Rated Flow Range: 0.5 to 50 L/min, Flow Adjustment Valve: None (Straight), Port Size: ø6, Output Specification: Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V, Lead Wire: w/o Lead Wire w/Connector, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: None (Straight), Port Size: C6 (ø6), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only)

Rated Flow Range: 0.5 to 50 L/min, Flow Adjustment Valve: None (Straight), Port Size: ø6, Output Specification: Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V, Lead Wire: Lead Wire w/Connector + Rubber Cover for Connector, Unit Specification: SI Unit Only, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

DIGITAL FLOW SWITCH, DIGITAL FLOW SWITCH, F27, 40.00000 lb

2-COLOR DIGITAL FLOW SWITCH, DIGITAL FLOW SWITCH, F27, 75 lb

2-COLOR DIGITAL FLOW SWITCH, DIGITAL FLOW SWITCH, F27, 75 lb

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

PF2M7.eng

: 25 L/min PF2M711: 50 L/min, PF2M721: 100 L/min [ ] 5% of maximums rated flow PF2M701: 0.05 L/min, PF2M702: 0.1 L/min PF2M705: 0.25 L/min, PF2M710: 0.5 L/min PF2M725: 1.3 L/min, PF2M750: 2.5 L/min PF2M711: 5 L/min, PF2M721: 10 L/min Socket Thank you for purchasing an SMC PF2M7## Digital Flow Switch.

1

SY 3 5 1 C6 1 0 3 SY q w r e t y u i o !0 !1 !2 !3 EX600 Top ported VM !

SY

/O Link M Mixed ... ... 16 R External pilot E MEWNET-F 16 stations Note) For mixed mounting, indicate C4 or C6 instead of "" in the station table.

Compact 5-Port Solenoid Valve

C2: 2 (SMC) C4: 4 (SMC) 9.1 (C6) 10.3 (C2, C4) D D 3/5 B 2 E 3/5 B 2 B 2 B 2 E B 2 27 (C2, C4) 25.8 (C6) A 4 A 4 A 4 1 P P 1 4 A 4 A S (Pitch of C2, C4) P = 6.5 One-touch fitting [1(P), 3/5(E) port] Applicable tubing: 8 (SMC) (Pitch of C6) P = 9 * Refer to page 97 for dimensions of external pilot and built-in silencer. * Refer to pages 65 to 68, 79, and 80 for dimensions when L6, b, and

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note 1) Note 2) A, B port size (Metric) A, B port size (Inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch

SQ1000/2000

-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 9 U side 3m SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 Cylinder port fitting C6: 6 One-touch fitting D side Manifold base (9 stations) SS5Q13-09FD2-D F kit (D-sub connector kit) SS5Q13-09FD2-D . 1 set: F kit 9 station manifold base SQ1130-5-C6 .

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Symbol Port size Applicable series C4 C6 M C4 C6 C8 M 02 2 stations Single wiring spec.

V100

Manifold specifications/Single base type B mount (P/E port size) Built-in One-touch fittings Applicable tubing O.D. 8 C8 Applicable valve model Piping P, E port Port size Symbol VV3Z4-S50: only C6 & C8.

Series SV

Specification SV2000 SV1000 Applicable series SV4000 SV3000 Manifold type Tie-rod base manifold 1(P: SUP)/3, 5(E: EXH) type Common SUP, EXH Valve stations (maximum) 20 stations Max. number of solenoids 32 points Port size 1(P)/3, 5(E) port C10, N11 C8, N9 C12, N11, 03 C12, N11 C4, C6, C8 N3, N7, N9 C3, C4, C6 N1, N3, N7 C8, C10, C12 N9, N11, 02, 03 C6, C8, C10 N7, N9, N11 4(A)/2(B) port Flow

SV

Manifold Specifications SV1000 SV2000 SV3000 SV4000 Applicable series Manifold type 1 (P: SUP)/3, 5 (E: EXH) type Valve stations (maximum) Max. number of solenoids Tie-rod base manifold Common SUP, EXH 20 stations 32 points 1(P), 3/5(E) port C8, N9 C3, C4, C6 N1, N3, N7 C10, N11 C4, C6, C8 N3, N7, N9 C12, N11 C6, C8, C10 N7, N9, N11 C12, N11, 03 C8, C10, C12 N9, N11, 02, 03 Port size 4(A)

CATALOG

I N G S C3 C4 C6 M5 N1 N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note C4: A, B port with One-touch fitting for 4 C6: A, B port with One-touch fitting for 6 SUP/EXH block assembly Description Manifold block assembly D side C4 C6 VZ3000-50A-2q P/R port with One-touch fitting for 8 For D side For U side VZ3000-51A-2 VZ3000-52A-2D w e End block assembly End block assembly DIN rail VZ3000-52A-2U r How to Increase Manifold Base Station expansion is possible

Table of Contents

EZ VFS1320-E/EZ VFS1420-E/EZ VFS1520-E/EZ Lead wire O.D.