Flow Range: 1.8~20 l/min, Tube Size: 1/2, Output Specification: Pulse Output + Analog Output (4~20mA), Option: e-con Connector x 1 pc.

s, Rise time: 1 ns140 g (without lead wire)1/2 inch tubeBody: New PFA, Sensor: New PFA, Tube: Super PFA

Table of Contents

mode 16-13-5 H P Z Hysteresis Hysteresis Hysteresis mode Panel-mounting Peak high display mode Peak low display mode PNP output Proof pressure Protective construction Zero out (Zero ADJ) 16-13-5 16-13-3 16-13-4 0-9 2-wire type pressure switch 16-13-5 16-13-2 10 Glossary of Terms A Absolute pressure The pressure based on the absolute vacuum condition (0 standard).

PF2D

Port size: (inch) Output specification 11 13 19 3/8 1/2 3/4 PF2D504 PF2D520 PF2D540 Symbol 1 2 Specification PF2D200/300 series PF2D300 series Applicable monitor unit (monitor) model Output for monitor unit + analog output (1 to 5 V) Output for monitor unit + analog output (4 to 20 mA) Refer to pages 202 and 203 for Flow Switch Precautions.

PF2D

Flow rate range Output for display unit Note 1) + analog output (1 to 5 V) Output for display unit Note 1) + analog output (4 to 20 mA) 3/8 1/2 3/4 1 2 11 13 19 Port size (inch) 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min Note 1) Output for the display units of PF2D 300/301 04 20 40 PF2D504 PF2D520 PF2D540 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Output specification Port size: (inch) Symbol Nil 1 2 Specification Series PF2D300 Series PF2D200/300 Series PF2D300 Applicable display unit (monitor) model 11 13 19 3/8 1/2 3/4 PF2D504 PF2D520 PF2D540 Output for display unit Output for display unit + analog output (1 to 5 V) Output for display unit + analog output (4 to 20 mA) Specifications for Sensor Unit Model PF2D504 PF2D520 PF2D540

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

to 4l/min 1.8 to 20l/min 4 to 40l/min 04 20 40 Output for display unit Note 1) + analog output (1 to 5V) Output for display unit Note 1) + analog output (4 to 20mA) Output specifications 1 2 Port size: (inch) Note 1) Output for the display units of PF2D 300/301 11 13 19 3/8 1/2 3/4 PF2D504 PF2D520 PF2D540 Specifications for Sensor Unit Model PF2D504 PF2D520 PF2D540 Measured fluid Liquid

4-channel Flow Monitor (Remote type monitor unit)

1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x 10-2/

Digital Flow Switches Series PF2A

(In case of output OUT2, n_1, 2 to be n_3, 4 and P_1, 2 to be P_3, 4.)

Digital Flow Switch (Remote type monitor unit)

to 186 1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x

Flow Range: 20 (1.8~20 l/min), Tube Size: 13 (1/2), Output Specification: 1 (Pulse Output + Analog Output (1~5V))

Flow Range: 1.8~20 l/min, Tube Size: 1/2, Output Specification: Pulse Output + Analog Output (1~5V), Option: -

PF2x2.eng

Input of the Set point 2 L/min, L CFM x 10-2, CFM x 10-1, ft3 x 10-2, ft3 x 10-1, gal(US)/min, gal(US) 1 Brown DC(+) Non-Reverse output Reverse output Refer to the product catalogue or SMC website (URL http://www.smcworld.com) for more information about panel cut-out dimensions.

PF2x3.eng

When setting, allow 7 digits or more between Set point 1 and Set point 2 (Set point 3 and Set point 4). 2: When Set point 1 = Set point 2 (Set point 3 = Set point 4), chattering may occur. Set value is calculated and set. Set value 4 Set value or 3 or 3 Measurement mode Do not use the product in a place where static electricity is a problem.

Flow Range: 20 (1.8~20 l/min), Tube Size: 13 (1/2), Output Specification: 1 (Pulse Output + Analog Output (1~5V)), Option: C (e-con Connector x 1 pc.)

Flow Range: 1.8~20 l/min, Tube Size: 1/2, Output Specification: Pulse Output + Analog Output (1~5V), Option: e-con Connector x 1 pc.

1

AXT100-FC26-1 1.5 m AXT100-FC20-1 AXT100-FC10-1 AXT100-FC26-2 3 m AXT100-FC20-2 AXT100-FC10-2 AXT100-FC26-3 5 m AXT100-FC20-3 AXT100-FC10-3 Specified Layout COM. COM. 25 26 23 24 COM. COM. 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 COM. COM. 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 9 10 7 8 7 8 7 8 7 8 5 6 5 6 5 6 5 6 3 4 3 4 3 4 3 4 1 2 1 2 1 2 1 2 COM. COM.

Table of Contents

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

2

Note 13) The combination of metal bowl: 2 and 8 is not available. 169 Modular F.R.L.

ZP

across flat 6 5 Width across flat 8 Width across flat 10 Width across flat 8 Width across flat 10 Vertical 2 2 2 2 3 13 A D B 3 13 A D B With Adapter: Vacuum Inlet 2 2 2 2 13 A D B B D A M6 x 0.75 M6 x 0.75 M3 x 0.5 7 0.3 M3 x 0.5 7 0.3 M8 x 0.75 M8 x 0.75 M3 x 0.5 M3 x 0.5 7 Vertical 3 3 13 With Buffer: Vacuum Inlet 3 3 7 0.3 0.8 2 1.5 0.8 3 3 2 2.5 0.8 2 2.5 0.8 1.5 2 0.3 Lateral With