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The NCG provides precision mounting, short overall length, and high speed. Rubber bumpers are standard and an optional adjustable air cushion is available. Nine mounting styles include basic body, foot, single clevis, front or rear flange, front or rear trunnion, nose mount, and double clevis. Bore sizes range from 3/4in. to 2 1/2in. and standard stroke lengths from 1in. to 12in.. The NCG

The NCG provides precision mounting, short overall length, and high speed. Rubber bumpers are standard and an optional adjustable air cushion is available. Nine mounting styles include basic body, foot, single clevis, front or rear flange, front or rear trunnion, nose mount, and double clevis. Bore sizes range from 3/4in. to 2 1/2in. and standard stroke lengths from 1in. to 12in.. The NCG

Ionizer

Bar type Bar length Sensor Emitter cartridge type/Emitter material Bar length 300 mm 380 mm 620 mm 780 mm 1100 mm 1260 mm 1500 mm 1900 mm 2300 mm Symbol 300 380 620 780 1100 1260 1500 1900 2300 Nil E F G Without sensor Autobalance sensor [Body-mounting type] Symbol Nil C S J K Emitter cartridge type Emitter material With feedback sensor Autobalance sensor [High-precision type] Tungsten Silicon

Ionizer Series IZS31

Bar type Bar length Sensor Emitter cartridge type/Emitter material Bar length 300 mm 380 mm 620 mm 780 mm 1100 mm 1260 mm 1500 mm 1900 mm 2300 mm Symbol 300 380 620 780 1100 1260 1500 1900 2300 Without sensor Autobalance sensor [Body-mounting type] Nil E F G Symbol Nil C S J K Emitter cartridge type Emitter material With feedback sensor Autobalance sensor [High-precision type] Tungsten Silicon

Series AK1000

Vespel is a registered trademark of DuPont. 49 Intermediate flow (Tied-diaphragm) Single Stage Regulator for General Applications Series AK1400T Sub-atmospheric pressure delivery option Tied-diaphragm design High inlet pressure type Standard: Max. 2300 psig (15.9 MPa) HR (option): Max. 3000 psig (20.7MPa) Flow capacity to 400 slpm Body material: Stainless steel and Brass available Hastelloy

Series AP500

Vespel is a registered trademark of DuPont. 11 Intermediate flow (Tied-diaphragm) Single Stage Regulator for Ultra High Purity Series AP1400T Sub-atmospheric pressure delivery option Tied-diaphragm design For UHP gas delivery High inlet pressure type Standard: Max. 2300 psig(15.9 MPa) HR(option): Max. 3000 psig (20.7 MPa) Flow capacity : to 400 slpm Body material: 316L SS secondary remelt

AZ1000

When the source pressure is 2300 psig (15.9 MPa), achievable delivery pressure is around 129 psig (0.89 MPa). 2) 14 to 194F (10 to 90C) for Vespel seat. 3) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). 4) Tested with Helium gas inlet pressure 1000 psig (7 MPa). 5) Mass, including individual boxed weight, may vary depending on connections or options. 36 Series AZ1400T Single

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

. -4- 1.1.2 Specification Model LEJS100T9H LEJS100T9A LEJS100T9B Stroke [mm] *1 200300400500600800100012001500 3000(mm/s2) 60 150 400 5000(mm/s2) 43 93 150 Horizontal 9800(mm/s2) 22 36 Work load [kg] *2 3000(mm/s2) 14 29 80 5000(mm/s2) 12 29 30 Vertical 9800(mm/s2) 8 9 Actuatr specifications Electric specifications Lock unit to 500 2300 1250 500 Max. speed *3 501 to 1000 1600 800 320 [mm/

DOC1003626

Checksum ASCII:LRC RTU:CRC 7,9 0xC2,0xC1 Trailer CR/LF None Total quantity of byte 11 5 HRS400-A-46 3.12 Negative response 3-17 DOC1003626 Chapter 3 Serial communication 3.13 Register map Address Contents Value R/W Hexadecimal number : F334h, FD44h to 08FCh Decimal number :-3276, -700 to 2300(0.1C) 0h Circulating fluid discharge temperature Hexadecimal number : 8000h, 0h to 06F3h Decimal

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

XLGR Series

standard material (FKM) at ambient temperature, excluding gas permeation Flange type KFNW,KDN Main material Note 2 Body :A6063,A50521 Critical part :SUS304,A6061 Bellows (Bypass valve): SUS316L Seal material: FKM Surface treatment for body Outside: hard anodized Inside: basis material Pilot pressure MPa 0.4 to 0.6 Main exhaust valve Rc1/8 Port size Bypass valve M5 Main exhaust valve 1000 2300

