Contents 150 NC1AW150-PS 200 NC1AW200-PS-XB5 200 NC1AW200-PS 250 NC1AW250-PS-XB5 250 NC1AW250-PS 325 NC1AW325-PS-XB5 325 NC1AW325-PS 400 NC1AW400-PS-XB5 400 NC1AW400-PS Rod Option: Non-Rotating Bore Size (mm) Kit no. Contents 150 NC1AK150-PS 200 NC1AK200-PS 250 NC1AK250-PS Rod Option: Single, Special Option: High Temp. Rod Option: Single, Special Option: Low Temp. Bore Size (mm) Kit no.
CH2F80C-PS CH2G80C-PS CH2H80C-PS CH2E100C-PS CH2F100C-PS CH2G100C-PS CH2H100C-PS CH2E40B-PS CH2F40B-PS CH2G40B-PS CH2H40B-PS CH2E50B-PS CH2F50B-PS CH2G50B-PS CH2H50B-PS CH2E63B-PS CH2F63B-PS CH2G63B-PS CH2H63B-PS CH2E80B-PS CH2F80B-PS CH2G80B-PS CH2H80B-PS CH2E100B-PS CH2F100B-PS CH2G100B-PS CH2H100B-PS Piston seal NBR 40 Cylinder tube gasket NBR Holder gasket NBR B-series rod: Set of left
New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2
Contents Contents 12 16 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 CQ2B12-PS CQ2B16-PS CQ2B20-PS CQ2B25-PS CQ2B32-PS CQ2B40-PS CQ2B50-PS CQ2B63-PS CQ2B80-PS CQ2B100-PS CQ2BH20-PS CQ2BH25-PS CQ2BH32-PS CQ2BH40-PS CQ2BH50-PS CQ2BH63-PS CQ2BH80-PS CQ2BH100-PS Kits include items i, o, !0 from the table. Kits include items i, o, !0 from the table. Seal kit includes i, o, !0.
Contents Contents Series 20 25 32 40 50 63 80 100 12 16 20 25 32 40 50 63 80 100 CQ2BH20-PS CQ2BH25-PS CQ2BH32-PS CQ2BH40-PS CQ2BH50-PS CQ2BH63-PS CQ2BH80-PS CQ2BH100-PS CQ2B12-PS CQ2B16-PS CQ2B20-PS CQ2B25-PS CQ2B32-PS CQ2B40-PS CQ2B50-PS CQ2B63-PS CQ2B80-PS CQ2B100-PS Set of nos. above i, o, !0. Pneumatic Air-hydro Set of nos. above i, o, !0. Seal kits includes i o !0.
Bore size (mm) 12 16 20 25 32 40 50 63 80 100 Note Pneumatic (Non-lube) CQ2B12-PS CQ2B16-PS CQ2B20-PS CQ2B25-PS CQ2B32-PS CQ2B40-PS CQ2B50-PS CQ2B63-PS CQ2B80-PS CQ2B100-PS Air-hydro CQ2BH20-PS CQ2BH25-PS CQ2BH32-PS CQ2BH40-PS CQ2BH50-PS CQ2BH63-PS CQ2BH80-PS CQ2BH100-PS Piston rod e Collar A set of left nos. !2, !3 and !
Contents Contents Series 20 25 32 40 50 63 80 100 12 16 20 25 32 40 50 63 80 100 CQ2BH20-PS CQ2BH25-PS CQ2BH32-PS CQ2BH40-PS CQ2BH50-PS CQ2BH63-PS CQ2BH80-PS CQ2BH100-PS CQ2B12-PS CQ2B16-PS CQ2B20-PS CQ2B25-PS CQ2B32-PS CQ2B40-PS CQ2B50-PS CQ2B63-PS CQ2B80-PS CQ2B100-PS Set of nos. above i, o, !0. Pneumatic Air-hydro Set of nos. above i, o, !0. Seal kits includes i o !0.
1(PV)(PS PD) PD PE PS Table (2) PV Part no.
CG5A63SR-PS CG5A63SV-PS CG5N80SR-PS CG5N80SV-PS CG5A80SR-PS CG5A80SV-PS CG5N100SR-PS CG5N100SV-PS CG5A100SR-PS CG5A100SV-PS Contents Nos. o and !
POSITIONING MODE (Note 2) I/O signals in control modes Related parameter CP CL PS Pin No.
