Rated Flow Range: 0.1 to 10 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/8, Output Specification: Out 1: IO-Link or NPN/PNP, Lead Wire: w/M12 Conversion Lead Wire and Connector, 0.1m, Unit Specification: SI Unit Only, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.1 to 10 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/8, Output Specification: Out 1: PNP; Out 2: PNP, Lead Wire: Lead Wire w/Connector + Rubber Cover for Connector, Unit Specification: SI Unit Only, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.1 to 10 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/8, Output Specification: Out 1: IO-Link or NPN/PNP, Out 2: Analog 4 to 20 mA, Lead Wire: w/M12 Conversion Lead Wire and Connector, 0.1m, Unit Specification: SI Unit Only, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA)

1

n1 + 16 x n2 + a + b x n3 L2 = 12.5 x n1 + 16 x n2 x 48 M = L1/12.5 + 1 Decimal fractions are truncated.

Electric Actuator with Integrated Guide

a=1000 a=2000 a=3000 L2 (mm) Mer Rolling Yawing 100 m L2 Mer 0 30 20 10 m Transfer load m (kg) 200 a=1000 a=2000 a=3000 L3 (mm) 100 L3 m Mey a 0 30 20 10 Transfer load m (kg) Refer to page 71 for deflection data. 34 38 Non-standard Motor/Horizontal Mount Specification Series LTF6 Dimensions/LTF6EPF(X10) Scale: 20% Photo micro sensor 50 30 thread depth 8 4-M5 x 0.8 E D Proximity sensor (2

Compact 5-Port Solenoid Valve

) (DIN rail mounting hole pitch: 12.5) (5.3) 18 (Fitting for the type with P/E ports on the U and/or D sides) 0.6 m, 1.5 m ,3 m (Lead wire length) (L3) Manifold block internal wiring specifications Nil: Double wiring S : Single wiring One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 10 (SMC) (Station n) (Station 1) 3/5 E 3/5 E 10.9 13.6 D D 66 56.6 B 2 S B 2 B 2 B 2 B 2 1 P P

LEC-OM02704CN

RY(n2)E () RY(n2)E RY(n2)D RY(n2)C 0 0 0 1 0 0 1 2 0 1 0 3 3 0 1 1 4 1 0 0 5 1 0 1 6 1 1 0 7 1 1 1 8 . 0OFF 1ON RY(n1)ARY(n3)A50ms (RY(n1)ARY(n3)A)(15.12.4(1)) RY(n1)ARY(n3)A PD20(D-1)0 RY(n1)A RY(n+3)A 15 10 15 (2) () CN6 CC-Link () 1 2 CN6-14ON RXn0ON RXn0 RXn0 RXn1PA10 ONRXn1 RXn1 RXn1 RXn2OFF ONRXn2 RXn2 RXn2 CN6-16RXn3ON RXn3ONOFF ON(RYn0) (EMG) (RY(n1)ARY(n3)A) (LSP)

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

B C3, N1 C4, N3 C6, N7 (R) (-D) Stations Tie-rod base manifold: 10-SS5V1-10 D Directional Control Valves Air Grippers Modular F.

Series SV

(S, R, RS) (-D) U D B C3, N1 C4, N3 C6, N7 When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

High Vacuum Angle Valve

switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Fieldbus System

m is number of I/O Units.

Aluminum High Vacuum Angle Valve

120C heater D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

SV

side D D D D D D SS5V1-16S3AD-06B-C61 set (manifold part no.)

C85

6.75 9 10.5 Floating joint: Series JA In the case of dimension without C M M U U D F G B B E H C E P A (mm) M Max. operating tension and compression power (kN) Maximum screwed depth P Allowable eccentricity U A B C D E F G H Bore Model Nominal thread dia.

0.4

cable (26P) without cable Flat ribbon cable (26P) with 1.5 m cable Flat ribbon cable (26P) with 3.0 m cable Flat ribbon cable (26P) with 5.0 m cable 25 pins IP40 compliant IP67 compliant 1 to 12 stations (24) FD0 FD1 FD2 FD3 D-sub connector (25P) without cable D-sub connector (25P) with 1.5 m cable D-sub connector (25P) with 3.0 m cable D-sub connector (25P) with 5.0 m cable 1 to 12 stations

Table of Contents

2.5 10 m 1.2 Response time (sec) Response time (sec) 8 m 2 0.9 5 m 8 m 1.5 0.6 5 m 1 3 m 3 m 0.3 0.5 1 m 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 1 m 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Detection distance (mm) Detection distance (mm) Piping tubing lengthResponse time Piping tubing lengthResponse time Nozzle Shape Please keep the nozzle shape as illustrated below.

7.4

) 22.8 10.5 7.4 58.5 39.7 41.8 9.2 22 28.5 22.9 20.4 10.5 8 8 3 x C2, C4, N1, N3 <1(P), 5(EA), 3(EB) port> C2: 2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting 8.7 With plug connector/light, built-in silencer S0716S-mM(O)-m 16.7 2-Position Double/4-Position Dual 3-Port Grommet: S07 6-mG-m 2 A B C 8 2 x 3.2 5.3 2 x C2, C4, N1, N3 <4(A), 2

SX

M D U D side U side B 2 to 17 2 to 10 stations 2 to 10 stations D U D side U side B 2 to 8 2 to 8 2 to 8 One-touch fitting for 5/32" N3 One-touch fitting for 5/32" N3 One-touch fitting for 1/4" N7 One-touch fitting for 1/4" N7 Both sides M Special specifications SX5000 Both sides M Special specifications SX5000 One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 Mixed M Mixed M

CATALOG

I P P L E F O R H6 ...6 X4 M M I/D T U B E H4 ... 4 X2.5 M M I/D T U B E +1.0 -0 Stroke Tolerance Rod End Thread Male Thread / Without Thread Mounting Method Panel Mount type Plug Mount kit as accessory P I S T O N R O D T H R E A D With B Without D I M E N S I O N S R E C O M M E N D E D M O U N T I N G H O L E D I M E N S I O N S F O R P L U G M O U N T Bore size (mm) Stroke A B C D E