IDX-OM-W028

Ambient Temperature 32 Pressurized Dew Point 10 Working Fluid Compressed Air Operating Range Inlet Air Temperature 580 Inlet Air Pressure MPa 0.151.0 Ambient Temperature 240 (Relative Humidity of 85% or less) Phase 1 phase Power source (Note 4) Electrical Specification Voltage V AC230V10% 50Hz (Note 4) Operating current (Note 2) A 4.3 6.9 10.7 Power consumption (Note 2) W 960 1570 2300

IZ-OMK0015

[Number of emitter cartridges/Bar weight] Bar length (mm) 300 380 620 780 1100 1260 1500 1900 2300 Number of emitter cartridges 3 4 7 9 13 15 18 23 28 Weight (g) 330 400 600 720 1000 1100 1500 2000 2500 29 Doc.No.IZ-OMK0015D 4-2.

XLG Series

10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN) Main material Body : Aluminum alloy, critical part : SUS304, FKM (standard seal material) Note 2 Surface treatment for body Outside: hard anodized Inside: basis material Pilot pressure MPa(G) 0.3 to 0.6 0.4 to 0.6 Air consumption cm3 Note 3 0.5MPa 38 91 430 280 500 1000 2300

Compact Cylinder/Guide Rod Type Series CQM

Applicable cylinder bore size Mass (g) Individual -X 1980 1900 1820 1740 1661 2061 2141 2220 2300 2695 3090 3156 3053 2950 2848 2745 3260 3362 3465 3568 4088 4609 BQ-2 32 to 100 1.5 Technical data Add each mass of auto switches and mounting brackets. Refer to pages 1263 to 1371 for auto switch mass.

P

LOUIS, MO (314) 209-0080 DETROIT, MI (810) 463-2300 LOS ANGELES, CA (714) 669-1701 NASHVILLE, TN (615) 331-0020 PORTLAND, OR (503) 252-9299 CLEVELAND, OH (330) 963-2727 BOSTON, MA (978) 326-3600 TAMPA, FL (813) 243-8350 HOUSTON, TX (713) 460-0762 MILWAUKEE, WI (414) 827-0080 NEWARK, NJ (908) 253-3241 RICHMOND, VA (804) 222-2762 COLUMBUS, OH (614) 895-9765 CHARLOTTE, NC (704) 597-9292 TULSA

Pneumatics, Inc.

LOUIS, MO (314) 209-0080 DETROIT, MI (810) 463-2300 LOS ANGELES, CA (714) 669-1701 NASHVILLE, TN (615) 331-0020 PORTLAND, OR (503) 252-9299 CLEVELAND, OH (330) 963-2727 BOSTON, MA (978) 326-3600 TAMPA, FL (813) 243-8350 HOUSTON, TX (713) 460-0762 MILWAUKEE, WI (414) 827-0080 NEWARK, NJ (908) 253-3241 RICHMOND, VA (804) 222-2762 COLUMBUS, OH (614) 895-9765 CHARLOTTE, NC (704) 597-9292 TULSA

lPSMt

Harris Blvd. 44345 Macomb Industrial Dr. 3434 US Hwy. 22 West, Ste. 1 10 8507-H Benjamin Road Charlotte, NC 28269 Clinton Township, Ml 48036 Somerville, NJ 08876 Tampa, FL 33634 Tel: (704) 597-9292 Tel: (810) 463-2300 Tel: (908) 253-3241 Tel: (813) 243-8350 Fax: (704) 596-9561 FAX: (810) 463-2344 FAX: (908) 253-3452 FAX: (813) 243-8621 SMC Pneumatics Inc. (Chicago) SMC Pneumatics Inc.

lPSMt

Harris Blvd. 44345 Macomb Industrial Dr. 3434 US Hwy. 22 West, Ste. 1 10 8507-H Benjamin Road Charlotte, NC 28269 Clinton Township, Ml 48036 Somerville, NJ 08876 Tampa, FL 33634 Tel: (704) 597-9292 Tel: (810) 463-2300 Tel: (908) 253-3241 Tel: (813) 243-8350 Fax: (704) 596-9561 FAX: (810) 463-2344 FAX: (908) 253-3452 FAX: (813) 243-8621 SMC Pneumatics Inc. (Chicago) SMC Pneumatics Inc.