2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

PF2M7 10 C6 L M q w r t y u i e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min w Flow adjustment valve/Piping entry direction With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02, N1, N2, F1, F2 Straight Symbol Port size Rated flow

PF2M7.eng

: 12.5 L/min, PF2M750: 25 L/min PF2M711: 50 L/min, PF2M721: 100 L/min [ ] 5% of maximums rated flow PF2M701: 0.05 L/min, PF2M702: 0.1 L/min PF2M705: 0.25 L/min, PF2M710: 0.5 L/min PF2M725: 1.3 L/min, PF2M750: 2.5 L/min PF2M711: 5 L/min, PF2M721: 10 L/min Socket Thank you for purchasing an SMC PF2M7## Digital Flow Switch.

1

port] Applicable tube O.D.: 12, 3/8" Applicable tube O.D.: 6, 1/4" 8, 5/16" 10, 3/8" (Station 1) (Station n) P 1 P 1 82.7 63.8 37.6 36.1 13.5 11.6 2 B 2 B 2 B 2 B 2 B 71.3 4 A 4 A 4 A 4 A E 4 A 3/5 3/5 E (Pitch) P = 20.5 14.7 (For DIN rail mounting) 12 10 25 21.3 23.5 L2 = L1 10.5 L3 = 20.5 x n1 + 70.5 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4)/2 L6 = 20.5 x n1 + 56 L7 = 47 x n2 + 83.5 n1:

Compact 5-Port Solenoid Valve

+ 15 x n2 + a + b x n3 + e L2 = 11.5 x n1 + 15 x n2 + e + 93.7 M = (L1 + c)/12.5 + 1 Decimal fractions are truncated.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

port] Applicable tubing O.D.: 12, 3/8" (Station 1) (Station n) X PE X PE P 1 P 1 82.7 2 B 2 B 2 B 2 B 2 B 76.8 63.8 60.3 71.3 37.6 36.1 13.5 11.6 4 A 4 A 4 A 4 A E 4 A 3/5 3/5 E 14.7 (For DIN rail mounting) 25 (Pitch) P = 20.5 21.3 23.5 12 10 L2 = L1 10.5 L3 = 20.5 x n1 + 70.5 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4)/2 L6 = 20.5 x n1 + 56 L7 = 47 x n2 + 83.5 One-touch fitting [4(A), 2(B)

Series SV

Tie-rod base manifold: SS5V1-W10S1D Stations (S, R, RS) (-D) C3, N1 C4, N3 C6, N7 U D B When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

Electric Actuator with Integrated Guide

reference plane1 17.5 Pitch = 100 60 (n1-1) x pitch 47.5 Section AA n1 100 200 300 400 500 600 n2 1 1 1 1 2 2 Stroke Model LTF6EPF100--X10 LTF6EPF200--X10 LTF6EPF300--X10 LTF6EPF400--X10 LTF6EPF500--X10 LTF6EPF600--X10 1.

LEC-OM02704CN

() RY(n2)E RY(n2)D RY(n2)C 0 0 0 1 0 0 1 2 0 1 0 3 3 0 1 1 4 1 0 0 5 1 0 1 6 1 1 0 7 1 1 1 8 . 0OFF 1ON RY(n1)ARY(n3)A50ms (RY(n1)ARY(n3)A)(15.12.4(1)) RY(n1)ARY(n3)A PD20(D-1)0 RY(n1)A RY(n+3)A 15 10 15 (2) () CN6 CC-Link () 1 2 CN6-14ON RXn0ON RXn0 RXn0 RXn1PA10 ONRXn1 RXn1 RXn1 RXn2OFF ONRXn2 RXn2 RXn2 CN6-16RXn3ON RXn3ONOFF ON(RYn0) (EMG) (RY(n1)ARY(n3)A) (LSP)(LSN) (A25

Fieldbus System

port] Applicable tube O.D.: 8, 5/16" (Station 1) (Station n) 59.5 P P 1 B 1 45.5 2 2 B 2 B 2 B 2 B 24.6 3/5 E 3/5 E 23 A 4 A 4 A 4 A 4 A 4 10 8.6 11.8 (For DIN rail mounting) 7.5 (Pitch) P = 10.5 18.3 13.5 18.3 L2 = L1 10.5 L3 = 10.5 x n1 + 53 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 42 L7 = 47 x n2 + 81 L1: DIN Rail Overall Length (mm) Valve stations (n1) I/O Unit stations

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

C85

1 w e !3 !

SV

3/5 E 60.7 2 B 2 B 2 B 2 B 74.5 P 1 P 1 74 (Station n1) (Station 1) (Station n2) (Station 1) Light/Surge voltage suppressor P 1 E 3 Individual EXH spacer SV100-05Interface regulator SV100-06Interface regulator MAX.14 60 45.5 Individual SUP spacer 10 (N7:7) (C6:3.2) (For DIN rail mounting) (7.5) 11.8 n1 = Valve stations n2 = Input block stations B B B B 109.5 102.9 111.4 118 100.4 91.9 A A

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Table of Contents

C D E F Dimensions Part no.

0.4

Note 2) A combination of Function N (Negative common) and E is unavailable. Since E has no polarity, it can also be used as a negative common.

CATALOG

I N G S C3 C4 C6 M5 N1 N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc.

CM2

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9 MB f l 9 h ZZ + Stroke MB1 3 Width across flats B 3 Width across flats B CA2 With rod boot (Both sides) e e CS1 C76 9 9 l + Stroke 9 l 9 f f C85 Cushion valve Width across flats 1.5 h + Stroke h ZZ + 2 x Stroke C95 With air cushion CP95 NCM NCA Built-in One-touch fittings One-touch fitting port size P D-X

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Type of actuation E Push-turn locking lever type 1 Normally closed (N.C.) 2 Normally open (N.C.)

SX

4, 6 n1: Number of SX3000s stations n2: Number of SX5000s stations (Station n) (Station 1) 2n2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 16 x n2 12.5 x n1 DIN rail DIN rail holding screw Manual override (Press and turn for the locking type.)