Release flow rate adjusting needle + + SMC SMC PD (PS 1(PV) PD) (PS 1(PV) PD) (PS 3(PV) PD) 61.5 A 50.50 60 PD PD PD 50.5 A PD 50 PE PE PE EXH 28.5 33 PS PS 7.5 PS 21.5 20.5 0.5 PS P PV PV PV 10 PV 20 5 Common EXH port (EXH.)1 1/8 (Rc, NPTF, G) 2.5 3 37.4 22.5 Pitch = 21 44 Common air pressure SUP port (PV) 1/8 (Rc, NPTF, G) Common pilot pressure SUP port (PS) 2 x M5 Common vacuum pressure
PD PD PD PD PE PE PS PS PS PS PS PS PS PS PE PE PD PD PD PD PE PE 962 Large Size Vacuum Module: Ejector System Series ZR Manifold/System Circuit Example When not using individual spacer When using individual spacer Ejector 1 Ejector 2 ZA ZX (PE) (PE) ZR ZM ZMA ZQ ZH ZU Individual Spacer ZR1-R1-1 ZL ZY PV: Air pressure supply port PS: Pilot pressure supply port PD: Release pressure supply
Common EXH port Common PS/PD ports Application ZZK2mA-Am1m Yes PS = PD Ejector common exhaust PV = PS = PD ZZK2mA-Am1m-D Yes PS PD Ejector common exhaust PV = PS PD Standard supply pressure 0 Ejector individual exhaust PV = PS = PD Supply pressure ZZK2mA-Am2m ZZK2mA-P2m None PS = PD Vacuum pump system PV PS = PD Operating Supply Pressure Caution Ejector individual exhaust PV = PS PD ZZK2mA-Am2m-D
Description 12 MGQ12-PS 16 MGQ16-PS 20 MGQ20-PS 25 MGQ25-PS 32 MGQ32-PS 40 MGQ40-PS 50 MGQ50-PS 63 MGQ63-PS 80 MGQ80-PS 100 MGQ100-PS !9 Seal kit Seal kit includes !9 to @2.
0 Piston seal CQ2B20V-PS CQ2B20R-PS 20 25 32 40 50 63 80 100 CQ2B20R-PS CQ2B25R-PS CQ2B32R-PS CQ2B40R-PS CQ2B50R-PS CQ2B63R-PS CQ2B80R-PS CQ2B100R-PS CQ2B20V-PS CQ2B25V-PS CQ2B32V-PS CQ2B40V-PS CQ2B50V-PS CQ2B63V-PS CQ2B80V-PS CQ2B100V-PS CQ2B25V-PS CQ2B25R-PS !1 Rod seal CQ2B32V-PS CQ2B32R-PS CQ2B40V-PS CQ2B40R-PS Set of left nos. !0, !1, !2. !
0 Piston seal CQ2B20V-PS CQ2B20R-PS 20 25 32 40 50 63 80 100 CQ2B20R-PS CQ2B25R-PS CQ2B32R-PS CQ2B40R-PS CQ2B50R-PS CQ2B63R-PS CQ2B80R-PS CQ2B100R-PS CQ2B20V-PS CQ2B25V-PS CQ2B32V-PS CQ2B40V-PS CQ2B50V-PS CQ2B63V-PS CQ2B80V-PS CQ2B100V-PS CQ2B25V-PS CQ2B25R-PS !1 Rod seal CQ2B32V-PS CQ2B32R-PS CQ2B40V-PS CQ2B40R-PS Set of left nos. !0, !1, !2. !
CH2G50B-PS CH2H50C-PS CH2H50B-PS Nos. @1 through #0 from the chart at left CH2E63C-PS CH2E63B-PS CH2F63C-PS CH2F63B-PS 63 CH2G63C-PS CH2G63B-PS CH2H63C-PS CH2H63B-PS CH2E80C-PS CH2E80B-PS CH2F80C-PS CH2F80B-PS 80 CH2G80C-PS CH2G80B-PS CH2H80C-PS CH2H80B-PS CH2E100C-PS CH2E100B-PS CH2F100C-PS CH2F100B-PS 100 CH2G100C-PS CH2G100B-PS CH2H100C-PS CH2H100B-PS Seal kit consists of items @1 through
SET button PS Use this button to switch the mode and set the set value.
MHSL32-PS MHSL25-PS MHSL20-PS MHSL16-PS !