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Bore Size: 25mm, Pilot Port Location: R (Right), Stroke: 15mm, Mounting Bolt: L (w/Mounting Bolt)
Bore Size: 25mm, Pilot Port Location: Right, Stroke: 15mm, Mounting Bolt: w/Mounting Bolt, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Bore Size: 25mm, Pilot Port Location: R (Right), Stroke: 15mm, Mounting Bolt: L (w/Mounting Bolt), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)
Bore Size: 25mm, Pilot Port Location: R (Right), Stroke: 15mm, Mounting Bolt: L (w/Mounting Bolt), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)
Bore Size: 25mm, Pilot Port Location: Right, Stroke: 15mm, Mounting Bolt: w/Mounting Bolt, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -
Bore Size: 25mm, Pilot Port Location: Right, Stroke: 15mm, Mounting Bolt: w/Mounting Bolt, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -
Compact 9 A Compact Cylinder with Linear Guide MXZ Series Dimensions: MXZ25 MXZ25Standard (Pilot port location: Front) 4 x M3 x 0.5 depth 6.5 4 x 6 24 24 2 x 3.4 (Through holes for mounting) 54.9 (2.5) 2 x M5 x 0.8 (Pilot port) 16.75 42.3 + Stroke 44 + Stroke 39.3 32.2 + Stroke 4.5 9.5 16.75 2.5 33.5 22.2 + Stroke 21.4 33.5 (57.4) 4 x M3 x 0.5 depth 2.5 24 8 +0.1 10 0 depth 2.5 Auto switch 24 MXZ25R
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
HEC006 8 to 15L/min And HEC012 10 to 15L/min When the flow rate of the radiating water is not enough, cooling capacity will decline. Meanwhile, when the flow rate is extremely small, alarm (Err14) may occur and the temperature of the radiating water might be extremely high. If a resin tubing is used for piping under these circumstances, the tubing might get softened and exploded.
Take safety margins into consideration in the customers machine. 9.5.1 Performance of HED003 Conditions; Recirculating fluid: water (flow rate 15L/min), Facility water flow rate: 5L/min, Ambient temp.: 25oC 1) Cooling capacity 800 Facility water 10oC Facility water 25oC 600 Cooling capacity W Facility water 35oC 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig. 9-7 Cooling
MHR3-10R/MDHR3-10l MHR3-10R/MDHR3-10l 10 10 Pressure 0.6MPa 0.6MPa Pressure 8 8 0.5MPa External hold 0.5MPa Holding force (N) Holding force (N) 6 6 0.4MPa 0.4MPa 4 4 0.3MPa 0.3MPa 0.2MPa 2 2 0.2MPa L 0 10 20 30 40 50 0 10 20 30 40 50 Holding point L (mm) Holding point L (mm) Internal hold MHR3-15R/MDHR3-15l MHR3-15R/MDHR3-15l 20 20 Pressure 0.6MPa Pressure 0.6MPa 15 15 L 0.5MPa 0.5MPa Holding
Control method PID control Ambient temperature andhumidity and altitude 12 Temperature:5 to 40,Humidity:30 to 70%,Altitude: Less than 3000m Circulating fluid*3 Tap water, 15% ethylene glycol aqueous solution Operating temperature range1 5 to 35 Cooling capacity (50/60Hz) 4 W 4600/ 5100 4800/ 5800 Heating capacity (50/60Hz) 5 W 1000/ 1200 1100/ 1200 Temperature stability 6 0.1 7 MPa 0.34(at 15L