Actuation: 3A (Air Operated), Thread: N01 (1/8 Port, NPT Thread), Option: None, Made to Order: X16 (Liquid Contact Seals SF7000)

PB", PA PB, "PROCESS PUMPS, "PROCESS PUMP lb

Actuation: Air Operated, Thread: 1/8 Port, NPT Thread, Option: None, Made to Order: Liquid Contact Seals SF7000

Process Pump

[For PB1013A / Air operated type] Turn off the solenoid valve to exhaust the air from the pump.

Actuation: 3A (Air Operated), Thread: N01 (1/8 Port, NPT Thread), Option: B (Foot), Made to Order: X16 (Liquid Contact Seals SF7000)

Actuation: Air Operated, Thread: 1/8 Port, NPT Thread, Option: Foot, Made to Order: Liquid Contact Seals SF7000

Recommended solenoid valve size:
PB1013A with a C value of 0.41 (CV value of 0.09) or higher Ex.) SYJ314 series

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

How to Order CRB2 A53 X16 B P D C S S 50 90 X6 RA1 CRBU2 CRB1 Built-in magnet Made-to-order symbol MSU Combination is available only when all the conditions are fulfilled in above combination chart 9. Pattern Suffix symbol CRJ Made-to-order for 1 kind Made-to-order for 2 kinds Nil P Auto switch Nil S U C -X7, -X16 -X6 -X10 -X11 CRA1 CRQ2 Refer to pages 11-7-50 to 51 for details.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

How to Order CRB2 A53 X16 B P D C S S 50 90 X6 RA1 CRBU2 CRB1 Built-in magnet Made-to-order symbol MSU Combination is available only when all the conditions are fulfilled in above combination chart 9.

Rotary Actuator

How to Order C RA1 Z D B S 50 90 X6 X16 M9BW CRB2 CRB1 Magnet Nil None D Built-in magnet MSU Model with solenoid valve * Refer to page 202 for model number with solenoid valve.

1

(C) (C) (C) (C) (C) (C) CA2 6 Cushion valve CA2Q Double acting, Single rod Low friction type NCM CBA1 Double acting, Single rod Cylinder with end lock 1.

Electric Actuators

(5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

LX

(5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

LX

(5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

AC Servo Motor Driver (Pulse input type/Positioning type ）

For the indexer method, "C" is displayed.

Air Slide Table

Rubber Stopper (AS, AT, A) Metal Stopper (CS, CT, C) (mm) A (mm) A B B C C Model Model MXQR6 MXQR8 MXQR12 MXQR16 MXQR20 MXQR25 MXQR6 MXQR8 MXQR12 MXQR16 MXQR20 MXQR25 26.5 25.5 10 10 26 25 29.5 28 10 9.5 29 30.5 33.5 32 9 8.5 33 35 34.5 33 6.5 6 34 32.5 37.5 37 3.5 4 37 36.5 42.5 40 2.5 1 42 39.5 28 Made to Order Individual Specifications: Air Slide Table/Reversible Type Series MXQR Please

2 Phase Stepper Motor/Without Motor Brake Series LXS

(5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

4 Port Solenoid Valve Series VQD1000

Body width of 10 mm, C: 0.22 dm3/(sbar) 2 W C: 0.27 dm3/(sbar) 3.2 W (U type: Large flow) Clean room specifications available as special. Since the main valve has no sliding seals, non-oil treatment specification at the fluid contacting section is available (Made-to-Order part no. X16). The external non-leak specification is also available (Series 10-).

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

C side parallelism to A side D M D side parallelism to B side B W A Port C MX M MTS B Distance from 0 of gauge dial when guide block is moved to full stroke after body is fixed on a base.