Rated Flow Range: 10 to 1000 l/min, Output Specifications: Out: PNP; Func: Analog Current Output <-> External Input, Lead Wire: -, Unit Specification: -, Calibration Certificate: -, Flow Direction: -

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: FS (Out: PNP; Func: Analog Current Output <-> External Input), Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: M (SI Unit Only)

Rated Flow Range: 10 to 1000 l/min, Output Specifications: Out: PNP; Func: Analog Current Output <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: SI Unit Only, Calibration Certificate: -, Flow Direction: -

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

A 2 to 200 L/min flow range option has been added. A rear ported type has been added. A flow adjustment valve (0.05 to 5 L/min) has been added.

Rated flow range: PF3A701H: 10 TO 1000 lpm; PF3A702H: 20 to 2000 lpm; Large 2 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time; Can be converted to threaded model using modular connectors and piping adapters ; Accuracy: +/-3.0% F.S.

Rated flow range: PF3A701H: 10 TO 1000 lpm; PF3A702H: 20 to 2000 lpm; Large 2 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time; Can be converted to threaded model using modular connectors and piping adapters ; Accuracy: +/-3.0% F.S.

Rated flow range: PF3A701H: 10 TO 1000 lpm; PF3A702H: 20 to 2000 lpm; Large 2 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time; Can be converted to threaded model using modular connectors and piping adapters ; Accuracy: +/-3.0% F.S.

Rated flow range: PF3A701H: 10 TO 1000 lpm; PF3A702H: 20 to 2000 lpm; Large 2 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time; Can be converted to threaded model using modular connectors and piping adapters ; Accuracy: +/-3.0% F.S.

Rated flow range: PF3A701H: 10 TO 1000 lpm; PF3A702H: 20 to 2000 lpm; Large 2 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time; Can be converted to threaded model using modular connectors and piping adapters ; Accuracy: +/-3.0% F.S.

Rated flow range: PF3A701H: 10 TO 1000 lpm; PF3A702H: 20 to 2000 lpm; Large 2 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time; Can be converted to threaded model using modular connectors and piping adapters ; Accuracy: +/-3.0% F.S.

2

AD17-A AD27-A AD37-A AD47-A Spacer Y100-A Y200-A Y300-A Y400-A Y500-A Y600-A Spacer with bracket Y100T-A Y200T-A Y300T-A Y400T-A Y500T-A Y600T-A Check valve Note 5) Note 6) AKM2000-01-A (02)-A AKM3000-(01)-A 02-A AKM4000-(02)-A 03-A Pressure switch Note 6) IS10M-20-A IS10M-30-A IS10M-40-A IS10M-50-A IS10M-60-A T-spacer Note 5) Note 6) Y110-M5-A Y210-01-A (02)-A Y310-(01)-A 02-A Y410-(02

Speed Controller with Indicator

Construction: Elbow Type AS22l1FSl-U01-06A e AS-FS AS-FSG Uni-AS-FS !

Table of Contents

Seal guide B Slide plate Spacer Hexagon socket head cap screw MYMK-16-A MYMK-16-A MYMK-25-A MYMK-25-A MYMK-25-A Side seal unit Nickel plated Seal List No. !

reduces flow setting time

Flow control of the air blow and air purge Restrictor (Made to Order a P.598 ) Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 Restrictor (Without check valve) -X214 586 A Speed Controller with Indicator Elbow Type/Universal Type AS-FS Series RoHS Elbow Universal Brass 1 AS-F AS-F Electroless nickel plated Model TMH ASD Applicable tubing O.D.

CATALOG

All three series, VQ, SX and SY, are c o m p a c t , l i g h t w e i g h t a n d a e s t h e t i c i n a p p e a r a n c e .

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L4 [Out: IO-Link, Switch Output (N/P); Func: Analog Current Output <-> External Input; Monitor Unit Model: PFG310 Series], Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: Units Selection Function, Calibration Certificate: A (Yes)

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: ES (Out: PNP; Func: Analog Voltage Ouput <-> External Input), Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: Units Selection Function, Calibration Certificate: A (Yes)

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series], Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: Units Selection Function, Calibration Certificate: A (Yes)

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: Units Selection Function, Calibration Certificate: A (Yes)

Rated Flow Range: 10 to 1000 l/min, Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series], Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: Units Selection Function, Calibration Certificate: Yes, Flow Direction: -