PF2D

4 2 5 A 10 x 8 3/4" x 5/8" 5 1 5 B 19 x 16 1/2" x 3/8" 5 2 6 A 12 x 10 1" x 7/8" SMC 6 1 6 B 25 x 22 3/4" x 5/8" 6 2 19 x 16 : Basic size : With reducer Note) Please select an isometric fitting with the same size as the fitting at the flow sensor.

Digital Flow Switch (Remote type monitor unit)

to 186 1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x

PF2D

2 w y r !0 e New PFA q Body New PFA w Sensor Super PFA e Tube PPS r Housing A PPS t Housing B PPS y Housing C POM u Bushing PPS i Cap FKM o Gasket FKM !0 O-ring Stainless steel 304 !1 Thread PVC !2 Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 SUS304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

4-channel Flow Monitor (Remote type monitor unit)

1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x 10-2/

Flow Range: 40 (4~40 l/min), Tube Size: 19 (3/4), Output Specification: 2 (Pulse Output + Analog Output (4~20mA))

Flow Range: 4~40 l/min, Tube Size: 3/4, Output Specification: Pulse Output + Analog Output (4~20mA), Option: -

Flow Range: 40 (4~40 l/min), Tube Size: 19 (3/4), Output Specification: 1 (Pulse Output + Analog Output (1~5V)), Option: C (e-con Connector x 1 pc.)

Flow Range: 4~40 l/min, Tube Size: 3/4, Output Specification: Pulse Output + Analog Output (1~5V), Option: e-con Connector x 1 pc.

Digital Flow Switches Series PF2A

B F Accumulated pulse output Brown 1 Load ON OFF OUT1 Main circuit Main circuit 4 Black Analog output White A 50 msec 2 + 24 VDC Load DOWN MODE SET U P 3 Blue C 2-G 60 Load is an analog input equipment such as a voltmeter, ammeter.

Flow Range: 40 (4~40 l/min), Tube Size: 19 (3/4), Output Specification: 1 (Pulse Output + Analog Output (1~5V))

Flow Range: 4~40 l/min, Tube Size: 3/4, Output Specification: Pulse Output + Analog Output (1~5V), Option: -

PF2x2.eng

Input of the Set point 2 L/min, L CFM x 10-2, CFM x 10-1, ft3 x 10-2, ft3 x 10-1, gal(US)/min, gal(US) 1 Brown DC(+) Non-Reverse output Reverse output Refer to the product catalogue or SMC website (URL http://www.smcworld.com) for more information about panel cut-out dimensions.

PF2x3.eng

When setting, allow 7 digits or more between Set point 1 and Set point 2 (Set point 3 and Set point 4). 2: When Set point 1 = Set point 2 (Set point 3 = Set point 4), chattering may occur. Set value is calculated and set. Set value 4 Set value or 3 or 3 Measurement mode Do not use the product in a place where static electricity is a problem.

PF2D5.eng

Lead wire Lead wire to supply power and transmit output signals. (3 m) 1: Refer to the PF2D3 or PF2D2 operation manual for details of the flow monitors. 2: Load indicates analogue input equipment such as a voltmeter.

1

(Pitch) P = 19 (Pitch) P = 19 VM 33.9 26.1 42.2 4(A) port side: Blue (For rubber seal) : Gray (For metal seal) 2(B) port side: Yellow 85.8 XT34 (Slide locking manual override) PE FREE LOCK 3/5E B A B A B A B A B A A 4 A 4 A 4 A 4 A 4 21 59.9 128.8 SY5000: 95.7 SY7000: 96.7 01: 16.2 C: 14.5 (SY5000) 1P 61.8 (SY5000) 77.1 22.6 (SY7000) 57.7 (SY7000) X B 2 B 2 B 2 B 2 2 B 1/8 [A(A), 2(B) port

2

B C R V Q C B IN OUT IN OUT 2 x P (Port size) 2 x P (Port size) Clearance for maintenance G AC-A A Clearance for maintenance G AC-B Bracket (Option) AL30-A to AL40-06-A AL50-A AL60-A N T J M U J N T U M S S D R R C B V Q B C V Q IN OUT IN OUT Bracket (Option) 2 x P (Port size) A E Clearance for maintenance G 2 x P (Port size) Clearance for maintenance G A Applicable model AL10-A/AL20-A AL30

AC Servo Motor Driver (Network card type ）

_ _ 2 B 41 _ _ 4 B 10.4 _ _ 0 C 187 _ _ 2 C 40 _ _ 4 C 10 _ _ 0 D 173 _ _ 2 D 38 _ _ 4 D 9.7 _ _ 0 E 160 _ _ 2 E 37 _ _ 4 E 9.4 _ _ 0 F 150 _ _ 2 F 36 _ _ 4 F 9.1 _ _ 1 0 140 _ _ 3 0 35.2 _ _ 5 0 8.8 _ _ 1 1 132 _ _ 3 1 33.1 _ _ 5 1 8.3 _ _ 1 2 125 _ _ 3 2 31.3 _ _ 5 2 7.8 _ _ 1 3 118 _ _ 3 3 29.6 _ _ 5 3 7.4 _ _ 1 4 112 _ _ 3 4 28.1 _ _ 5 4 7.0 _ _ 1 5 107 _ _ 3 5 26.8 _ _ 5 5 6.7 _ _ 1

CATALOG

C E S S O R I E S S E R I E S N C Q 2 / C Q 2 D O U B L E R O D C L E V I S P I N A C C E S S O R I E S S E R I E S N C Q 2 / C Q 2 J A M N U T CQ2 D O U B L E R O D C L E V I S P I N CQ2 J A M N U T Snap Ring t L m Part No Dd9 d Bore Size C H B Part No d Bore Size l -0.06 ~ -0.03 5 0.7 Axial C Style 5 14.6 1.5 IY-G012 4.8 12 9.2 4 8 NTJ-015A M5x0.8 10.2 12 -0.06 ~ -0.03 5 0.7 Axial C Style