PF2D

1319 1913 19 IN side 4 4 5 (With reducer) 5 (With reducer) LQ1 fitting size: 5 59 1 39 12.7 LQ1 fitting size: 5 19 1S PF2D540 S (197) 86 56 1 39 19.05 19.05 With LQ1 fitting Size OUT side 5 6 (With reducer) 5 6 (With reducer) IN side 5 5 6 (With reducer) 6 (With reducer) Model 19 1925 2519 25 LQ1 fitting size: 6 56 1 49.5 392 Made to Order Related Products How to Order Fittings for a

Digital Flow Switch (Remote type monitor unit)

to 186 1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x

PF2D

Flow rate range Output for display unit Note 1) + analog output (1 to 5 V) Output for display unit Note 1) + analog output (4 to 20 mA) 3/8 1/2 3/4 1 2 11 13 19 Port size (inch) 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min Note 1) Output for the display units of PF2D 300/301 04 20 40 PF2D504 PF2D520 PF2D540 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Output specification Port size: (inch) Symbol Nil 1 2 Specification Series PF2D300 Series PF2D200/300 Series PF2D300 Applicable display unit (monitor) model 11 13 19 3/8 1/2 3/4 PF2D504 PF2D520 PF2D540 Output for display unit Output for display unit + analog output (1 to 5 V) Output for display unit + analog output (4 to 20 mA) Specifications for Sensor Unit Model PF2D504 PF2D520 PF2D540

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

to 4l/min 1.8 to 20l/min 4 to 40l/min 04 20 40 Output for display unit Note 1) + analog output (1 to 5V) Output for display unit Note 1) + analog output (4 to 20mA) Output specifications 1 2 Port size: (inch) Note 1) Output for the display units of PF2D 300/301 11 13 19 3/8 1/2 3/4 PF2D504 PF2D520 PF2D540 Specifications for Sensor Unit Model PF2D504 PF2D520 PF2D540 Measured fluid Liquid

4-channel Flow Monitor (Remote type monitor unit)

1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x 10-2/

Flow Range: 40 (4~40 l/min), Tube Size: 19 (3/4), Output Specification: 1 (Pulse Output + Analog Output (1~5V))

Flow Range: 4~40 l/min, Tube Size: 3/4, Output Specification: Pulse Output + Analog Output (1~5V), Option: -

Flow Range: 40 (4~40 l/min), Tube Size: 19 (3/4), Output Specification: 2 (Pulse Output + Analog Output (4~20mA)), Option: C (e-con Connector x 1 pc.)

Flow Range: 4~40 l/min, Tube Size: 3/4, Output Specification: Pulse Output + Analog Output (4~20mA), Option: e-con Connector x 1 pc.

Digital Flow Switches Series PF2A

Note 7) The flow switch conforms to the CE mark. 1 Digital Flow Switch Series PF2A For Air How to Order PF2A5 Remote Type Sensor Unit 10 01 C Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Option (Refer to page 35.) None e-con connector x 1 pc. Nil N F Rc NPT G Nil C The cable and connector are shipped unassembled.

Flow Range: 40 (4~40 l/min), Tube Size: 19 (3/4), Output Specification: 2 (Pulse Output + Analog Output (4~20mA))

Flow Range: 4~40 l/min, Tube Size: 3/4, Output Specification: Pulse Output + Analog Output (4~20mA), Option: -

PF2x2.eng

FLOW Hysteresis 1 Hysteresis 1 SET Set point 1 Set point 2 button (UP) button (DOWN) button (SET) ON Item Default settings Model Item Default setting Instantaneous flow PF2A2 series [10L] 1 to 10 L/min type (PF2A510) Connecting the wiring Attaching the sensor connector to the sensor wire Strip the sensor wire as shown. Do not cut the insulator.

PF2x3.eng

Hysteresis mode 2 Panel Item Default settings Model button (UP) Panel mount adapter Item Default setting ( ) PF2A30 series [10L] 1 to 10 L/min type (PF2A510) Indicator LED (OUT1) Set point 1 Set point 2 Hysteresis 1 Hysteresis 1 50% of max. rated flow [n_1] Input of the Set point 1 (OUT1) PF2A31 series [11L] 10 to 100 L/min type (PF2A511) button (SET) ON 50% of max. rated flow [n_2] Input

PF2D5.eng

Flow Sensor Operation Manual Piping Internal circuit and wiring example Summary of Product parts Output for PF2D3 + Analogue (1 to 5 V) type: PF2D5 -1 Use the product within the specified operating pressure range and temperature range. Proof pressure is 1.5 MPa for PF2D504/520 and 0.9 MPa for PF2D540. Proof pressure could vary according to the fluid temperature.

1

7 @1 @0 !9 !1 !0 MGP CY CX CK1 C(L)K CDJZ2B10/16-Z-B C(L)KU CKQ Component Parts CKZ2N No.

2

Specifications Model Standard specifications P1 P2 A B C D E F G H I VHS20 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 37.5 VHS30 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 Model Port size Specifications IN, OUT EXH IN OUT OUT EXH C(dm3/sbar) b Cv C(dm3/sbar) b Cv VHS20 1/8 1/8 2.4

AC Servo Motor Driver (Network card type ）

_ _ 1 A 346 _ _ 0 B 818 _ _ 1 B 333 _ _ 0 C 750 _ _ 1 C 321 _ _ 0 D 692 _ _ 1 D 310 _ _ 0 E 642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 7 7.

CATALOG

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44