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Solid State Auto Switch:

[mm] (Reference value) 17 Weight 5.5 Most sensitive position [g] Auto switch model D-M9Nm-5 D-M9Pm-5 D-M9Bm-5 0.5 m (Nil) 7 6 Lead wire length 1 m (M) 13 11 3 m (L) 35 31 5 m (Z) 57 51 17-E683 D-M9m-5

Solid State Auto Switch:

[mm] (Reference value) 17 Weight 5.5 Most sensitive position [g] Auto switch model D-M9Nm-5 D-M9Pm-5 D-M9Bm-5 0.5 m (Nil) 7 6 Lead wire length 1 m (M) 13 11 3 m (L) 35 31 5 m (Z) 57 51 17-E683 D-M9m-5

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 40 (1 1/2"), Stroke: 2600 (26")

Magnet: Built-in, Mounting: Foot, Cushion: Air Cushion, Bore Size: 1 1/2", Stroke: 26", Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

ISO Cylinder: Standard Double Acting, Single/Double Rod Series C96 ø32, ø40, ø50, ø63, ø80, ø100, ø125

D-M9BM, M9NM, M9PM type (product of 1 m in length of the lead wire) are applicable from the shipment in May, 2008. 18 Series C96 Specifications Bore size (mm) 32 40 63 100 125 50 80 Action Double acting Fluid Air 1.5 MPa Proof pressure 1.0 MPa Max. operating pressure 0.05 MPa Min. operating pressure Ambient and fluid temperature Without auto switch: 20 to 70C With auto switch: 10 to 60C Lubrication

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 40 (1 1/2"), Stroke: 2600 (26"), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MDPC (1.0m Cord Length, M12-4 Pin Connector)

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 40 (1 1/2"), Stroke: 2600 (26"), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)

Magnet: Built-in, Mounting: Foot, Cushion: Air Cushion, Bore Size: 1 1/2", Stroke: 26", Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 1.0m Cord Length, M12-4 Pin Connector, Number: -

Magnet: Built-in, Mounting: Foot, Cushion: Air Cushion, Bore Size: 1 1/2", Stroke: 26", Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Magnet: Built-in, Mounting: Foot, Cushion: Air Cushion, Bore Size: 1 1/2", Stroke: 26", Auto Switch: B53--Reed, DC Volt >5 <24, LED, Lead Wire, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Magnet: Built-in, Mounting: Foot, Cushion: Air Cushion, Bore Size: 1 1/2", Stroke: 26", Auto Switch: H7A1--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire, Lead Wire or Prewired Connector: 3m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

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New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Table of Contents

OR-1860-120F F: FKM E: EPDM For VCB30 OR-2380-130F F: FKM E: EPDM For VCB40 OR-2600-180F F: FKM E: EPDM e When external leakage occurs after disassembling a valve, replace the above seals.

Electric Actuator

990 1090 1190 1290 1390 1490 1590 1690 1790 1890 1990 2090 2190 2290 2790 306 406 506 606 706 806 906 1006 1106 1206 1306 1406 1506 1606 1706 1806 1906 2006 2506 430 530 630 730 830 930 1030 1130 1230 1330 1430 1530 1630 1730 1830 1930 2030 2130 2630 6 6 8 8 10 10 12 12 14 14 16 16 18 18 20 20 22 22 28 400 400 600 600 800 800 1000 1000 1200 1200 1400 1400 1600 1600 1800 1800 2000 2000 2600

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

5 1000 1000 1341.5 1006 1178 12 5 1000 1100 1441.5 1106 1278 14 6 1200 1200 1541.5 1206 1378 14 6 1200 1300 1641.5 1306 1478 16 7 1400 1400 1741.5 1406 1578 16 7 1400 1500 1841.5 1506 1678 18 8 1600 1600 1941.5 1606 1778 18 8 1600 1700 2041.5 1706 1878 20 9 1800 1800 2141.5 1806 1978 20 9 1800 1900 2241.5 1906 2078 22 10 2000 2000 2341.5 2006 2178 22 10 2000 2500 2841.5 2506 2678 28 13 2600

Electric Actuator/Slider Type

5 1000 1000 1341.5 1006 1178 12 5 1000 1100 1441.5 1106 1278 14 6 1200 1200 1541.5 1206 1378 14 6 1200 1300 1641.5 1306 1478 16 7 1400 1400 1741.5 1406 1578 16 7 1400 1500 1841.5 1506 1678 18 8 1600 1600 1941.5 1606 1778 18 8 1600 1700 2041.5 1706 1878 20 9 1800 1800 2141.5 1806 1978 20 9 1800 1900 2241.5 1906 2078 22 10 2000 2000 2341.5 2006 2178 22 10 2000 2500 2841.5 2506 2678 28 13 2600

15

5 1000 1000 1341.5 1006 1178 12 5 1000 1100 1441.5 1106 1278 14 6 1200 1200 1541.5 1206 1378 14 6 1200 1300 1641.5 1306 1478 16 7 1400 1400 1741.5 1406 1578 16 7 1400 1500 1841.5 1506 1678 18 8 1600 1600 1941.5 1606 1778 18 8 1600 1700 2041.5 1706 1878 20 9 1800 1800 2141.5 1806 1978 20 9 1800 1900 2241.5 1906 2078 22 10 2000 2000 2341.5 2006 2178 22 10 2000 2500 2841.5 2506 2678 28 13 2600

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 40 (1 1/2"), Stroke: 1500 (15"), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: M (1m)