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A

www.stevenengineering.com I FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, CONTACT OFFICE. 1.239 PRECISION AIR CHUCK SERIES MHS D I M E N S I O N S MHS3-16D, 20D, 25D Part No AA AB B CB DC DO EC EO FX FY FZ G I J K NA NB O MHS3-16D 35 32 30 11 15 17 5 7 12.5 11 3 25 4 10 4 8 5h9 -0.03~0 2 MHS3-20D 38 35 36 13 18 20 6 8 14.5 13 3 27 5 12 5 10 6h9 -0.03-0 2.5 MHS3-25D 40 37 42 15 21 24 7 10

CATALOG

37 42 15 21 24 7 10 17 14.5 5 28 5 14 6 12 6h9 -0.03-0 3 Part No P Q R SA SB SC TB UA UB VA VB WA MHS3-16D M3x0.5 6 25 3.4 6.5 8 5 M3x0.5 4.5 2H9 0~0.025 2 17H9 0~0.043 MHS3-20D M5x0.8 7 29 3.4 6.5 9.5 6 M3x0.5 6 2H9 0~0.025 2 21H9 0~0.052 MHS3-25D M5x0.8 8 34 4.5 8 10 6 M4x0.7 6 3H9 0~0.025 3 26H9 0~0.052 Part No XA XB MHS3-16D 2H9 0~0.025 2 MHS3-20D 2H9 0~0.025 2 MHS3-25D 3H9 0~0.025 3

CQS

Mounting bolt Mounting bolt D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 Model C Model C D 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 CQSWB12-5D -10D -15D -20D -25D -30D CQSWB16-5D -10D -15D -20D -25D -30D CQSWB20-5D -10D -15D -20D CQSWB20-25D -30D -35D -40D -45D -50D CQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 30l x 35l x 40l x 45l x 50l x 55l M3 x 30l x 35l x

CQS

CQSWB125D 10D 15D 20D 25D 30D CQSWB165D 10D 15D 20D 25D 30D CQSWB205D 10D 15D 20D CQSWB2025D 30D 35D 40D 45D 50D CQSWB255D 10D 15D 20D 25D 30D 35D 40D 45D 50D 6.5 10 6.5 7 10 Note) Appropriate plain washer must be used for through-hole mounting.

Hydraulic

(M) 20D (M) 25D (M) 25D (M) 30D (M) 7 30D (M) 35D (M) 15.5 35D (M) 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) M5 x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 140l CH QB32 5D (M) 100D (M) M10 x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 165l x 190l CHQB80 10D (M) 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 30D (M) 7

Table of Contents

9 CC Replacement Parts RB Description Model Finger Kit Scraper assembly Grease pack Standard Tapped on upper and lower faces Tapped on all faces J MIS8-10D MIS8-20D MIS12-10D MIS12-20D MIS12-30D MIS20-10D MIS20-20D MIS20-30D MIS25-30D MIS25-50D MIS32-30D MIS32-50D Main parts no.

Microspeed Cylinder

L (Example) A93L 5m . Z (Example) F9NWZ Solid state auto switches with a "" symbol are produced upon receipt of order.

CJ2X/CUX/CQSX/CQ2X/CM2X

CJ2XB10-60 CQSXB20-20D Average speed 0.85 mm/s Average speed 0.88 mm/s 2.0 Average speed 0.43 mm/s Average speed 0.43 mm/s 2.0 Speed (mm/s) Displacement (mm) Speed (mm/s) Displacement (mm) Acceleration curve Acceleration curve 0 0 Operating direction IN Operating direction OUT 2.0 2.0 Operating direction IN Operating direction OUT 60 40 Displacement waveform Displacement waveform 20 20 20

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

12V 24V 3 wire (NPN) Relay PLC F9NW F9NWV For K Type Metric Bore size (mm) Foot Note1) Flange Diagnostic indication (2 color) 3 wire (PNP) F9PW F9PWV 12 16 20 25 CQSK-F012 CQSK-F016 CQSK-F020 CQSK-F025 CQSK-L012 CQSK-L016 CQSK-L020 CQSK-L025 F9BW F9BWV Water resistant (2 color) 2 wire F9BA Inch Lead wire length : Manufactured upon receipt of order. 0.5m (Example) A93 3m L (Example) A93L

CJ2X/CUX/CQSX/CQ2X/CM2X

Operates smoothly with minimal stick-slip. 0.01 0.01 0.1 RZQ 1 10 Cylinder operating conditions Particle diameter (m) MI W S 10-CM2XB20-50 CEP1 CJ2XB10-60 CQSXB20-20D Evaluation of air purity inside chamber 100 Air cleaning system Particle concentration (particles/cf) Average speed 0.85 mm/s Average speed 0.88 mm/s 2.0 CE1 Average speed 0.43 mm/s Average speed 0.43 mm/s 2.0 Speed (mm/s) Displacement

CJ2X/CUX/CQSX/CQ2X/CM2X

Operates smoothly with minimal stick-slip. 0.01 0.01 0.1 RZQ 1 10 Cylinder operating conditions Particle diameter (m) MI W S 10-CM2XB20-50 CEP1 CJ2XB10-60 CQSXB20-20D Evaluation of air purity inside chamber 100 Air cleaning system Particle concentration (particles/cf) Average speed 0.85 mm/s Average speed 0.88 mm/s 2.0 CE1 Average speed 0.43 mm/s Average speed 0.43 mm/s 2.0 Speed (mm/s) Displacement

MTS

IC circuit 5 V, 12 V 3-wire (PNP) Relay, PLC 2-wire 12 V Grommet 5 V, 12 V 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 12 V 2-wire Lead wire length symbols: 0.5 mNil (Example) A93 3 mL (Example) A93L 5 mZ (Example) F9NWZ Since there are other applicable auto switches than listed, refer to page 8-10-22 for details.

Magnet: D (Built-in), Mounting: B [Through Hole (Standard)], Type: Pneumatic, Bore Size: 20mm, Stroke: 20mm

Magnet: Built-in, Mounting: B [Through Hole (Standard)], Type: Pneumatic, Bore Size: 20mm, Stroke: 20mm, Body Option: -, Auto Switch Groove: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

MXS

NPN) F9NV F9N 3 wire(NPN) Diagnostic indication (2 color) F9PV F9P 3 wire(PNP) P.5.3-39 F9BV F9B 2 wire Relay, PLC 24V Yes Grommet 12V F9NWV F9NW 3 wire(NPN) F9PWV F9PW P.5.3-66 3 wire(PNP) F9BWV F9BW 2 wire PLC: Programmable Logic Controller *Lead wire length 0.5m (Ex.) 3m L A93 A93L Specifications Specifications are same as the standard style.

Rotary Table/

A93 A93L F9NWZ (Example) (Example) (Example) 13 Rotary Table Series MSQ Specifications 10 20 30 50 70 100 200 Size Air (non-lube) Fluid Maximum operating pressure Minimum operating pressure 1MPa With adjustment bolt Note 1) 0.6MPa With internal shock absorber 0.1MPa Basic type 0.2MPa 0.1MPa High precision type 0 to 60C (with no condensation) Ambient and fluid temperature Rubber bumper With