89.8 10.5

Air Slide Table Series MXQ

M 15 25.5 MXQ-CS 6 (L)-X11 5 18 MXQ-CS 8 (L) B MXU 8 7 22 3 9 7.5 16.6 14.6 8 9.8 MXQ 8 (L) M6 x 1 15 M3 x 8 M3 x 10 28 MXQ-CS 8 (L)-X11 F 25 38 MXQ-CS 8 (L)-X12 MXS 5 22 MXQ-CS12 (L) G E MXQ12 (L) M8 x 1 M4 x 12 M4 x 12 12 9.5 29 4 14 11 20.5 18.5 11 13 15 32 MXQ-CS12 (L)-X11 C MXQ 25 MXQ-CS12 (L)-X12 42 5 23 MXQ-CS16 (L) Table mounting section MXF M10 x 1 MXQ16 (L) 14 11 36 5 17 M5 x 16

MXQ

6 r u y w !

EXxx-OMK0006

(R) EEPROM = Memorize data although power is off. (R/W) RAM = Actual memory the SI unit is working with. (R/W). 1. Reset node, Reset com or Power cycle: EEPROM is copied into RAM 2. STORE: Copy RAM (with modified/non modified values) into EEPROM 3.

Low-Speed Rotary Actuator

Find the moment of inertia I for the rotation of shaft (B). r B 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teeth = b 5. Solid sphere Position of rotational axis: Through the center of diameter r 2 2 r I = m5 -27- Kinetic energy Table shows the allowable kinetic energy of the rotary actuator.

Cylinder with Lock

L1 l1 (Min.) l2 R SR (Max.)

JXCx-OMT0023

min] 200[ms] 300[ms] 500[10STMm] 1000[r/min] 500[ms] 1000[10STMm] 1500[r/min] 100[ms] 0[10STMm] a) b) c) d) e) f) g) h) i) j) Ignored.

Compact Rotary Actuator Series CRQ2

2 q w r y !5 i q w r y !5 !6 i Component Parts Component Parts Description Note Material No.

•

NPT, G) ,'" r .r "'" ',.. 1-::' : H I-::' r-Q Q , .J w =i" ~ I ~ ~ K F H -NJ ..!L M Stroke S + Stroke ZZ + Stroke (mmJ oS~((lr.;~ r;ilMg9 ' .:a6ra'~~ FT FZ 'AL QIl B E F FD FX FY G J 11 Ii. DC 0 " : '(mm~ .

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

E R * Mounting brackets are the same as standard type.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

E A ZZ + Stroke L8 + Stroke H A WH G L2 BG L9 VD E R VA G BG L9 2 x 4 x RT 80, 100 BG 2 x 4 x RT CP96K (D) B CW Bore size Stroke 32, 40 2 x EE 80, 100 80, 100 PL SL PL 2 x EE port D1 Sectional view A-A BG 2 x 4 x RT PL Cushion valve WB WA Width across flats SW WA WB A KK B B D KK E R A 2 x 4 x RT L2 BG L9 VD ZY + 2 x Stroke H + Stroke L8 + Stroke H A WH G G WH + Stroke A L2 BG VD L12 E R

Air Slide Table

(Without stroke adjuster) Nil Without auto switch r Adjuster options t Auto switch Symbol Adjuster type*3 Adjuster mounting position*1 * For applicable auto switches, refer to the next page.

Air Slide Table Series MXQ

Nil AS AT A BS Note 1) Without adjuster Extension end Retraction end Both ends Extension end Retraction end Both ends Extension end Retraction end Both ends Option combinations Rubber stopper Functional option Adjuster option Nil F R P FR FP Shock absorber BT Note 1) Nil B Note 1) Note 3) Note 3) Note 3) AS, CS CS CT C Metal stopper x x AT, CT x x Note 3) x x A, C x x Note 1) Series MXQ6

RSH

0 u #0 $2 #6 t #8 q y $0 $1 20 r !1 e @2 #7 #3 #1 !2 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 i @1 @4 @6 !0 @7 @9 !6 t i !7 q !8 #8 $1 Single acting (TL, TM) Double acting built-in spring (BL, BM) $0 y r !1 #7 e #4 #7 !

MXQ

Option Combinations Functional option Nil F R P FR FP Adjuster option Adjuster option Nil Without adjuster Extension end adjuster Retraction end adjuster Double end adjuster Extension end absorber Retraction end absorber Double absorber Extension end metal stopper Retraction end metal stopper Double metal stopper Nil (3) (3) (3) AS AT A BS BT B CS CT C ASBT ASCT BSAT BSCT CSAT CSBT AS AT

AC Servo Motor Driver (Network card type ）

Zero speed detection ZSP ZSP turns on when the servo motor speed is zero speed (50 r/min) or less. Zero speed can be changed with [Pr. PC07]. OFF level 70 r/min 1) Forward rotation direction 3) 2) 20 r/min (Hysteresis width) ON level 50 r/min [Pr. PC07] Servo motor speed 0 r/min [Pr.

1

U S Z NS NZ Non-polar r Pilot type Positive common Nil R Internal pilot External pilot !

V100

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

OFF level 70 r/min 1) Forward rotation direction 3) 2) 20 r/min (Hysteresis width) ON level 50 r/min [Pr. PC07] Servo motor speed 0 r/min [Pr.